Tantalum carbide (TaC)ke sesebelisoa sa ceramic se hanyetsanang le mocheso o phahameng haholo se nang le melemo ea sebaka se phahameng sa ho qhibiliha, boima bo phahameng, botsitso bo botle ba lik'hemik'hale, motlakase o matla le conductivity ea mocheso, joalo-joalo.Ho roala ha TaCe ka sebelisoa e le seaparo se thibelang ho senya, ho thibela oxidation, le ho thibela ho roala, 'me e sebelisoa haholo sebakeng sa tšireletso ea mocheso, moloko oa boraro oa moloko oa boraro oa semiconductor kholo ea kristale e le' ngoe, lisebelisoa tsa elektronike tsa matla le masimo a mang.
Tshebetso:
Tantalum carbide (TaC)ke mofuta oa lisebelisoa tsa ceramic tse hanyetsanang le mocheso o phahameng haholo tse nang le melemo ea boemo bo phahameng ba ho qhibiliha, boima bo phahameng, botsitso bo botle ba lik'hemik'hale, motlakase o matla le conductivity ea mocheso. Ka hona,Ho roala ha TaCe ka sebelisoa e le seaparo se thibelang ho senya, ho thibela oxidation, le ho thibela ho roala, 'me e sebelisoa haholo sebakeng sa tšireletso ea mocheso, moloko oa boraro oa moloko oa boraro oa semiconductor kholo ea kristale e le' ngoe, lisebelisoa tsa elektronike tsa matla le masimo a mang.
Sebopeho sa kahare sa li-coatings:
Re sebelisa mokhoa oa slurry-sintering ho lokisaLiaparo tsa TaCea botenya bo fapaneng holim'a likaroloana tsa graphite tsa boholo bo fapaneng. Ntlha ea pele, phofo e phahameng ea bohloeki e nang le mohloli oa Ta le mohloli oa C o lokiselitsoe ka dispersant le binder ho etsa junifomo le e tsitsitseng precursor slurry. Ka nako e ts'oanang, ho ea ka boholo ba likarolo tsa graphite le litlhoko tsa botenya baHo roala ha TaC, ho roala pele ho lokiselitsoe ka ho fafatsa, ho tšela, ho kenella le mefuta e meng. Qetellong, e futhumatsoa ka holimo ho 2200 ℃ sebakeng sa vacuum ho lokisa junifomo, e teteaneng, ea karolo e le 'ngoe, le e khanyang hantle.Ho roala ha TaC.
Sebopeho sa kahare sa li-coatings:
Botenya baHo roala ha TaCke hoo e ka bang 10-50 μm, lithollo li hōla ka mokhoa o sa lefelloeng, 'me o entsoe ka TaC e nang le sebopeho sa li-cubic tsa karolo e le' ngoe ea sefahleho, ntle le litšila tse ling; ho roala ho teteaneng, mohaho o phethehile, 'me crystallinity e phahame.Ho roala ha TaCe ka tlatsa li-pores ka holim'a graphite, 'me e kopantsoe ka lik'hemik'hale ho matrix a graphite ka matla a holimo a tlamahano. Karo-karolelano ea Ta ho C ka ho roala e haufi le 1: 1. Tekanyetso ea tlhahlobo ea bohloeki ea GDMS ASTM F1593, khatello ea litšila e ka tlase ho 121ppm. Ho kheloha ha lipalo ho bolela (Ra) ea profil ea ho roala ke 662nm.
Likopo tse akaretsang:
GaN leSiC epitaxialLikarolo tsa CVD reactor, ho kenyeletsoa li-wafer carriers, lijana tsa sathelaete, lishaoara, likoahelo tse kaholimo le li-susceptors.
Likarolo tsa kholo ea kristale ea SiC, GaN le AlN, ho kenyeletsoa li-crucibles, litšepe tsa kristale ea peo, litataiso tsa phallo le li-filters.
Likarolo tsa indasteri, ho kenyeletsoa lisebelisoa tse futhumatsang, li-nozzles, mehele e sireletsang le lisebelisoa tsa brazing.
Lintlha tsa bohlokoa:
Botsitso bo phahameng ba mocheso ho 2600 ℃
E fana ka tšireletso ea boemo bo tsitsitseng libakeng tse thata tsa lik'hemik'hale tsa H2, NH3, SiH4le Si mouoane
E loketse tlhahiso ea bongata ka lipotoloho tse khutšoane tsa tlhahiso.
