Silicon Carbide Coated Graphite Tool , bakeng sa Epitaxy Craft

Tlhaloso e Khutšoanyane:

Semicera e fana ka mefuta e mengata e fapaneng ea li-susceptors le likarolo tsa graphite tse etselitsoeng li-epitaxy reactor tse fapaneng.

Ka tšebelisano-'moho le li-OEM tse etelletseng pele indastering, boiphihlelo bo pharalletseng ba thepa, le bokhoni bo tsoetseng pele ba tlhahiso, Semicera e fana ka meralo e hlophisitsoeng ho fihlela litlhoko tse ikhethileng tsa kopo ea hau.Boitlamo ba rona ba bokhabane bo netefatsa hore o fumana litharollo tse nepahetseng bakeng sa litlhoko tsa hau tsa epitaxy reactor.

 

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Tlhaloso

Khamphani ea rona e fana ka lits'ebeletso tsa ts'ebetso ea ho roala SiC ka mokhoa oa CVD holim'a graphite, li-ceramics le lisebelisoa tse ling, e le hore likhase tse khethehileng tse nang le carbon le silicon li sebetsane le mocheso o phahameng ho fumana limolek'hule tsa SiC tse hloekileng, limolek'hule tse behiloeng holim'a thepa e koahetsoeng, ho etsa lera la tšireletso la SIC.

hoo e ka bang (1)

hoo e ka bang (2)

Likarolo tse ka Sehloohong

1 .Bohloeki bo phahameng ba SiC bo koahetsoeng ke graphite

2. Ho hanyetsa mocheso o phahameng & ho tšoana ha mocheso

3. Khalase e ntle ea SiC e koahetsoeng bakeng sa sebaka se boreleli

4. High durability khahlanong le ho hloekisa lik'hemik'hale

Lintlha tse ka sehloohong tsa CVD-SIC Coating

SiC-CVD Properties
Sebopeho sa Crystal FCC mohato oa β
Botenya g/cm³ 3.21
Ho thatafala Vickers thata 2500
Boholo ba lijo-thollo μm 2~10
Bohloeki ba Lik'hemik'hale % 99.99995
Matla a Mocheso J·kg-1 ·K-1 640
Sublimation Mocheso 2700
Felexural Matla MPa (RT 4-point) 415
Modulus e monyane Gpa (4pt bend, 1300 ℃) 430
Katoloso ea Thermal (CTE) 10-6K-1 4.5
Thermal conductivity (W/mK) 300
Semicera Sebaka sa mosebetsi
Sebaka sa mosebetsi sa Semicera 2
Mochini oa lisebelisoa
Ts'ebetso ea CNN, ho hloekisa lik'hemik'hale, ho roala CVD
Tshebeletso ya rona

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