Anti-oxidation bohloeki bo phahameng ba SiC e koahetsoeng ka MOCVD

Tlhaloso e Khutšoanyane:

Semicera Energy Technology Co., Ltd. ke morekisi ea itlhommeng pele ea ipabolang ka li-wafer le lisebelisoa tse tsoetseng pele tsa semiconductor.Re inehetse ho fana ka lihlahisoa tsa boleng bo holimo, tse tšepahalang le tse ncha ho tlhahiso ea semiconductor,indasteri ea photovoltaicle mafapha a mang a amanang.

Mohala oa rona oa lihlahisoa o kenyelletsa lihlahisoa tsa graphite tse koahetsoeng ke SiC / TaC le lihlahisoa tsa ceramic, tse kenyelletsang lisebelisoa tse fapaneng tse kang silicon carbide, silicon nitride, le aluminium oxide joalo-joalo.

Joaloka mofani oa thepa ea tšepahalang, re utloisisa bohlokoa ba thepa e ka sebelisoang ha ho etsoa tlhahiso, 'me re ikemiselitse ho fana ka lihlahisoa tse finyellang litekanyetso tsa boleng bo holimo ho phethahatsa litlhoko tsa bareki ba rona.

 

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Tlhaloso

Khampani ea rona e fana kaHo roala ha SiClits'ebeletso tsa ts'ebetso ka mokhoa oa CVD holim'a graphite, li-ceramics le lisebelisoa tse ling, e le hore likhase tse khethehileng tse nang le k'habone le silicon li sebetsane le mocheso o phahameng ho fumana bohloeki bo phahameng ba limolek'hule tsa SiC, limolek'hule tse behiloeng holim'a lisebelisoa tse koahetsoeng, li etsaLera le sireletsang la SiC.

 

Likarolo tse ka Sehloohong

1. Ho hanyetsa mocheso o phahameng oa oxidation:
khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho 1600 C.
2. Bohloeki bo phahameng: bo entsoeng ka ho kenngoa ha mouoane oa lik'hemik'hale tlas'a boemo bo phahameng ba mocheso oa chlorination.
3. Ho hanyetsa khoholeho ea mobu: boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.
4. Ho hanyetsa kutu: acid, alkali, letsoai le li-reagents tse phelang.

Lintlha tse ka sehloohong tsa CVD-SIC Coating

SiC-CVD Properties
Sebopeho sa Crystal FCC mohato oa β
Botenya g/cm³ 3.21
Ho thatafala Vickers thata 2500
Boholo ba lijo-thollo μm 2~10
Bohloeki ba Lik'hemik'hale % 99.99995
Matla a Mocheso J·kg-1 ·K-1 640
Sublimation Mocheso 2700
Felexural Matla MPa (RT 4-point) 415
Modulus e monyane Gpa (4pt bend, 1300 ℃) 430
Katoloso ea Thermal (CTE) 10-6K-1 4.5
Thermal conductivity (W/mK) 300
MOCVD EPITAXIAL LIKAROLO
Disk ea MOCVD

Boemo ba Khoebo

Semicera Energy ke e mong oa bahlahisi le barekisi ba silicon carbide coated epitaxial sheet pallets naheng ea China.Lihlahisoa tsa rona tsa mantlha li kenyelletsa: lipoleiti tsa silicon carbide etch, silicon carbide boat trailers,liketsoana tsa silicon carbide(PV & Semiconductor), li-tubes tsa silicon carbide sebōpi,silicon carbide cantilever paddles, silicon carbide chucks, silicon carbide libalaka, hammoho leLiaparo tsa CVD SiCle liphahlo tsa TaC.

Lihlahisoa li sebelisoa haholo indastering ea semiconductor le photovoltaic, joalo ka kholo ea kristale, epitaxy, etching, package, ho roala le lisebelisoa tsa sebōpi sa diffusion.Reka lipallet tsa SIC tse koahetsoeng ka li-epitaxial sheet ka litheko tse tlase ho tsoa fekthering ea rona.Re na le lebitso la rona mme re boetse re tšehetsa bongata.Haeba u thahasella lihlahisoa tsa rona, re tla u fa theko e tlaase.Rea u amohela ho lihlahisoa tsa rona tsa morao-rao tsa litheolelo tsa boleng bo holimo.

Khampani ea rona e na le lisebelisoa tse feletseng tsa tlhahiso tse kang ho bōpa, ho etsa sintering, ho sebetsa, lisebelisoa tsa ho roala, joalo-joalo, tse ka tlatsang lihokelo tsohle tse hlokahalang tsa tlhahiso ea lihlahisoa le ho ba le taolo e phahameng ea boleng ba sehlahisoa;Morero o nepahetseng oa tlhahiso o ka khethoa ho ea ka litlhoko tsa sehlahisoa, ho fella ka theko e tlaase le ho fa bareki lihlahisoa tse ngata tsa tlhōlisano;Re ka khona ho hlophisa tlhahiso ka mokhoa o bonolo le ka katleho ho latela litlhoko tsa ho fana ka taelo le ka kopanelo le litsamaiso tsa taolo ea odara ea inthaneteng, ho fa bareki nako e potlakileng le e netefalitsoeng ea ho fana.
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