4 Inch High Purity Semi-Insulating HPSI SiC e Mahlakoreng a mabeli e bentšitsoeng ea Wafer Substrate

4 Inch High Purity Semi-Insulating HPSI SiC Mahlakore Habeli a Pontshitsoeng Sephaephe sa Setshwantsho se Featured

Tlhaloso e Khutšoanyane:

Semicera's 4 Inch High Purity Semi-Insulating (HPSI) SiC Double-side Polished Wafer Substrates e entsoe ka nepo bakeng sa ts'ebetso ea elektroniki e holimo. Li-wafers tsena li fana ka conductivity e ntle ea mocheso le ho kenya motlakase, tse loketseng lits'ebetso tse tsoetseng pele tsa semiconductor. Tšepa Semicera bakeng sa boleng bo ke keng ba lekanngoa le boqapi ba theknoloji ea wafer.

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Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Semicera's 4 Inch High Purity Semi-Insulating (HPSI) SiC Double-side Polished Wafer Substrates e entsoe ka boqhetseke ho fihlela litlhoko tse nepahetseng tsa indasteri ea semiconductor. Li-substrates tsena li entsoe ka bokhabane bo ikhethang le bohloeki, li fana ka sethala se nepahetseng bakeng sa lisebelisoa tsa elektroniki tse tsoetseng pele.

Li-wafer tsena tsa HPSI SiC li khetholloa ka mokhoa o phahameng oa ho tsamaisa mocheso le thepa ea ho kenya motlakase, e leng se etsang hore e be khetho e babatsehang bakeng sa lisebelisoa tse phahameng le tse matla haholo. Ts'ebetso ea ho bentša ka mahlakoreng a mabeli e tiisa hore ho na le mahlaku a fokolang a holim'a metsi, e leng a bohlokoa bakeng sa ho ntlafatsa ts'ebetso ea lisebelisoa le ho phela nako e telele.

Bohloeki bo phahameng ba li-wafers tsa Semicera's SiC bo fokotsa bofokoli le litšila, bo lebisang ho litheko tse phahameng tsa chai le ts'epahalo ea lisebelisoa. Li-substrates tsena li loketse lits'ebetso tse fapaneng, ho kenyeletsoa lisebelisoa tsa microwave, lisebelisoa tsa elektroniki tsa motlakase, le theknoloji ea LED, moo ho nepahala le ho tšoarella ho hlokahalang.

E tsepamisitse maikutlo ho boqapi le boleng, Semicera e sebelisa mekhoa e tsoetseng pele ea tlhahiso ho hlahisa liphaphatha tse fihlelang litlhoko tse thata tsa lisebelisoa tsa elektroniki tsa sejoale-joale. Ho belisoa ka mahlakoreng a mabeli ha ho ntlafatse matla a mochine feela empa hape ho thusa ho kopanya hamolemo le lisebelisoa tse ling tsa semiconductor.

Ka ho khetha Semicera's 4 Inch High Purity Semi-Insulating HPSI SiC Double-side Polished Wafer Substrates, bahlahisi ba ka sebelisa melemo ea taolo e ntlafalitsoeng ea mocheso le ho kenya motlakase, ba bula tsela bakeng sa nts'etsopele ea lisebelisoa tsa elektroniki tse sebetsang hantle le tse matla haholoanyane. Semicera e ntse e tsoela pele ho etella pele indasteri ka boitlamo ba eona ba boleng le tsoelo-pele ea theknoloji.

Lintho	Tlhahiso	Patlisiso	Dummy
Crystal Parameters
Polytype	4H
Phoso ea ho shebana le bokaholimo	<11-20>4±0.15°
Litekanyetso tsa Motlakase
Dopant	n-mofuta oa Nitrojene
Ho hanyetsa	0.015-0.025ohm · cm
Mechanical Parameters
Diameter	150.0±0.2mm
Botenya	350±25 μm
Boemo ba mantlha bo bataletseng	[1-100]±5°
Bolelele ba pele bo bataletseng	47.5±1.5mm
Folete ea bobeli	Ha ho letho
TTV	≤5 μm	≤10 μm	≤15 μm
LTV	≤3 μm(5mm*5mm)	≤5 μm(5mm*5mm)	≤10 μm(5mm*5mm)
Inamela	-15μm ~ 15μm	-35μm ~ 35μm	-45μm ~ 45μm
Warp	≤35 μm	≤45 μm	≤55 μm
Front(Si-face) roughness(AFM)	Ra≤0.2nm (5μm*5μm)
Sebopeho
Boima ba micropipe	<1 e/cm2	<10 e/cm2	<15 e/cm2
Litšila tsa tšepe	≤5E10atoms/cm2		NA
BPD	≤1500 ea/cm2	≤3000 ea/cm2	NA
TSD	≤500 ea/cm2	≤1000 ea/cm2	NA
Boleng ba Pele
Pele	Si
Qetello ea bokaholimo	Si-face CMP
Likaroloana	≤60ea/wafer (boholo ≥0.3μm)	NA
Mengwapo	≤5ea/mm. Bolelele ba kakaretso ≤Diameter	Bolelele bo akaretsang≤2*Diameter	NA
Lekhapetla la lamunu/makoti/matheba/maphatso/mapetso/tshilafatso	Ha ho letho		NA
Li-edge chips/indents/fracture/hex plates	Ha ho letho
Libaka tsa polytype	Ha ho letho	Kakaretso≤20%	Kakaretso≤30%
Ho tšoaea ka laser ka pele	Ha ho letho
Boleng ba Morao
Qetello ea morao	C-sefahleho sa CMP
Mengwapo	≤5ea/mm, bolelele bo akaretsang≤2* bophara	NA
Litšitiso tse ka morao (li-chips / indents)	Ha ho letho
Bokhopo ba mokokotlo	Ra≤0.2nm (5μm*5μm)
Ho tšoaea ka morao laser	1 mm (ho tloha pheletsong e ka holimo)
Qetello
Qetello	Chamfer
Sephutheloana
Sephutheloana	Epi-reading ka sephutheloana sa vacuum Sephutheloana sa lik'hasete tse nang le liphaephe tse ngata
*Lintlha: "NA" e bolela hore ha ho na kopo Lintho tse sa boleloang li ka lebisa ho SEMI-STD.