Indasteri ea semiconductor e bona kholo e e-so ka e e-ba teng, haholo-holo sebakeng sasilicon carbide (SiC)matla a elektronike.Ka bongata bo boholosephaphathamasela a ntseng a hahuoa kapa a atolosoa ho fihlela tlhokahalo e ntseng e eketseha ea lisebelisoa tsa SiC likoloing tsa motlakase, boom ena e fana ka menyetla e makatsang ea kholo ea phaello.Leha ho le joalo, e boetse e hlahisa liphephetso tse ikhethang tse hlokang litharollo tse ncha.
Bohareng ba tlhahiso e ntseng e eketseha ea lefats'e ea SiC chip ke tlhahiso ea likristale tsa boleng bo holimo tsa SiC, li-wafers le epitaxial layers.Mona,semiconductor-grade graphitelisebelisoa li bapala karolo ea bohlokoa, ho thusa kholo ea kristale ea SiC le ho beoa ha likarolo tsa SiC epitaxial.Setsi sa mocheso oa graphite le ho se sebetse ho etsa hore e be ntho e ratoang haholo, e sebelisoang haholo ho li-crucibles, pedestals, li-planetary disks, le li-satellites ka har'a khōlo ea kristale le mekhoa ea epitaxy.Leha ho le joalo, maemo a thata a ts'ebetso a baka phephetso e kholo, e lebisang ho senyeha ka potlako ha likarolo tsa graphite 'me ka mor'a moo ho sitisa tlhahiso ea likristale tsa boleng bo phahameng ba SiC le likarolo tsa epitaxial.
Tlhahiso ea likristale tsa silicon carbide e kenyelletsa maemo a thata haholo a ts'ebetso, ho kenyelletsa le mocheso o fetang 2000 ° C le lintho tse senyang haholo tsa khase.Hangata sena se fella ka ho bola ho ho feletseng ha li-crucible tsa graphite ka mor'a mekhoa e mengata ea ts'ebetso, kahoo ho eketsa litšenyehelo tsa tlhahiso.Ho phaella moo, maemo a thata a fetola thepa ea holim'a likarolo tsa graphite, e senyang ho pheta-pheta le botsitso ba ts'ebetso ea tlhahiso.
E le ho loantša liphephetso tsena ka katleho, theknoloji ea ho roala e sireletsang e hlahile e le phetoho ea papali.Liaparo tse sireletsang tse thehiloeng hotantalum carbide (TaC)li hlahisitsoe ho rarolla mathata a ho senyeha ha karolo ea graphite le khaello ea phepelo ea graphite.Lisebelisoa tsa TaC li bonts'a mocheso o qhibilihang o fetang 3800 ° C le khanyetso e ikhethang ea lik'hemik'hale.Theknoloji ea ho sebelisa mouoane oa lik'hemik'hale (CVD),Liaparo tsa TaCe nang le botenya ba ho fihla ho limilimithara tse 35 e ka kenngoa ka mokhoa o se nang moeli holim'a likarolo tsa graphite.Lera lena le sireletsang ha le ntlafatse botsitso ba thepa feela empa hape le eketsa nako ea bophelo ea likarolo tsa graphite, ka lebaka leo le fokotsa litšenyehelo tsa tlhahiso le ho ntlafatsa ts'ebetso ea ts'ebetso.
Semicera, mofani ea ka sehloohong oaLiaparo tsa TaC, e thusitse haholo ho fetola indasteri ea semiconductor.Ka theknoloji ea eona e tsoetseng pele le boitlamo bo sa thekeseleng ba boleng, Semicera e nolofalelitse bahlahisi ba semiconductor ho hlola mathata a bohlokoa le ho fihlela katleho e ncha.Ka ho fana ka litlolo tsa TaC tse nang le ts'ebetso e ke keng ea lekanngoa le ho ts'epahala, Semicera e tiisitse boemo ba eona e le molekane ea tšeptjoang oa lik'hamphani tsa semiconductor lefatšeng ka bophara.
Qetellong, theknoloji ea ho roala e sireletsang, e tsamaisoang ke mekhoa e mecha e kangLiaparo tsa TaCho tsoa ho Semicera, e hlophisa bocha sebaka sa semiconductor le ho bula tsela bakeng sa bokamoso bo sebetsang hantle le bo tsitsitseng.
Nako ea poso: May-16-2024