Indasteri ea semiconductor e itšetleha ka lisebelisoa tse ikhethang haholo ho hlahisa lisebelisoa tsa elektroniki tsa boleng bo holimo. E 'ngoe ea likarolo tse joalo tsa bohlokoa ts'ebetsong ea kholo ea epitaxial ke epi pan carrier. Sesebelisoa sena se bapala karolo ea bohlokoa ho beheng ha likarolo tsa epitaxial holim'a li-wafers tsa semiconductor, ho netefatsa ho tšoana le boleng ba sehlahisoa sa ho qetela.
Epi pan carrier, eo hape e tsejoang e le epitaxy pan carrier, ke terei e entsoeng ka ho khetheha e sebelisoang ts'ebetsong ea kholo ea epitaxial. E ts'ehetsa le ho ts'ehetsa liphaephe tsa semiconductor nakong ea ho beoa ha likarolo tsa epitaxial. Bajari bana ba entsoe ho mamella mocheso o phahameng le libaka tse senyang tse tloaelehileng tsa mekhoa ea epitaxial, ho fana ka sethala se tsitsitseng bakeng sa ho hōla ha lihlopha tsa kristale e le 'ngoe.
Lisebelisoa le Kaho:
Lijana tsa Epi pan hangata li entsoe ka thepa e khonang ho mamella mocheso o feteletseng 'me li hanana le karabelo ea lik'hemik'hale. Lisebelisoa tse tloaelehileng li kenyelletsa:
•Silicon Carbide (SiC): E tsebahala ka conductivity ea eona e phahameng ea mocheso le ho hanyetsa ho roala le oxidation, SiC ke khetho e ratoang bakeng sa li-epi pan carriers.
• Graphite: Hangata e sebelisoa ka lebaka la thepa ea eona e ntle ea mocheso le bokhoni ba ho boloka botšepehi ba sebopeho mocheso o phahameng. Hangata bajari ba graphite ba koahetsoe ka SiC ho matlafatsa ho tšoarella ha bona le ho hanyetsa ho bola.
Seabo ho Mokhoa oa Kholiso ea Epitaxial:
Ts'ebetso ea kholo ea epitaxial e kenyelletsa ho beoa ha lesela le tšesaane la lisebelisoa tsa kristale holim'a substrate kapa wafer. Ts'ebetso ena e bohlokoa ho theheng lisebelisoa tsa semiconductor tse nang le thepa e nepahetseng ea motlakase. Sesebelisoa sa epi pan se ts'ehetsa sephaphatha ka phaposing ea karabelo mme se netefatsa hore se lula se tsitsitse nakong ea ts'ebetso ea deposition.
Mesebetsi ea mantlha ea epi pan carrier e kenyelletsa:
• Kabo e sa Tšoaneng ea Mocheso: Sesebelisoa se tiisa hore esita le kabo ea mocheso ho pholletsa le sephaphatha, e leng ntho ea bohlokoa bakeng sa ho finyella botenya le boleng bo tsitsitseng ba epitaxial layer.
• Ho itšehla thajana hoa lik'hemik'hale: Ka ho fana ka sebaka se tsitsitseng le se sa sebetseng, mokelikeli o thibela lik'hemik'hale tse sa batleheng tse ka senyang boleng ba epitaxial layer.
Melemo ea Boemo bo PhahamengEpi Pan Carriers:
• Ts'ebetso e Ntlafetseng ea Sesebelisoa: Mekhahlelo e tšoanang ea epitaxial e kenya letsoho mosebetsing o phahameng oa lisebelisoa tsa semiconductor, e leng se etsang hore ho be le ts'ebetso e ntle le ho tšepahala.
• Kotulo e Eketsehileng: Ka ho fokotsa bofokoli le ho etsa bonnete ba hore ho behoa ka mokhoa o ts'oanang, bajari ba boleng bo holimo ba ntlafatsa tlhahiso ea li-wafers tsa semiconductor tse sebelisoang.
• Litšenyehelo tse Fokotseng tsa Tlhokomelo: Thepa e tšoarellang nako e telele le boenjineri bo nepahetseng li fokotsa tlhoko ea ho nchafatsoa le ho lokisoa khafetsa, 'me li theola litšenyehelo tse akaretsang tsa tlhahiso.
Epi pan carrier ke karolo ea bohlokoa ts'ebetsong ea kholo ea epitaxial, e susumetsang ka kotloloho boleng le botsitso ba lisebelisoa tsa semiconductor. Ka ho khetha thepa e nepahetseng le moralo, bahlahisi ba ka ntlafatsa ts'ebetso ea epitaxial, e lebisang ho ntlafatseng ts'ebetso ea lisebelisoa le ho fokotsa litšenyehelo tsa tlhahiso. Ha tlhoko ea lisebelisoa tse tsoetseng pele tsa elektroniki e ntse e hola, bohlokoa ba boleng bo holimoepi pan bajariindastering ea semiconductor tsoela pele ho eketseha.
Nako ea poso: Aug-13-2024