BongataLesale la CVD SiCke thepa e ngata ea silicon carbide (SiC) e lokiselitsoeng ke thekenoloji ea lik'hemik'hale tsa vapor deposition (CVD).
BongataLesale la CVD SiCe na le litšobotsi tse ngata tse ntle tsa ts'ebetso. Ntlha ea pele, e na le ntlha e phahameng ea ho qhibiliha le boima bo phahameng, e bontšang ho hanyetsa mocheso o phahameng haholo. Sena se etsa hore e be le botsitso bo babatsehang maemong a mocheso o phahameng 'me e khona ho mamella mocheso o feteletseng le potoloho ea mocheso. Ea bobeli, BongataLesale la CVD SiCe na le botsitso bo botle ba lik'hemik'hale le ho hanyetsa kutu, 'me e na le khanyetso e phahameng ea mecha ea litaba e senyang joalo ka acid le alkalis. Ho phaella moo, e boetse e na le conductivity e babatsehang ea mocheso le matla a mochine, e leng se nolofalletsang ho boloka botsitso le ho tšepahala mocheso o phahameng, khatello e phahameng le libaka tse senyang.
BongataLesale la CVD SiCe sebelisoa haholo mafapheng a mangata. Hangata e sebelisoa lisebelisoa tsa ts'ebetso ea mocheso o phahameng joalo ka libopi tsa mocheso o phahameng, lisebelisoa tsa vacuum le li-reactor tsa lik'hemik'hale e le lisebelisoa tsa ho itšehla thajana le tšireletso. Ho feta moo, e ka boela ea sebelisoa ho optoelectronics, tlhahiso ea semiconductor, mechine e nepahetseng, indasteri ea nyutlelie le sefofane, e fana ka mamello e phahameng ea tikoloho le botšepehi.
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Epitaxy Growth Susceptor
Li-wafers tsa silicon / silicon carbide li hloka ho feta lits'ebetsong tse ngata tse lokelang ho sebelisoa lisebelisoa tsa elektroniki. Ts'ebetso ea bohlokoa ke silicon / sic epitaxy, eo ho eona liphaephe tsa silicon / sic li tsamaisoang holim'a setsi sa graphite. Melemo e ikhethang ea Semicera's silicon carbide-coated graphite base e kenyelletsa bohloeki bo phahameng haholo, ho roala ka mokhoa o ts'oanang, le bophelo bo bolelele ba ts'ebeletso. Li boetse li na le khanyetso e phahameng ea lik'hemik'hale le botsitso ba mocheso.
Tlhahiso ea Chip ea LED
Nakong ea ho roala ho pharaletseng ha mochine oa MOCVD, setsi sa polanete kapa sejari se tsamaisa sephaphatha sa substrate. Ts'ebetso ea thepa ea motheo e na le tšusumetso e kholo holim'a boleng ba ho roala, e leng se amang sekhahla sa sekhechana sa chip. Semicera's silicon carbide-coated base e eketsa katleho ea tlhahiso ea li-wafers tsa boleng bo holimo tsa LED mme e fokotsa ho kheloha ha leqhubu. Re boetse re fana ka likarolo tse ling tsa graphite bakeng sa li-reactor tsohle tsa MOCVD tse ntseng li sebelisoa hona joale. Re ka apesa hoo e batlang e le karolo efe kapa efe ka silicon carbide coating, le haeba bophara ba karolo e fihla ho 1.5M, re ntse re ka apara ka silicon carbide.
Tšimo ea Semiconductor, Ts'ebetso ea Phallo ea Oxidation, jj.
Ts'ebetsong ea semiconductor, ts'ebetso ea katoloso ea oxidation e hloka bohloeki bo phahameng ba sehlahisoa, 'me ho Semicera re fana ka litšebeletso tsa ho roala tloaelo le CVD bakeng sa boholo ba likarolo tsa silicon carbide.
Setšoantšo se latelang se bontša silicon carbide slurry e entsoeng ka thata ea Semicea le tube ea silicon carbide sebōpi e hloekisitsoeng ka 100.0- boemoe hlokang lerolekamore. Basebetsi ba rona ba sebetsa pele ba roala. Bohloeki ba silicon carbide ea rona bo ka fihla ho 99.99%, 'me bohloeki ba ho roala sic bo feta 99.99995%..