Tray ea ICP ea Semiconductor (Etching)

Tlhaloso e Khutšoanyane:

Semicera Energy Technology Co., Ltd. ke morekisi ea itlhommeng pele ea ipabolang ka li-wafer le lisebelisoa tse tsoetseng pele tsa semiconductor.Re inehetse ho fana ka lihlahisoa tsa boleng bo holimo, tse tšepahalang le tse ncha ho tlhahiso ea semiconductor,indasteri ea photovoltaicle mafapha a mang a amanang.

Mohala oa rona oa lihlahisoa o kenyelletsa lihlahisoa tsa graphite tse koahetsoeng ke SiC / TaC le lihlahisoa tsa ceramic, tse kenyelletsang lisebelisoa tse fapaneng tse kang silicon carbide, silicon nitride, le aluminium oxide joalo-joalo.

Joaloka mofani oa thepa ea tšepahalang, re utloisisa bohlokoa ba thepa e ka sebelisoang ha ho etsoa tlhahiso, 'me re ikemiselitse ho fana ka lihlahisoa tse finyellang litekanyetso tsa boleng bo holimo ho phethahatsa litlhoko tsa bareki ba rona.

 

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Tlhaloso ea Sehlahisoa

Khamphani ea rona e fana ka lits'ebeletso tsa ts'ebetso ea ho roala SiC ka mokhoa oa CVD holim'a graphite, li-ceramics le lisebelisoa tse ling, e le hore likhase tse khethehileng tse nang le carbon le silicon li sebetsane le mocheso o phahameng ho fumana limolek'hule tsa SiC tse hloekileng, limolek'hule tse behiloeng holim'a thepa e koahetsoeng, ho etsa lera la tšireletso la SIC.

Lintlha tse ka sehloohong:

1. Ho hanyetsa mocheso o phahameng oa oxidation:

khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho 1600 C.

2. Bohloeki bo phahameng : bo entsoeng ka ho kenngoa ha mouoane oa lik'hemik'hale tlas'a boemo bo phahameng ba mocheso oa chlorination.

3. Ho hanyetsa khoholeho ea mobu: boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.

4. Ho hanyetsa kutu: acid, alkali, letsoai le li-reagents tse phelang.

3

Lintlha tse ka sehloohong tsa CVD-SIC Coating

SiC-CVD Properties

Sebopeho sa Crystal

FCC mohato oa β

Botenya

g/cm³

3.21

Ho thatafala

Vickers thata

2500

Boholo ba lijo-thollo

μm

2~10

Bohloeki ba Lik'hemik'hale

%

99.99995

Matla a Mocheso

J·kg-1 ·K-1

640

Sublimation Mocheso

2700

Felexural Matla

MPa (RT 4-point)

415

Modulus e monyane

Gpa (4pt bend, 1300 ℃)

430

Katoloso ea Thermal (CTE)

10-6K-1

4.5

Thermal conductivity

(W/mK)

300


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