ALD Atomic Layer Deposition Planetary Susceptor

Tlhaloso e Khutšoanyane:

ALD Atomic Layer Deposition Planetary Susceptor ka Semicera e etselitsoe ho beha lifilimi tse tšesaane hantle le tse ts'oanang ha ho etsoa li-semiconductor. Kaho ea eona e matla le lisebelisoa tse tsoetseng pele li netefatsa ts'ebetso e phahameng le bophelo bo bolelele. Semicera's susceptor e ntlafatsa boleng ba deposition le ts'ebetso ea ts'ebetso, e e etsa karolo ea bohlokoa bakeng sa lits'ebetso tsa ALD tse tsoetseng pele.

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Atomic layer deposition (ALD) ke theknoloji ea ho beha mouoane oa lik'hemik'hale e holisang lifilimi tse tšesaane ka lera ka ho kenya limolek'hule tse peli kapa ho feta tse tlang pele. ALD e na le melemo ea taolo e phahameng le ho ts'oana, 'me e ka sebelisoa haholo lisebelisoa tsa semiconductor, lisebelisoa tsa optoelectronic, lisebelisoa tsa polokelo ea matla le masimo a mang. Melao-motheo ea motheo ea ALD e kenyelletsa li-precursor adsorption, karabelo ea holim'a metsi le ho tlosoa ha lihlahisoa, le lisebelisoa tse ngata tsa marang-rang li ka thehoa ka ho pheta mehato ena ka potoloho. ALD e na le litšoaneleho le melemo ea taolo e phahameng, ho ts'oana, le sebopeho se se nang porous, mme e ka sebelisoa bakeng sa ho beha mefuta e fapaneng ea lisebelisoa tsa substrate le lisebelisoa tse fapaneng.

ALD Atomic Deposition Planetary Susceptor (1)

ALD e na le litšobotsi le melemo e latelang:
1. Taolo e phahameng:Kaha ALD ke ts'ebetso ea ho hola ka lera, botenya le sebopeho sa karolo ka 'ngoe ea lisebelisoa li ka laoloa ka nepo.
2. Ho tšoana:ALD e ka beha lisebelisoa ka mokhoa o ts'oanang sebakeng sohle sa substrate, ho qoba ho se lekane ho ka bang teng ho mahlale a mang a deposition.
3. Sebopeho se se nang porous:Kaha ALD e kenngoa ka lihlopha tsa liathomo tse le 'ngoe kapa limolek'hule tse le' ngoe, filimi e hlahisoang hangata e na le sebopeho se teteaneng, se se nang porous.
4. Ts'ebetso e ntle ea tšireletso:ALD e ka koahela ka nepo meaho ea likarolo tse phahameng, joalo ka li-nanopore arrays, lisebelisoa tse phahameng tsa porosity, jj.
5. Scalability:ALD e ka sebelisoa bakeng sa lisebelisoa tse fapaneng tsa substrate, ho kenyeletsoa tšepe, li-semiconductors, khalase, jj.
6. Ho feto-fetoha ha maemo:Ka ho khetha limolek'hule tse fapaneng tsa selelekela, lisebelisoa tse fapaneng tse fapaneng li ka kenngoa ts'ebetsong ea ALD, joalo ka li-oxide tsa tšepe, li-sulfide, nitrides, jj.