CVD SiC Etching Ring

Tlhaloso e Khutšoanyane:

CVD SiC Etching Ring e tsoang Semicera e etselitsoe ho fihlela litlhoko tse matla tsa tlhahiso ea semiconductor. E entsoe ka silicon carbide ea boleng bo holimo, selikalikoe sena sa etching se netefatsa ts'ebetso e holimo lits'ebetsong tse fapaneng tsa etching. Semicera e etelletsa pele ho tšoarella le ho nepahala, e etsa hore mehele ea rona e behele karolo ea bohlokoa bakeng sa ts'ebeliso efe kapa efe e tsoetseng pele ea semiconductor.

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Hobaneng ha Silicon Carbide e koahela?

CVD SiC Etching Ring ho tloha Semicera, tharollo ea pele e etselitsoeng mekhoa e tsoetseng pele ea tlhahiso ea semiconductor. Masale a rona a etching a entsoe ka bokhabane ho ntlafatsa ts'ebetso ea lihlooho tsa shaoara tsa CVD SiC, ho netefatsa liphetho tse nepahetseng nakong ea ts'ebetso ea phallo. Ka boenjiniere ba bona bo matla le bo nepahetseng, mehele ena e fana ka ts'epo le ts'ebetso e hlokahalang bakeng sa lits'ebetso tsa boleng bo holimo tse omeletseng.

Ho Semicera, re utloisisa karolo ea bohlokoa eo silicon carbide e e bapalang ho theknoloji ea semiconductor. Masale a rona a CVD SiC etching a etselitsoe ka ho khetheha ho amohela lits'ebetso tse fapaneng, ho kenyeletsoa MOCVD le mekhoa e meng ea etching. Sebopeho se tiileng sa SiC se tiisa botsitso bo botle ba mocheso le khanyetso ea lik'hemik'hale, e etsa hore mehele ea rona ea etching e be khetho e ratoang bakeng sa tikoloho e boima haholo.

Boitlamo ba rona ho boqapi le boleng bo netefatsa hore selikalikoe se seng le se seng sa CVD SiC etching se kopana le litekanyetso tse phahameng ka ho fetisisa tsa indasteri. Khetha Semicera bakeng sa litharollo tsa hau tsa etching 'me u be le ts'ebetso e ke keng ea lekanngoa le ho tšoarella ho tsamaellanang le litlhoko tsa hau tse ikhethang. Ka boitseanape ba rona ho SiC showerheads le theknoloji ea etching, re mona ho ts'ehetsa katleho ea hau lefapheng la semiconductor.

Lefapheng la semiconductor, botsitso ba karolo ka 'ngoe bo bohlokoa haholo bakeng sa ts'ebetso eohle. Leha ho le joalo, sebakeng se nang le mocheso o phahameng, graphite e na le oxidized habonolo mme e lahleheloa, 'me ho roala ha SiC ho ka fana ka tšireletso e tsitsitseng bakeng sa likarolo tsa graphite. HoSemicerasehlopha, re na le lisebelisoa tsa rona tsa ho hloekisa graphite, tse ka laolang bohloeki ba graphite ka tlase ho 5ppm. Bohloeki ba ho roala ha silicon carbide le bona bo ka tlase ho 5ppm.