6 Inch N-mofuta SiC Sephaephe

Tlhaloso e Khutšoanyane:

Semicera's 6 Inch N-mofuta oa SiC Wafer e fana ka ts'ebetso e tsotehang ea mocheso le matla a maholo a motlakase, e leng se etsang hore e be khetho e phahameng bakeng sa matla le lisebelisoa tsa RF. Sephaphatha sena, se etselitsoeng ho fihlela litlhoko tsa indasteri, se fana ka mohlala oa boitlamo ba Semicera ho boleng le boqapi ba thepa ea semiconductor.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Semicera's 6 Inch N-type SiC Wafer e eme ka pele ho theknoloji ea semiconductor. E entsoe bakeng sa ts'ebetso e nepahetseng, sephaphatha sena se ipabola ka ho sebelisa matla a holimo, maqhubu a holimo le mocheso o phahameng, se bohlokoa bakeng sa lisebelisoa tse tsoetseng pele tsa elektroniki.

Sephepana sa rona sa 6 Inch N-mofuta oa SiC se na le motsamao o phahameng oa elektronike le ho hanyetsa ho fokolang, e leng litekanyetso tsa bohlokoa bakeng sa lisebelisoa tsa motlakase tse kang MOSFET, diode le likarolo tse ling. Thepa ena e netefatsa phetoho e sebetsang ea matla le ho fokotsa mocheso oa mocheso, ho matlafatsa ts'ebetso le nako ea bophelo ea lisebelisoa tsa elektronike.

Ts'ebetso e matla ea taolo ea boleng ba Semicera e netefatsa hore sephaphatha se seng le se seng sa SiC se boloka bokhabane bo holimo le bofokoli bo fokolang. Tlhokomelo ena e hlokolosi ea lintlha e netefatsa hore li-wafers tsa rona li fihlela litlhoko tse thata tsa liindasteri tse kang tsa makoloi, sefofane le likhokahano tsa mehala.

Ntle le thepa ea eona e phahameng ea motlakase, sephaphatha sa SiC sa mofuta oa N se fana ka botsitso bo matla ba mocheso le ho hanyetsa mocheso o phahameng, e leng se etsang hore e be se loketseng libakeng tseo lisebelisoa tse tloaelehileng li ka hlolehang ho tsona. Bokhoni bona bo bohlokoa haholo lits'ebetsong tse amanang le ts'ebetso ea maqhubu a holimo le a matla a phahameng.

Ka ho khetha Semicera's 6 Inch N-type SiC Wafer, u tsetela ho sehlahisoa se emelang tlhōrō ea boqapi ba semiconductor. Re ikemiseditse ho fana ka diboloko tsa ho aha disebediswa tsa moraorao, ho netefatsa hore balekane ba rona diindastering tse fapaneng ba fihlella disebediswa tse molemo ka ho fetisisa bakeng sa ntshetsopele ya bona ya thekenoloji.

Lintho

Tlhahiso

Patlisiso

Dummy

Crystal Parameters

Polytype

4H

Phoso ea ho shebana le bokaholimo

<11-20>4±0.15°

Litekanyetso tsa Motlakase

Dopant

n-mofuta oa Nitrojene

Ho hanyetsa

0.015-0.025ohm · cm

Mechanical Parameters

Diameter

150.0±0.2mm

Botenya

350±25 μm

Boemo ba mantlha bo bataletseng

[1-100]±5°

Bolelele ba pele bo bataletseng

47.5±1.5mm

Folete ea bobeli

Ha ho letho

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Inamela

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Front(Si-face) roughness(AFM)

Ra≤0.2nm (5μm*5μm)

Sebopeho

Boima ba micropipe

<1 e/cm2

<10 e/cm2

<15 e/cm2

Litšila tsa tšepe

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Boleng ba Pele

Pele

Si

Qetello ea bokaholimo

Si-face CMP

Likaroloana

≤60ea/wafer (boholo ≥0.3μm)

NA

Mengwapo

≤5ea/mm. Bolelele ba kakaretso ≤Diameter

Bolelele bo akaretsang≤2*Diameter

NA

Lekhapetla la lamunu/makoti/matheba/maphatso/mapetso/tshilafatso

Ha ho letho

NA

Li-edge chips/indents/fracture/hex plates

Ha ho letho

Libaka tsa polytype

Ha ho letho

Kakaretso≤20%

Kakaretso≤30%

Ho tšoaea ka laser ka pele

Ha ho letho

Boleng ba Morao

Qetello ea morao

C-sefahleho sa CMP

Mengwapo

≤5ea/mm, bolelele bo akaretsang≤2* bophara

NA

Litšitiso tse ka morao (li-chips / indents)

Ha ho letho

Bokhopo ba mokokotlo

Ra≤0.2nm (5μm*5μm)

Ho tšoaea ka morao laser

1 mm (ho tloha pheletsong e ka holimo)

Qetello

Qetello

Chamfer

Sephutheloana

Sephutheloana

Epi e loketse ho paka ka vacuum

Sephutheloana sa lik'hasete tse nang le liphaephe tse ngata

*Lintlha: "NA" e bolela hore ha ho na kopo Lintho tse sa boleloang li ka lebisa ho SEMI-STD.

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Li-wafers tsa SiC

  • E fetileng:
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