4″ 6″ 8″ Li-substrate tse tsamaisang le tse sireletsang halofo

Tlhaloso e Khutšoanyane:

Semicera e ikemiselitse ho fana ka likaroloana tsa boleng bo holimo tsa semiconductor, e leng lisebelisoa tsa bohlokoa bakeng sa tlhahiso ea lisebelisoa tsa semiconductor. Li-substrates tsa rona li arotsoe ka mefuta ea conductive le semi-insulating ho fihlela litlhoko tsa lits'ebetso tse fapaneng. Ka ho utloisisa ka botebo thepa ea motlakase ea li-substrates, Semicera e u thusa ho khetha lisebelisoa tse loketseng ho netefatsa ts'ebetso e ntle haholo tlhahisong ea lisebelisoa. Khetha Semicera, khetha boleng bo botle bo totobatsang ho ts'epahala le boqapi.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Silicon carbide (SiC) thepa e le 'ngoe ea kristale e na le lekhalo le leholo la lekhalo la sehlopha (~ Si makhetlo a 3), conductivity e phahameng ea mocheso (~Si 3.3 linako kapa GaAs makhetlo a 10), tekanyo e phahameng ea ho falla ha elektronike (~ Si 2.5 linako), ho senyeha ho matla ha motlakase tšimo (~ Si 10 linako kapa GaAs 5 linako) le litšobotsi tse ling tse hlaheletseng.

Thepa ea semiconductor ea moloko oa boraro haholo-holo e kenyelletsa SiC, GaN, daemane, joalo-joalo, hobane bophara ba lekhalo la sehlopha sa eona (Mohlala) bo boholo ho feta kapa bo lekana le li-volts tsa 2.3 electron (eV), tse tsejoang hape e le lisebelisoa tse pharaletseng tsa lekhalo la semiconductor. Ha ho bapisoa le lisebelisoa tsa semiconductor tsa moloko oa pele le oa bobeli, lisebelisoa tsa semiconductor tsa moloko oa boraro li na le melemo ea ho tsamaisa mocheso o phahameng, motlakase o senyehang haholo, tekanyo e phahameng ea ho falla ha elektronike le matla a phahameng a ho kopanya, a ka finyellang litlhoko tse ncha tsa theknoloji ea morao-rao ea elektroniki bakeng sa boemo bo phahameng. mocheso, matla a phahameng, khatello e phahameng, maqhubu a phahameng le ho hanyetsa mahlaseli le maemo a mang a thata. E na le litebello tsa bohlokoa tsa ts'ebeliso maemong a ts'ireletso ea naha, sefofane, sefofane, tlhahlobo ea oli, polokelo ea mahlo, joalo-joalo, 'me e ka fokotsa tahlehelo ea matla ka ho feta 50% liindastering tse ngata tsa maano tse kang likhokahano tsa Broadband, matla a letsatsi, tlhahiso ea likoloi, mabone a semiconductor, le marang-rang a bohlale, 'me a ka fokotsa bophahamo ba thepa ka ho feta 75%, e leng ntho ea bohlokoahali bakeng sa nts'etsopele ea mahlale a batho le thekenoloji.

Matla a Semicera a ka fana ka bareki ba boleng bo phahameng ba Conductive (Conductive), Semi-insulating (Semi-insulating), HPSI (High Purity semi-insulating) silicon carbide substrate; Ho phaella moo, re ka fana ka bareki ba nang le homogeneous le heterogeneous silicon carbide epitaxial sheets; Re ka boela ra iketsetsa leqephe la epitaxial ho latela litlhoko tse khethehileng tsa bareki, 'me ha ho na palo e fokolang ea taelo.

LIEKETSENG TSIETSO

*n-Pm=n-mofuta oa Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulation

Ntho

8-Intshi

6-Intshi

4-Intshi
nP n-Pm n-Pes SI SI
TTV(GBIR) ≤6um ≤6um
Bow(GF3YFCD)-Boleng bo Felletseng ≤15μm ≤15μm ≤25μm ≤15μm
Warp(GF3YFER) ≤25μm ≤25μm ≤40μm ≤25μm
LTV(SBIR) -10mmx10mm <2μm
Wafer Edge Beveling

SEBAKA PHETHA

*n-Pm=n-mofuta oa Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-Insulating

Ntho

8-Intshi

6-Intshi

4-Intshi

nP n-Pm n-Pes SI SI
Surface Finish Mahlakore a mabeli a Optical Polish, Si- Face CMP
SurfaceRoughness (10um x 10um) Si-FaceRa≤0.2nm
C-Face Ra≤ 0.5nm
(5umx5um) Si-Face Ra≤0.2nm
C-Face Ra≤0.5nm
Li-Chips tsa Edge Ha ho e dumellwe (bolelele le bophara≥0.5mm)
Li-indent Ha ho le e 'ngoe e Lumelloang
Scratches(Si-Face) Kty.≤5, Kakaretso
Bolelele≤0.5× bophara ba wafer
Kty.≤5, Kakaretso
Bolelele≤0.5× bophara ba wafer
Kty.≤5, Kakaretso
Bolelele≤0.5× bophara ba wafer
Mapetso Ha ho le e 'ngoe e Lumelloang
Kenyelletso ea Edge 3mm
Libeke tse 2-2
Setšoantšo sa 2-1
Li-wafers tsa SiC

  • E fetileng:
  • E 'ngoe: