Mekhoa ea ho hōla ha kristale e bohareng ba lesela la semiconductor, moo tlhahiso ea liphaephe tsa boleng bo holimo e leng tsa bohlokoa. Karolo ea bohlokoa lits'ebetsong tsena kesilicon carbide (SiC) sekepe sa sephaphatha. Likepe tsa SiC wafer li fumane kananelo e kholo indastering ka lebaka la ts'ebetso ea tsona e ikhethang le ts'epahalo. Sehloohong sena, re tla hlahloba litšobotsi tse tsotehang tsaLikepe tsa SiCle karolo ea bona ho nolofatseng kholo ea kristale tlhahisong ea li-semiconductor.
Likepe tsa SiCli etselitsoe ho tšoara le ho tsamaisa liphaphatha tsa semiconductor nakong ea mekhahlelo e fapaneng ea kholo ea kristale. Joalo ka thepa, silicon carbide e fana ka motsoako o ikhethang oa thepa e lakatsehang e etsang hore e be khetho e nepahetseng bakeng sa likepe tse omeletseng. Ntho ea pele le e ka sehloohong ke matla a eona a ikhethang a mechine le botsitso ba mocheso o phahameng. SiC e ithorisa ka thatathata le ho tiea, e e lumellang ho mamella maemo a feteletseng a kopaneng nakong ea ts'ebetso ea kholo ea kristale.
Molemo o mong oa bohlokoa oaLikepe tsa SiCke eona e ikhethang ea mocheso oa mocheso. Ho senya mocheso ke ntlha ea bohlokoa kholong ea kristale, kaha e susumetsa ho tšoana ha mocheso le ho thibela khatello ea mocheso holim'a li-wafers. SiC's high thermal conductivity e thusa ho fetisa mocheso hantle, ho netefatsa hore mocheso o sa fetohe ho pholletsa le li-wafers. Tšobotsi ena e molemo ka ho khetheha lits'ebetsong tse kang ho hōla ha epitaxial, moo ho laola mocheso o nepahetseng ho hlokahalang bakeng sa ho finyella filimi e tšoanang.
Ho feta moo,Likepe tsa SiCbonts'a inertness e babatsehang ea lik'hemik'hale. Li hanyetsana le mefuta e mengata ea lik'hemik'hale tse senyang le likhase tse atisang ho sebelisoa ha ho etsoa li-semiconductor. Botsitso bona ba lik'hemik'hale bo tiisa horeLikepe tsa SiCboloka botšepehi le ts'ebetso ea bona ka lebaka la ho pepesehela nako e telele tikolohong e thata ea ts'ebetso. ho hanyetsa tlhaselo ea lik'hemik'hale ho thibela tšilafalo le ho senyeha ha thepa, ho sireletsa boleng ba li-wafers tse ntseng li lengoa.
Ho tsitsa ha likepe tsa SiC ke karolo e 'ngoe e hlokomelehang. Li etselitsoe ho boloka sebopeho le sebopeho sa tsona esita le tlas'a mocheso o phahameng, ho netefatsa boemo bo nepahetseng ba li-wafers nakong ea kholo ea kristale. Botsitso bo fokolang bo fokotsa ho fetoha kapa ho soahlamana ha seketsoana, ho ka lebisang ho sa lumellaneng kapa kholong e sa ts'oaneng ka har'a li-wafers. Boemo bona bo nepahetseng bo bohlokoa bakeng sa ho fihlela chebahalo e lakatsehang ea kristale le ho ts'oana ha thepa ea semiconductor e hlahisoang.
Likepe tsa SiC wafer le tsona li fana ka thepa e ntle ea motlakase. Silicon carbide ke thepa ea semiconductor ka boeona, e khetholloang ka bandgap ea eona e pharaletseng le matla a phahameng a ho senyeha. Thepa ea tlhaho ea motlakase ea SiC e netefatsa ho lutla ho fokolang ha motlakase le tšitiso nakong ea ts'ebetso ea kholo ea kristale. Sena se bohlokoa haholo ha o holisa lisebelisoa tse matla haholo kapa o sebetsa ka meaho e bobebe ea elektroniki, kaha e thusa ho boloka botsitso ba lisebelisoa tsa semiconductor tse hlahisoang.
Ho feta moo, likepe tsa SiC wafer li tsebahala ka ho phela nako e telele le ho sebelisoa hape. Li na le nako e telele ea ts'ebetso, tse nang le bokhoni ba ho mamella lipotoloho tse ngata tsa kholo ea kristale ntle le ho senyeha ho hoholo. Ho tšoarella hona ho fetolela ho sebetsa hantle ha litšenyehelo mme ho fokotsa tlhokeho ea ho nkela sebaka khafetsa. Ho sebelisoa hape ha likepe tsa SiC wafer ha ho kenye letsoho feela mekhoeng e tsitsitseng ea tlhahiso empa hape ho netefatsa ts'ebetso e tsitsitseng le ho ts'epahala lits'ebetsong tsa kholo ea kristale.
Qetellong, likepe tsa SiC wafer li fetohile karolo ea bohlokoa kholong ea kristale bakeng sa tlhahiso ea semiconductor. Matla a bona a ikhethang a mechine, botsitso ba mocheso o phahameng, mocheso oa mocheso, ho se sebetse ha lik'hemik'hale, botsitso ba likaroloana, le thepa ea motlakase li etsa hore e be tse lakatsehang haholo ho tsamaisa mekhoa ea ho hōla ha kristale. Likepe tsa SiC wafer li netefatsa kabo e ts'oanang ea mocheso, li thibela tšilafalo, 'me li etsa hore li-wafer li behoe ka nepo, qetellong li lebisa tlhahisong ea thepa ea boleng bo holimo ea semiconductor. Ha tlhoko ea lisebelisoa tse tsoetseng pele tsa semiconductor e ntse e eketseha, bohlokoa ba likepe tsa SiC bafer ho fihlela kholo e nepahetseng ea kristale bo ke ke ba feteletsoa.
Nako ea poso: Apr-08-2024