Anti-oxidation bohloeki bo phahameng ba SiC e koahetsoeng ka MOCVD

Tlhaloso e Khutšoanyane:

Semicera Energy Technology Co., Ltd. ke morekisi ea itlhommeng pele ea ipabolang ka li-wafer le lisebelisoa tse tsoetseng pele tsa semiconductor.Re inehetse ho fana ka lihlahisoa tsa boleng bo holimo, tse tšepahalang le tse ncha ho tlhahiso ea semiconductor,indasteri ea photovoltaicle mafapha a mang a amanang.

Mohala oa rona oa lihlahisoa o kenyelletsa lihlahisoa tsa graphite tse koahetsoeng ke SiC / TaC le lihlahisoa tsa ceramic, tse kenyelletsang lisebelisoa tse fapaneng tse kang silicon carbide, silicon nitride, le aluminium oxide joalo-joalo.

Joaloka mofani oa thepa ea tšepahalang, re utloisisa bohlokoa ba thepa e ka sebelisoang ha ho etsoa tlhahiso, 'me re ikemiselitse ho fana ka lihlahisoa tse finyellang litekanyetso tsa boleng bo holimo ho phethahatsa litlhoko tsa bareki ba rona.

 

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Tlhaloso

Khampani ea rona e fana kaHo roala ha SiClits'ebeletso tsa ts'ebetso ka mokhoa oa CVD holim'a graphite, li-ceramics le lisebelisoa tse ling, e le hore likhase tse khethehileng tse nang le k'habone le silicon li sebetsane le mocheso o phahameng ho fumana bohloeki bo phahameng ba limolek'hule tsa SiC, limolek'hule tse behiloeng holim'a lisebelisoa tse koahetsoeng, li etsaLera le sireletsang la SiC.

 

Likarolo tse ka Sehloohong

1. Ho hanyetsa mocheso o phahameng oa oxidation:
khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho 1600 C.
2. Bohloeki bo phahameng: bo entsoeng ka ho kenngoa ha mouoane oa lik'hemik'hale tlas'a boemo bo phahameng ba mocheso oa chlorination.
3. Ho hanyetsa khoholeho ea mobu: boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.
4. Ho hanyetsa kutu: acid, alkali, letsoai le li-reagents tse phelang.

Lintlha tse ka sehloohong tsa CVD-SIC Coating

SiC-CVD Properties
Sebopeho sa Crystal FCC mohato oa β
Botenya g/cm³ 3.21
Ho thatafala Vickers thata 2500
Boholo ba lijo-thollo μm 2~10
Bohloeki ba Lik'hemik'hale % 99.99995
Matla a Mocheso J·kg-1 ·K-1 640
Sublimation Mocheso 2700
Felexural Matla MPa (RT 4-point) 415
Modulus e monyane Gpa (4pt bend, 1300 ℃) 430
Katoloso ea Thermal (CTE) 10-6K-1 4.5
Thermal conductivity (W/mK) 300
MOCVD EPITAXIAL LIKAROLO
Disk ea MOCVD

Thepa

ka

Semicera Sebaka sa mosebetsi
Sebaka sa mosebetsi sa Semicera 2
Mochini oa lisebelisoa
Ts'ebetso ea CNN, ho hloekisa lik'hemik'hale, ho roala CVD
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