TheMOCVDmokhoa ke e 'ngoe ea mekhoa e tsitsitseng ka ho fetisisa e sebelisoang hona joale indastering ea ho hōlisa lifilimi tse tšesaane tsa boleng bo phahameng ba kristale e le' ngoe, joalo ka karolo e le 'ngoe ea InGaN epilayers, lisebelisoa tsa III-N, le lifilimi tsa semiconductor tse nang le li-multi quantum well structures,' me li bohlokoa haholo tlhahiso ea lisebelisoa tsa semiconductor le optoelectronic.
TheSiC coating MOCVD susceptorke sephaphatha se khethehileng se koahetsoeng ka silicon carbide (SiC) bakeng saepitaxial kholo ea ts'ebetso ea tšepe ea organic chemical vapor deposition (MOCVD).
Thepa ea SiC e na le khanyetso e ntle ea lik'hemik'hale le botsitso ba mocheso, e leng se etsang hore e be khetho e nepahetseng bakeng sa li-susceptors tsa MOCVD tse sebelisoang ho batla mekhoa ea ho hōla ha epitaxial.
Karolo e ka sehloohong ea ts'ebetso ea MOCVD ke susceptor, e leng ntho ea bohlokoa ho netefatsa ho tšoana le boleng ba lifilimi tse tšesaane tse hlahisoang.
Sesupo ke eng? The susceptor ke karolo e khethehileng e sebelisoang ts'ebetsong ea MOCVD ho tšehetsa le ho futhumatsa substrate eo filimi e tšesaane e kenngoa ho eona. E na le mesebetsi e mengata, ho kenyelletsa ho monya matla a makenete a motlakase, ho a fetola mocheso, le ho abela mocheso ka ho lekana karolong e ka tlaase. Ho futhumatsa ka mokhoa o ts'oanang ho bohlokoa bakeng sa kholo ea lifilimi tse tšesaane tse ts'oanang tse nang le botenya le sebopeho se nepahetseng.
Mefuta ea li-susceptors:
1. Li-susceptors tsa graphite: Hangata li-susceptors tsa graphite li koahetsoe ka lera le sireletsang joalo kasilicon carbide (SiC), e tsejoang ka conductivity ea eona e phahameng ea mocheso le botsitso. TheHo roala ha SiCe fana ka sebaka se thata, se sireletsang se thibelang ho bola le ho senyeha ha mocheso o phahameng.
2. Li-susceptors tsa Silicon carbide (SiC): Li-susceptors tsena li entsoe ka ho feletseng ka SiC 'me li na le botsitso bo botle ba mocheso le ho hanyetsa ho apara. Li-susceptors tsa SiC li loketse haholo ts'ebetso ea mocheso o phahameng le libaka tse senyang.
Mokhoa oa ho etsa li-susceptors ho MOCVD:
Ts'ebetsong ea MOCVD, li-precursors li kenngoa ka kamoreng ea ho arabela moo li senyehang le ho itšoara ho etsa filimi e tšesaane holim'a substrate. Mokelikeli o bapala karolo ea bohlokoa ka ho etsa bonnete ba hore substrate e futhumatsoa ka ho lekana, e leng ntho ea bohlokoa ho finyella thepa ea filimi e tsitsitseng ho pholletsa le sebaka sohle sa substrate. Thepa le moralo oa susceptor li khethiloe ka hloko ho fihlela litlhoko tse ikhethileng tsa ts'ebetso ea deposition, joalo ka mocheso oa mocheso le ho lumellana ha lik'hemik'hale.
Melemo ea ho sebelisa li-susceptors tsa boleng bo holimo:
• Boleng ba filimi bo ntlafetseng: Ka ho fana ka kabo ea mocheso o ts'oanang, susceptor e thusa ho finyella lifilimi tse nang le botenya bo tsitsitseng le ho hlophisoa, e leng ntho ea bohlokoa ho ts'ebetsong ea lisebelisoa tsa semiconductor.
• Ts'ebetso e ntlafetseng ea ts'ebetso: Li-susceptors tsa boleng bo phahameng li eketsa katleho ea kakaretso ea ts'ebetso ea MOCVD ka ho fokotsa monyetla oa ho ba le bokooa le ho eketsa lihlahisoa tsa lifilimi tse ka sebelisoang.
• Nako ea bophelo le ho tšepahala: Li-susceptors tse entsoeng ka thepa e tšoarellang tse kang SiC li netefatsa ho tšepahala ha nako e telele le ho fokotsa litšenyehelo tsa tlhokomelo.
The susceptor ke karolo ea bohlokoa ts'ebetsong ea MOCVD 'me e ama ka ho toba boleng le katleho ea ho behoa ha filimi e tšesaane. Bakeng sa tlhaiso-leseling e batsi ka boholo bo fumanehang, li-susceptors tsa MOCVD le litheko, ka kopo u se ke oa tsilatsila ho ikopanya le rona. Baenjiniere ba rona ba tla thabela ho u eletsa ka lisebelisoa tse loketseng le ho araba lipotso tsohle tsa hau.
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Nako ea poso: Aug-12-2024