4″6″ 8″ N-mofuta oa SiC Ingot

Tlhaloso e Khutšoanyane:

Li-Ingots tsa Semicera tsa 4 ″, 6 ″, le 8 ″ N-mofuta oa SiC ke lejoe la sekhutlo la lisebelisoa tsa semiconductor tsa matla a phahameng le a maqhubu a holimo. Ho fana ka thepa e phahameng ea motlakase le conductivity ea mocheso, li-ingots tsena li entsoe ho tšehetsa tlhahiso ea likarolo tsa elektronike tse tšepahalang le tse sebetsang hantle. Tšepa Semicera bakeng sa boleng bo ke keng ba bapisoa le ts'ebetso.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Semicera's 4", 6", le 8" N-type SiC Ingots e emela katleho ea thepa ea semiconductor, e etselitsoeng ho finyella litlhoko tse ntseng li eketseha tsa lisebelisoa tsa morao-rao tsa elektronike le matla. tshebetso le bophelo bo bolelele.

Li-ingots tsa rona tsa mofuta oa N-SiC li hlahisoa ka mekhoa e tsoetseng pele ea tlhahiso e matlafatsang tsamaiso ea bona ea motlakase le botsitso ba mocheso. Sena se etsa hore e be tse loketseng bakeng sa lits'ebetso tsa matla a holimo le a maqhubu a phahameng, joalo ka li-inverters, li-transistors, le lisebelisoa tse ling tsa elektroniki tsa motlakase moo ho sebetsa hantle le ho ts'epahala ho tlang pele.

Doping e nepahetseng ea li-ingots tsena e netefatsa hore li fana ka ts'ebetso e tsitsitseng le e phetoang. Ho tsitsana hona ho bohlokoa bakeng sa bahlahisi le bahlahisi ba sutumetsang meeli ea theknoloji mafapheng a kang sefofane, likoloi le likhokahano tsa mehala. Li-ingots tsa SiC tsa Semicera li nolofalletsa tlhahiso ea lisebelisoa tse sebetsang hantle tlas'a maemo a feteletseng.

Ho khetha Semicera's N-type SiC Ingots ho bolela ho kopanya lisebelisoa tse khonang ho sebetsana le mocheso o phahameng le meroalo e phahameng ea motlakase habonolo. Li-ingots tsena li loketse ka ho khetheha bakeng sa ho theha likarolo tse hlokang taolo e ntle ea mocheso le ts'ebetso ea maqhubu a phahameng, joalo ka li-amplifiers tsa RF le li-module tsa motlakase.

Ka ho khetha Semicera's 4", 6", le 8" N-type SiC Ingots, u tsetela ho sehlahisoa se kopanyang thepa e ikhethang ka ho nepahala le ho ts'epahala ho hlokoang ke mahlale a morao-rao a semiconductor. Semicera e ntse e tsoela pele ho etella indasteri pele ho fana ka litharollo tse ncha tse tsamaisang tsoelopele ea tlhahiso ea lisebelisoa tsa elektroniki.

Lintho

Tlhahiso

Patlisiso

Dummy

Crystal Parameters

Polytype

4H

Phoso ea ho shebana le bokaholimo

<11-20>4±0.15°

Litekanyetso tsa Motlakase

Dopant

n-mofuta oa Nitrojene

Ho hanyetsa

0.015-0.025ohm · cm

Mechanical Parameters

Diameter

150.0±0.2mm

Botenya

350±25 μm

Boemo ba mantlha bo bataletseng

[1-100]±5°

Bolelele ba pele bo bataletseng

47.5±1.5mm

Folete ea bobeli

Ha ho letho

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Inamela

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Front(Si-face) roughness(AFM)

Ra≤0.2nm (5μm*5μm)

Sebopeho

Boima ba micropipe

<1 e/cm2

<10 e/cm2

<15 e/cm2

Litšila tsa tšepe

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Boleng ba Pele

Pele

Si

Qetello ea bokaholimo

Si-face CMP

Likaroloana

≤60ea/wafer (boholo ≥0.3μm)

NA

Mengwapo

≤5ea/mm. Bolelele ba kakaretso ≤Diameter

Bolelele bo akaretsang≤2*Diameter

NA

Lekhapetla la lamunu/makoti/matheba/maphatso/mapetso/tshilafatso

Ha ho letho

NA

Li-edge chips/indents/fracture/hex plates

Ha ho letho

Libaka tsa polytype

Ha ho letho

Kakaretso≤20%

Kakaretso≤30%

Ho tšoaea ka laser ka pele

Ha ho letho

Boleng ba Morao

Qetello ea morao

C-sefahleho sa CMP

Mengwapo

≤5ea/mm, bolelele bo akaretsang≤2* bophara

NA

Litšitiso tse ka morao (li-chips / indents)

Ha ho letho

Bokhopo ba mokokotlo

Ra≤0.2nm (5μm*5μm)

Ho tšoaea ka morao laser

1 mm (ho tloha pheletsong e ka holimo)

Qetello

Qetello

Chamfer

Sephutheloana

Sephutheloana

Epi e loketse ho paka ka vacuum

Sephutheloana sa lik'hasete tse nang le liphaephe tse ngata

*Lintlha: "NA" e bolela hore ha ho na kopo Lintho tse sa boleloang li ka lebisa ho SEMI-STD.

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Li-wafers tsa SiC

  • E fetileng:
  • E 'ngoe: