Ts'ebetsong ea ho lokisetsa li-wafer, ho na le lihlopha tse peli tsa mantlha: e 'ngoe ke ho lokisoa ha substrate,' me e 'ngoe ke ts'ebetsong ea mokhoa oa epitaxial. The substrate, sephaphatha se entsoeng ka hloko ho tloha semiconductor single crystal material, se ka kenngoa ka kotloloho ts'ebetsong ea ho etsa li-wafer e le motheo oa ho hlahisa lisebelisoa tsa semiconductor, kapa se ka ntlafatsoa le ho feta ka mekhoa ea epitaxial.
Joale, denotation ke eng? Ka bokhutšoanyane, epitaxy ke kholo ea lera le lecha la kristale e le 'ngoe holim'a substrate e le' ngoe ea kristale e entsoeng hantle (ho khaola, ho sila, ho bentša, joalo-joalo). Lera lena le lecha la kristale e le 'ngoe le substrate li ka etsoa ka thepa e tšoanang kapa lisebelisoa tse fapaneng, e le hore khōlo ea homogeneous kapa heteroepitaxial e ka finyelloa ha ho hlokahala. Hobane kristale e sa tsoa hola e tla hola ho latela karolo ea kristale ea substrate, e bitsoa epitaxial layer. Botenya ba eona hangata ke li-micron tse seng kae feela. Ha re nka silicon e le mohlala, kholo ea silicon epitaxial ke ho holisa lera la silicon ka sebopeho se ts'oanang sa kristale joalo ka substrate, resistivity e laoloang le botenya, holim'a substrate e le 'ngoe ea kristale e nang le sebopeho se ikhethileng sa kristale. Lera la kristale le le leng la silicon le nang le sebopeho se phethahetseng sa lattice. Ha karolo ea epitaxial e ntse e hōla holim'a substrate, kaofela e bitsoa epitaxial wafer.
Bakeng sa indasteri ea setso ea silicon semiconductor, ho etsa lisebelisoa tse phahameng haholo le tse matla haholo ka kotloloho ho li-wafers tsa silicon ho tla kopana le mathata a mang a tekheniki. Ka mohlala, ho thata ho finyella litlhoko tsa matla a phahameng a ho senya, ho hanyetsa letoto le lenyenyane le ho theoha ha motlakase o monyenyane sebakeng sa mokelli. Kenyelletso ea theknoloji ea epitaxy e rarolla mathata ana ka bohlale. Tharollo ke ho hōlisa sekhahla sa epitaxial se phahameng-resistivity holim'a substrate ea silicon e fokolang, ebe o etsa lisebelisoa holim'a epitaxial layer e phahameng-resistivity. Ka tsela ena, epitaxial lera phahameng-resistivity e fana ka phahameng senya gagamalo bakeng sa sesebediswa, ha substrate tlaase-resistivity fokotsa ho hanyetsa substrate, ka tsela eo ho fokotsa saturation gagamalo lerotholi, ka tsela eo ho finyella phahameng robeha gagamalo le nyenyane Balance pakeng tsa ho hanyetsa le phokotso e nyane ea motlakase.
Ho phaella moo, theknoloji ea epitaxy e kang vapor phase epitaxy le liquid phase epitaxy ea GaAs le tse ling tsa III-V, II-VI le lisebelisoa tse ling tsa limolek'hule tsa semiconductor le tsona li ntlafalitsoe haholo 'me li fetohile motheo oa lisebelisoa tse ngata tsa microwave, lisebelisoa tsa optoelectronic le matla. lisebelisoa. Theknoloji ea bohlokoa ea ts'ebetso bakeng sa tlhahiso, haholo-holo ts'ebeliso e atlehileng ea lebone la molek'hule le thekenoloji ea tšepe-organic vapor phase epitaxy ka likarolo tse tšesaane, li-superlattices, liliba tsa quantum, li-superlattices tse senyehileng, le epitaxy ea boemo ba atomic e fetohile sebaka se secha sa lipatlisiso tsa semiconductor. Nts'etsopele ea "Projeke ea Lebanta la Matla" e thehile motheo o tiileng.
Mabapi le lisebelisoa tsa semiconductor tsa moloko oa boraro, hoo e batlang e le lisebelisoa tsohle tse joalo tsa semiconductor li entsoe holim'a epitaxial layer, 'me silicon carbide wafer ka boeona e sebetsa feela e le substrate. Botenya ba thepa ea SiC epitaxial, mahloriso a mokokotlo oa mokokotlo le li-parameter tse ling li khetholla ka ho toba thepa e fapaneng ea motlakase ea lisebelisoa tsa SiC. Lisebelisoa tsa silicon carbide bakeng sa lits'ebetso tsa motlakase o phahameng li beha litlhoko tse ncha bakeng sa liparamente tse kang botenya ba lisebelisoa tsa epitaxial le khatello ea mokokotlo oa mokokotlo. Ka hona, theknoloji ea silicon carbide epitaxial e bapala karolo ea makhaola-khang ho sebeliseng ts'ebetso ea lisebelisoa tsa silicon carbide ka botlalo. Ho lokisoa ha hoo e batlang e le lisebelisoa tsohle tsa motlakase tsa SiC ho ipapisitse le li-wafers tsa boleng bo holimo tsa SiC epitaxial. Tlhahiso ea likarolo tsa epitaxial ke karolo ea bohlokoa ea indasteri e pharaletseng ea semiconductor ea bandgap.
Nako ea poso: May-06-2024