SiC Paddle in Semiconductor Manufacturing

Sebakeng sa tlhahiso ea semiconductor, theSiC Paddlee bapala karolo ea bohlokoa, haholo ts'ebetsong ea kholo ea epitaxial. E le karolo ea bohlokoa e sebelisoang hoMOCVD(Metal Organic Chemical Vapor Deposition) litsamaiso,SiC Paddlesli etselitsoe ho mamella mocheso o phahameng le tikoloho e thata ea lik'hemik'hale, e leng se etsang hore e be tsa bohlokoa haholo bakeng sa tlhahiso e tsoetseng pele. Ho Semicera, re sebetsa ka thata ho hlahisa ts'ebetso e phahamengSiC Paddlese etselitsoeng bobeliKe EpitaxyleSiC Epitaxy, e fanang ka nako e tšoarellang e ikhethang le botsitso ba mocheso.

Tšebeliso ea SiC Paddles e atile haholo lits'ebetsong tse kang kholo ea epitaxial, moo substrate e hlokang maemo a nepahetseng a mocheso le lik'hemik'hale. Lihlahisoa tsa rona tsa Semicera li netefatsa ts'ebetso e nepahetseng maemong a hlokangMotlatsi oa MOCVD, moo likarolo tse phahameng tsa silicon carbide li behoang holim'a li-substrates. Sena se thusa ho ntlafatsasephaphathaboleng le katleho e phahameng ea lisebelisoa tlhahisong ea semiconductor.

Lisosa tsa SemiceraSiC Paddlesha lia etsetsoa feelaKe Epitaxyempa hape e etselitsoe mefuta e mengata ea lits'ebetso tsa bohlokoa. Mohlala, li tsamaisana le PSS Etching Carriers, tse bohlokoa tlhahisong ea liphaephe tsa LED, leICP Etching Bajari, moo taolo ea ion e nepahetseng e hlokahalang bakeng sa ho etsa liphaphatha. Li-paddles tsena li bohlokoa ho litsamaiso tse joaloBajari ba RTP(Rapid Thermal Processing), moo tlhokahalo ea phetoho e potlakileng ea mocheso le mocheso o phahameng oa mocheso ke oa bohlokoa.

Ntle le moo, SiC Paddles e sebetsa joalo ka li-susceptors tsa LED Epitaxial, e thusang kholo ea liphaephe tsa LED tse sebetsang hantle haholo. Bokhoni ba ho sebetsana le likhatello tse fapaneng tsa mocheso le tikoloho li etsa hore li feto-fetohe haholo ho pholletsa le mekhoa e fapaneng ea tlhahiso ea semiconductor.

Ka kakaretso, Semicera e ikemiselitse ho fana ka li-SiC Paddles tse fihlelang litlhoko tse nepahetseng tsa tlhahiso ea semiconductor ea sejoale-joale. Ho tloha ho SiC Epitaxy ho ea ho MOCVD Susceptors, tharollo ea rona e netefatsa ho ts'epahala le ts'ebetso e ntlafetseng, ho khotsofatsa litlhoko tsa morao-rao tsa indasteri.