Karolo e ka pele ea mohala oa tlhahiso e tšoana le ho beha motheo le ho haha marako a ntlo. Ha ho etsoa li-semiconductor, sethala sena se kenyelletsa ho theha meaho ea mantlha le li-transistors holim'a lesela la silicon.
Mehato ea bohlokoa ea FEOL:
1. Ho hloekisa:Qala ka sephaphatha se tšesaane sa silicon 'me u se hloekise ho tlosa litšila leha e le life.
2. Oxidation:Holisa lera la silicon dioxide holim'a sephaphatha ho arola likarolo tse fapaneng tsa chip.
3. Photolithography:Sebelisa photolithography ho hokela lipaterone holim'a sephaphatha, joalo ka ho taka lipolane tse nang le khanya.
4. Etching:Tlosa silicon dioxide e sa batleheng ho senola mekhoa e lakatsehang.
5. Doping:Hlahisa litšila ka har'a silicon ho fetola thepa ea eona ea motlakase, ho theha li-transistors, li-block tsa motheo tsa chip efe kapa efe.
![Etching](http://www.semi-cera.com/uploads/Etching.jpg)
Mafelo a Bohareng ba Mola (MEOL): Ho hokahanya Matheba
Bohareng ba mohala oa tlhahiso ho tšoana le ho kenya wiring le lipeipi tsa metsi ka tlung. Mokhahlelo ona o shebane le ho theha likhokahano lipakeng tsa li-transistors tse entsoeng sethaleng sa FEOL.
Mehato ea bohlokoa ea MEOL:
1. Dielectric Deposition:Deposit insulating layers (e bitsoang dielectrics) ho sireletsa li-transistors.
2. Mokhoa oa ho Kopana:Etsa mabitso ho hokahanya li-transistors le lefats'e le kantle.
3. Khokahano:Eketsa likarolo tsa tšepe ho theha litsela tsa mats'oao a motlakase, tse ts'oanang le ho thaepa ntlo ho netefatsa hore ho na le matla a sa tsitsang le phallo ea data.
Qetellong ea Mola (BEOL): Finishing Touches
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Karolo e ka morao ea mohala oa tlhahiso e tšoana le ho eketsa lintlha tsa ho qetela tsa ntlo-ho kenya lisebelisoa, ho penta le ho netefatsa hore ntho e 'ngoe le e' ngoe e sebetsa. Ha ho etsoa li-semiconductor, sethala sena se kenyelletsa ho kenyelletsa likarolo tsa ho qetela le ho lokisa chip bakeng sa ho paka.
Mehato ea bohlokoa ea BEOL:
1. Mekhahlelo e Eketsehileng ea Metal:Kenya likarolo tse ngata tsa tšepe ho matlafatsa khokahano, ho netefatsa hore chip e khona ho sebetsana le mesebetsi e rarahaneng le lebelo le phahameng.
2. Boikemisetso:Sebelisa likarolo tse sireletsang ho sireletsa chip ho senya tikoloho.
3. Teko:Etsa tlhahlobo e matla ea chip ho netefatsa hore e kopana le litlhaloso tsohle.
4. Ho qoela:Khaola sephaphatha ka lichifi ka bomong, e 'ngoe le e 'ngoe e loketse ho paka le ho sebelisoa lisebelisoa tsa elektroniki.
Nako ea poso: Jul-08-2024