Mokhoa oa tlhahiso ea silicon carbide wafer

Sephaphatha sa silicon carbidee entsoe ka phofo e phahameng ea silicon le phofshoana e phahameng ea carbon e le lisebelisoa tse tala, 'me kristale ea silicon carbide e lengoa ka mokhoa oa phetisetso ea mouoane (PVT), ebe e sebetsoa hosephaphatha sa silicon carbide.

① Tšebeliso ea lintho tse tala. Phofo e phahameng ea silicon e hloekileng le phofshoana e phahameng ea carbon e ne e kopantsoe ho ea ka karolelano e itseng, 'me likaroloana tsa silicon carbide li ile tsa etsoa ka mocheso o phahameng ka holimo ho 2,000 ℃. Ka mor'a ho senya, ho hloekisa le mekhoa e meng, lisebelisoa tse tala tsa silicon carbide phofo tse finyellang litlhoko tsa kholo ea kristale lia lokisoa.

② Khōlo ea kristale. E sebelisa phofo e phahameng ea SIC e le lisebelisoa tse tala, kristale e ile ea hōlileng ka mokhoa oa phetisetso ea mouoane (PVT) o sebelisa sebōpi se ikemetseng sa kristale.

③ ts'ebetso ea ingot. Silicon carbide crystal ingot e fumanoeng e ne e sekamisitsoe ke X-ray single crystal orientator, ea ntan'o theoha le ho phuthoa, 'me ea sebetsoa hore e be kristale e tloaelehileng ea silicon carbide.

④ Ho itšeha ka kristale. Ho sebelisa lisebelisoa tsa ho seha ka mela e mengata, likristale tsa silicon carbide li khaoloa ka lishiti tse tšesaane tse nang le botenya bo sa feteng 1mm.

⑤ Chip sila. Sephaphatha se siloa ho isa bokhabane bo lakatsehang le ho ba mahoashe ka maro a silang taemane a boholo bo fapaneng.

⑥ Chip polishing. Silicon carbide e bentšitsoeng ntle le tšenyo ea bokaholimo e ile ea fumanoa ka ho belisoa ka mochini le ho belisoa ha mochini oa lik'hemik'hale.

⑦ Ho lemoha chip. Sebelisa microscope ea optical, X-ray diffractometer, microscope ea matla a atomic, tester resistivity tester, surface flatness tester, surface defect comprehensive tester le lisebelisoa tse ling le lisebelisoa ho bona bongata ba microtubule, boleng ba kristale, ho hlaka holimo, resistivity, warpage, curvature, phetoho ea botenya, sekoaelo sa bokaholimo le likarolo tse ling tsa silicon carbide wafer. Ho ea ka sena, boemo ba boleng ba chip bo khethoa.

⑧ Ho hloekisa chip. Letlapa la silicon carbide polishing le hloekisoa ka sesebelisoa sa ho hloekisa le metsi a hloekileng ho tlosa mokelikeli o setseng oa ho bentša le litšila tse ling holim'a letlapa la ho bentša, ebe sephaphatha se butsoeloa 'me se sisinyeha se omisitsoe ke nitrogen e hloekileng haholo le mochini o omisang; Sephaphatha se kentsoe ka lebokoseng la lakane e hloekileng ka phaposing e hloekileng haholo ho etsa sephaphatha sa silicon carbide se seng se loketse ho sebelisoa.

Ha boholo ba chip bo le khōloanyane, ho thata le ho feta khōlo ea kristale e lumellanang le theknoloji ea ho sebetsa, 'me ho phahamisa katleho ea tlhahiso ea lisebelisoa tse tlaase, ho theola litšenyehelo tsa yuniti.