Li-chucks tsa ceramic tsa silicon carbide

Tlhaloso e Khutšoanyane:

WeiTai Energy Technology Co., Ltd. ke morekisi ea ka sehloohong oa li-ceramics tsa semiconductor tse tsoetseng pele ebile ke eena feela moetsi oa China ea ka fanang ka silicon carbide ceramic ka nako e le 'ngoe (haholo-holoRecrystallized SiC) le ho roala CVD SiC.Ho feta moo, k'hamphani ea rona e boetse e ikemiselitse ho etsa masimo a ceramic a kang alumina, aluminium nitride, zirconia, le silicon nitride, joalo-joalo.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

SiC plate ke mofuta oa 0 porosity dense body ceramics, e thehiloeng ho SiC le sintered ho 2250 ℃.Likahare tsa SiC li feta 99.6%, matla a ho kobeha a feta 410mpa mme conductivity ea mocheso ke 140W / MK ke eona feela thepa ea ceramic e hanyetsanang le HF, H2SO4 le tse ling tse matla tsa acid corrosion.

Melemo ea silicon carbide ceramics:

1, coefficient ea katoloso ea mocheso e nyane, e haufi haholo le silicon;

2, ho hanyetsa ho khabane ka ho fetisisa, ho thatafala ha bobeli ho latela daemane;

3, conductivity e ntle ea mocheso, ho hanyetsa mocheso o phahameng le ho senya mocheso ka potlako;

Silicon carbide chuck3

Tekheniki Parameters

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  • E fetileng:
  • E 'ngoe: