Epitaxy ke eng?

Bongata ba lienjiniere ha ba bo tsebeepitaxy, e phethang karolo ea bohlokoa tlhahisong ea lisebelisoa tsa semiconductor.Epitaxye ka sebelisoa lihlahisoa tse fapaneng tsa chip, 'me lihlahisoa tse fapaneng li na le mefuta e sa tšoaneng ea epitaxy, ho kenyeletsaKe epitaxy, SiC epitaxy, Epitaxy ea GaN, joalo-joalo.

Epitaxy ke eng?
Epitaxy hangata e bitsoa "Epitaxy" ka Senyesemane. Lentsoe lena le tsoa mantsoeng a Segerike “epi” (e bolelang “holimo”) le “thekisi” (e bolelang “tokisetso”). Joalokaha lebitso le bolela, ho bolela ho hlophisa ka makhethe holim'a ntho. Ts'ebetso ea epitaxy ke ho beha lesela le lesesaane le le leng la kristale holim'a substrate e le 'ngoe ea kristale. Lera lena le sa tsoa beoa le le leng la kristale le bitsoa epitaxial layer.

Ho na le mefuta e 'meli e meholo ea epitaxy: homoepitaxial le heteroepitaxial. Homoepitaxial e bolela ho holisa thepa e tšoanang mofuteng o tšoanang oa substrate. Epitaxial layer le substrate li na le sebopeho se ts'oanang sa lattice. Heteroepitaxy ke khōlo ea boitsebiso bo bong holim'a substrate ea thepa e le 'ngoe. Tabeng ena, mohaho oa lattice oa lera la kristale le hōlileng ka epitaxially le substrate e ka 'na ea fapana. Likristale tse le 'ngoe le polycrystalline ke eng?
Ka li-semiconductors, hangata re utloa mantsoe a silicon e le 'ngoe le silicon ea polycrystalline. Ke hobane'ng ha li-silicon tse ling li bitsoa likristale tse le 'ngoe le silicon tse ling li bitsoa polycrystalline?

Kristale e le 'ngoe: Tokisetso ea lattice e tsoela pele ebile ha e fetohe, ha e na meeli ea lijo-thollo, ke hore, kristale eohle e entsoe ka lesela le le leng le nang le mokhoa o tsitsitseng oa kristale. Polycrystalline: Polycrystalline e entsoe ka lithollo tse ngata tse nyane, tseo e 'ngoe le e' ngoe e leng kristale e le 'ngoe,' me lipapiso tsa tsona li sa fetohe mabapi le tse ling. Lithollo tsena li arotsoe ka meeli ea lijo-thollo. Theko ea tlhahiso ea thepa ea polycrystalline e tlase ho feta ea likristale tse le 'ngoe, kahoo li ntse li le molemo lits'ebetsong tse ling. Mokhoa oa epitaxial o tla ameha hokae?
Ha ho etsoa li-circuits tse kopantsoeng tsa silicon, mokhoa oa epitaxial o sebelisoa haholo. Mohlala, silicon epitaxy e sebelisoa ho holisa lera la silicon le hloekileng le le laoloang hantle holim'a silicon substrate, e leng bohlokoa haholo bakeng sa ho etsa lipotoloho tse kopaneng tse tsoetseng pele. Ntle le moo, lisebelisoa tsa motlakase, SiC le GaN ke lisebelisoa tse peli tse sebelisoang hangata ka bophara ba bandgap semiconductor tse nang le bokhoni bo botle ba ho sebetsana le matla. Lisebelisoa tsena hangata li lengoa ka silicon kapa li-substrates tse ling ka epitaxy. Puisanong ea quantum, li-bits tsa quantum tse thehiloeng ho semiconductor hangata li sebelisa silicon germanium epitaxial structures. jj.

Mekhoa ea ho holisa epitaxial?

Mekhoa e meraro e sebelisoang hangata ea semiconductor epitaxy:

Molecular beam epitaxy (MBE): Molecular beam epitaxy) ke theknoloji ea kgolo ea semiconductor epitaxial e etsoang tlas'a maemo a holimo-limo a vacuum. Ho thekenoloji ena, lisebelisoa tsa mohloli li fetoha mouoane ka mokhoa oa liathomo kapa maballo a limolek'hule ebe li kenngoa holim'a substrate ea kristale. MBE ke thekenoloji e nepahetseng haholo le e laolehang ea semiconductor e tšesaane ea kholo ea lifilimi e ka laolang ka nepo botenya ba thepa e kentsoeng maemong a athomo.

Metal organic CVD (MOCVD): Ts'ebetsong ea MOCVD, lirafshoa tsa organic le likhase tsa hydride tse nang le likarolo tse hlokahalang li fanoa ho substrate ka mocheso o nepahetseng, 'me lisebelisoa tse hlokahalang tsa semiconductor li hlahisoa ka karabelo ea lik'hemik'hale ebe li beoa holim'a substrate, athe tse setseng. metsoako le lihlahisoa tsa karabelo lia lokolloa.

Vapor Phase Epitaxy (VPE): Vapor Phase Epitaxy ke theknoloji ea bohlokoa e atisang ho sebelisoa ha ho etsoa lisebelisoa tsa semiconductor. Molao-motheo oa eona ke ho tsamaisa mouoane oa ntho e le 'ngoe kapa motsoako ka khase e tsamaisang le ho beha likristale holim'a substrate ka ho kopana ha lik'hemik'hale.