CVD Silicon Carbide(SiC) Focus Ring

Tlhaloso e Khutšoanyane:

CVD Silicon Carbide(SiC) Ring e fanoeng ke Semicera ke karolo ea bohlokoahali lefapheng le rarahaneng la tlhahiso ea semiconductor. E etselitsoe ts'ebetso ea etching mme e ka fana ka ts'ebetso e tsitsitseng le e tšepahalang bakeng sa ts'ebetso ea etching. Ring ena ea CVD Silicon Carbide(SiC) e etsoa ka mekhoa e nepahetseng le e ncha. E entsoe ka ho felletseng ka lisebelisoa tsa silicon carbide (CVD SiC) ea mouoane oa lik'hemik'hale 'me e tsejoa hohle e le moemeli oa ts'ebetso e ntle haholo 'me e natefeloa ke botumo bo phahameng indastering e boima ea semiconductor. Semicera o labalabela ho ba molekane oa hau oa nako e telele Chaena.

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Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Hobaneng ha Silicon Carbide Etching Ring?

CVD Silicon Carbide(SiC) Rings e fanoang ke Semicera ke likarolo tsa bohlokoa ho etching ea semiconductor, mohato oa bohlokoa tlhahisong ea lisebelisoa tsa semiconductor. Sebopeho sa li-rings tsena tsa CVD Silicon Carbide(SiC) se tiisa sebopeho se thata le se tšoarellang se ka mamellang maemo a thata a ts'ebetso ea etching. Kemiso ea mouoane oa lik'hemik'hale e thusa ho theha sekhahla sa SiC se hloekileng, se ts'oanang le se teteaneng, se fa mehele matla a matla a mochini, botsitso ba mocheso le ho hanyetsa kutu.

E le ntho ea bohlokoa tlhahisong ea semiconductor, CVD Silicon Carbide (SiC) Rings e sebetsa e le tšitiso e sireletsang ho sireletsa botšepehi ba li-semiconductor chips. Moralo oa eona o nepahetseng o netefatsa etching e ts'oanang le e laoloang, e thusang ho etsa lisebelisoa tse rarahaneng haholo tsa semiconductor, ho fana ka ts'ebetso e ntlafalitsoeng le ts'epahalo.

Tšebeliso ea lisebelisoa tsa CVD SiC ha ho hahoa mehele e bontša boitlamo ba boleng le ts'ebetso ea tlhahiso ea semiconductor. Sesebediswa sena se na le thepa e ikhethang, ho kenyeletsoa boleng bo phahameng ba mogote, ho se sebetse hantle ha lik'hemik'hale, le ho se mamelle ha kutu, ho etsa hore CVD Silicon Carbide (SiC) Rings e be karolo ea bohlokoa molemong oa ho lelekisa ho nepahala le ho sebetsa hantle lits'ebetsong tsa semiconductor etching.

Semicera's CVD Silicon Carbide (SiC) Ring e emela tharollo e tsoetseng pele lebaleng la tlhahiso ea semiconductor, e sebelisang thepa e ikhethang ea mouoane oa lik'hemik'hale o kentsoeng silicon carbide ho fihlela lits'ebetso tse tšepahalang le tse phahameng tsa ts'ebetso, ho khothaletsa tsoelo-pele e tsoelang pele ea theknoloji ea semiconductor. Re ikemiselitse ho fa bareki lihlahisoa tse ntle haholo le ts'ehetso ea botekgeniki ea profeshenale ho fihlela tlhoko ea indasteri ea semiconductor ea litharollo tsa boleng bo holimo le tse sebetsang hantle.

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Kopo

Epitaxy Growth Susceptor

Li-wafers tsa silicon / silicon carbide li hloka ho feta lits'ebetsong tse ngata tse lokelang ho sebelisoa lisebelisoa tsa elektroniki. Ts'ebetso ea bohlokoa ke silicon / sic epitaxy, eo ho eona liphaephe tsa silicon / sic li tsamaisoang holim'a setsi sa graphite. Melemo e ikhethang ea Semicera's silicon carbide-coated graphite base e kenyelletsa bohloeki bo phahameng haholo, ho roala ka mokhoa o ts'oanang, le bophelo bo bolelele ba ts'ebeletso. Li boetse li na le khanyetso e phahameng ea lik'hemik'hale le botsitso ba mocheso.

Silicon Epitaxy Susceptor

Silicon Carbide Epitaxy Susceptor

Tlhahiso ea Chip ea LED

Nakong ea ho roala ho pharaletseng ha mochine oa MOCVD, setsi sa polanete kapa sejari se tsamaisa sephaphatha sa substrate. Ts'ebetso ea thepa ea motheo e na le tšusumetso e kholo holim'a boleng ba ho roala, e leng se amang sekhahla sa sekhechana sa chip. Semicera's silicon carbide-coated base e eketsa katleho ea tlhahiso ea li-wafers tsa boleng bo holimo tsa LED mme e fokotsa ho kheloha ha leqhubu. Re boetse re fana ka likarolo tse ling tsa graphite bakeng sa li-reactor tsohle tsa MOCVD tse ntseng li sebelisoa hona joale. Re ka apesa hoo e batlang e le karolo efe kapa efe ka silicon carbide coating, le haeba bophara ba karolo e fihla ho 1.5M, re ntse re ka apara ka silicon carbide.

Sesebelisoa sa Epitaxy sa LED

Tšimo ea Semiconductor, Ts'ebetso ea Phallo ea Oxidation, jj.

Ts'ebetsong ea semiconductor, ts'ebetso ea katoloso ea oxidation e hloka bohloeki bo phahameng ba sehlahisoa, 'me ho Semicera re fana ka litšebeletso tsa ho roala tloaelo le CVD bakeng sa boholo ba likarolo tsa silicon carbide.

Setšoantšo se latelang se bontša silicon carbide slurry e entsoeng ka thata ea Semicea le tube ea silicon carbide sebōpi e hloekisitsoeng ka 100.0- boemoe hlokang lerolekamore. Basebetsi ba rona ba sebetsa pele ba roala. Bohloeki ba silicon carbide ea rona bo ka fihla ho 99.99%, 'me bohloeki ba ho roala sic bo feta 99.99995%..