Lesale la Bulk CVD SiC

Tlhaloso e Khutšoanyane:

Mehele e mengata ea CVD SiC e sebelisa khase ea mohloli oa silicon (joalo ka silicon hydride) le khase ea mohloli oa carbon (joaloka methane) e le lisebelisoa tse tala, tse sebetsanang le mocheso o phahameng ho kenya lisebelisoa tsa SiC tsa boholo bo boholo holim'a substrate kapa hlobo. Ts'ebetso ena e lumella SiC hore e behoe ka mokhoa o ts'oanang sebakeng se seholo, ho etsa mohaho o matla le o tsitsitseng oa lesale.

Re romelle lengolo-tsoibila

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Hobaneng ha Silicon Carbide Etching Ring?

RTPCVD SiC meheleli sebelisoa haholo libakeng tsa indasteri le tsa mahlale maemong a mocheso o phahameng le tikoloho e senyang. E bapala karolo ea bohlokoa tlhahisong ea semiconductor, optoelectronics, mechini e nepahetseng le indastering ea lik'hemik'hale. Lisebelisoa tse khethehileng li kenyelletsa:

1. Ho etsa semiconductor:RTP CVD SiC mehelee ka sebelisoa bakeng sa ho futhumatsa le ho pholisa lisebelisoa tsa semiconductor, ho fana ka taolo e tsitsitseng ea mocheso le ho netefatsa ho nepahala le ho tsitsa ha ts'ebetso.

2. Optoelectronics: Ka lebaka la conductivity ea eona e ntle ea mocheso le ho hanyetsa mocheso o phahameng, RTPCVD SiC mehelee ka sebelisoa e le lisebelisoa tsa ts'ehetso le ho chesa mocheso bakeng sa lasers, lisebelisoa tsa puisano tsa fiber optic le likarolo tsa optical.

3. Mechine e nepahetseng: Mehele ea RTP CVD SiC e ka sebelisoa bakeng sa lisebelisoa le lisebelisoa tse nepahetseng mocheso o phahameng le libaka tse senyang, tse kang libōpi tsa mocheso o phahameng, lisebelisoa tsa vacuum le lik'hemik'hale tsa lik'hemik'hale.

4. Indasteri ea lik'hemik'hale: Ka lebaka la ho hanyetsa ha kutu le botsitso ba lik'hemik'hale, mehele ea RTP CVD SiC e ka sebelisoa ka lijaneng, liphaephe le li-reactors ka lik'hemik'hale tsa lik'hemik'hale le mekhoa ea catalytic.

Sistimi ea Epi

Sistimi ea RTP

Sistimi ea CVD

Ts'ebetso ea sehlahisoa:

1. Kopana le ts'ebetso e ka tlase ho 28nm

2. Super corrosion resistance

3. Super hloekile tshebetso

4. Super hardness

5. Boima bo phahameng

6. Ho hanyetsa mocheso o phahameng

7. Apara khanyetso

Sesebelisoa sa sehlahisoa:

Lisebelisoa tsa silicon carbide li na le litšobotsi tsa boima bo phahameng, ho hanyetsa ho roala, ho hanyetsa kutu le botsitso bo phahameng ba mocheso. Lihlahisoa tse nang le ts'ebetso e phethahetseng e felletseng li sebelisoa haholo lits'ebetsong tsa etching le TF / Diffusion.