MOCVD Susceptor ke eng?

Metal-Organic Chemical Vapor Deposition (MOCVD) ke ts'ebetso ea bohlokoa indastering ea semiconductor, moo lifilimi tse tšesaane tsa boleng bo holimo li kenngoeng holim'a li-substrates. Karolo e ka sehloohong ea ts'ebetso ea MOCVD ke susceptor, ntho ea bohlokoa e phethang karolo ea bohlokoa ho netefatsa ho tšoana le boleng ba lifilimi tse hlahisoang.

Susceptor ke eng? susceptor ke karolo e khethehileng e sebelisoang ts'ebetsong ea MOCVD ho tšehetsa le ho futhumatsa substrate eo lifilimi tse tšesaane li kenngoa ho eona. E fana ka mesebetsi e mengata, ho kenyelletsa le ho monya matla a makenete a motlakase, ho a fetola mocheso, le ho tsamaisa mocheso ona ka mokhoa o ts'oanang ho pholletsa le karoloana. Ho futhumala ha mofuta ona ho bohlokoa bakeng sa kholo ea lifilimi tse tšoanang tse nang le botenya le sebopeho se nepahetseng.

Mefuta ea li-susceptors:
1. Graphite Susceptors: Ka tloaelo e koahetsoe ka lera le sireletsang, joalo kasilicon carbide (SiC), li-susceptors tsa graphite li tsebahala ka ho tsamaisa mocheso o phahameng le botsitso. TheHo roala ha SiCe fana ka sebaka se thata, se sireletsang se thibelang ho bola le ho senyeha ha mocheso o phahameng.

2. Li-susceptors tsa Silicon Carbide (SiC).: Tsena li entsoe ka ho feletseng ho tloha ho SiC, tse fanang ka botsitso bo botle ba mocheso le ho hanyetsa ho senya le ho senya.Li-susceptors tsa SiCli loketse ka ho khetheha bakeng sa mekhoa ea mocheso o phahameng le libaka tse senyang.
JoangBahlaseluoaSebetsa ho MOCVD:

Ts'ebetsong ea MOCVD, li-precursors li kenngoa ka kamoreng ea li-reactor, moo li senyehang le ho itšoara ho etsa filimi e tšesaane holim'a substrate. Sebapali se bapala karolo ea bohlokoa ka ho etsa bonnete ba hore substrate e futhumatsoa ka mokhoa o ts'oanang, e leng ntho ea bohlokoa bakeng sa ho fumana thepa e tsitsitseng ea filimi sebakeng sohle sa substrate. Thepa ea susceptor le moralo li khethoa ka hloko ho tsamaisana le litlhoko tse ikhethileng tsa ts'ebetso ea deposition, joalo ka mofuta oa mocheso le ho lumellana ha lik'hemik'hale.
Melemo ea ho SebelisaLi-susceptors tsa boleng bo phahameng:
• Boleng bo Ntlafetseng ba Lifilimi: Ka ho fana ka kabo e tšoanang ea mocheso, li-susceptors li thusa ho finyella lifilimi tse nang le botenya bo tsitsitseng le sebopeho, e leng sa bohlokoa bakeng sa ts'ebetso ea lisebelisoa tsa semiconductor.
• Keketseho ea Ts'ebetso ea Ts'ebetso: Li-susceptors tsa boleng bo phahameng li ntlafatsa katleho ea kakaretso ea ts'ebetso ea MOCVD ka ho fokotsa monyetla oa ho ba le bokooa le ho eketsa lihlahisoa tsa lifilimi tse ka sebelisoang.
• Nako e telele le ho tšepahala: Li-susceptors tse entsoeng ka thepa e tšoarellang joaloka SiC li netefatsa ho tšepahala ha nako e telele le ho fokotsa litšenyehelo tsa tlhokomelo.

Qetello: Mokelikeli ke karolo ea bohlokoahali ts'ebetsong ea MOCVD, e amang ka kotloloho boleng le bokhoni ba ho bea lifilimi tse tšesaane. Ka ho khetha thepa le moralo o nepahetseng, bahlahisi ba semiconductor ba ka ntlafatsa lits'ebetso tsa bona, ba fella ka ts'ebetso e ntle ea lisebelisoa le litšenyehelo tse tlase tsa tlhahiso. Ha tlhoko ea lisebelisoa tsa elektroniki tse sebetsang hantle e ntse e hola, bohlokoa ba MOCVD susc ea boleng bo holimo