Semicera Bohloeki bo PhahamengSilicon Carbide Paddlee entsoe ka bokhabane ho fihlela litlhoko tse thata tsa lits'ebetso tsa sejoale-joale tsa tlhahiso ea semiconductor. SenaSiC Cantilever Paddlee ipabola libakeng tse phahameng tsa mocheso, e fana ka botsitso bo ke keng ba lekanngoa ba mocheso le ho tšoarella ha mechine. Sebopeho sa SiC Cantilever se hahiloe ho mamella maemo a feteletseng, ho netefatsa ho ts'oaroa ka mokhoa o ts'epahalang oa li-wafer ho pholletsa le lits'ebetso tse fapaneng.
E 'ngoe ea lintlafatso tsa bohlokoa tsa hoSiC Paddleke moralo oa eona o bobebe empa o le matla, o lumellang ho kopanngoa ha bonolo ho litsamaiso tse teng. Ts'ebetso ea eona e phahameng ea mocheso e thusa ho boloka botsitso ba wafer nakong ea mekhahlelo e mahlonoko joalo ka etching le deposition, ho fokotsa kotsi ea tšenyo ea li-wafer le ho netefatsa chai e phahameng ea tlhahiso. Tšebeliso ea silicon carbide e phahameng haholo mohahong oa marang-rang e matlafatsa khanyetso ea eona ea ho senya le ho taboha, e fana ka bophelo bo bolelele ba ts'ebetso le ho fokotsa tlhokahalo ea ho nkeloa sebaka khafetsa.
Semicera e totobatsa haholo boqapi, ho fana kaSiC Cantilever Paddleseo ha se kopane feela empa se feta maemo a indasteri. Sekepe sena se ntlafalitsoe hore se sebelisoe lits'ebetsong tse fapaneng tsa semiconductor, ho tloha ho deposition ho isa ho etching, moo ho nepahala le ho ts'epahala ho leng bohlokoa. Ka ho kopanya theknoloji ena e tsoetseng pele, bahlahisi ba ka lebella ho ntlafatsa ts'ebetso, ho fokotsa litšenyehelo tsa tlhokomelo, le boleng bo tsitsitseng ba sehlahisoa.
| Thepa ea 'mele ea Recrystallized Silicon Carbide | |
| Thepa | Boleng bo Tlwaelehileng |
| Mocheso oa ho sebetsa (°C) | 1600°C (ka oksijene), 1700°C (ho fokotsa tikoloho) |
| Likahare tsa SiC | 99.96% |
| Free Si content | <0.1% |
| Boima ba bongata | 2.60-2.70 g/cm3 |
| porosity e bonahalang | <16% |
| Matla a ho hatella | > 600 MPa |
| Matla a ho kobeha a batang | 80-90 MPa (20°C) |
| Matla a ho kobeha a chesang | 90-100 MPa (1400°C) |
| Katoloso ea mocheso @1500°C | 4.70 10-6/°C |
| Thermal conductivity @1200°C | 23 W/m•K |
| Elastic modulus | 240 GPA |
| Ho hanyetsa mocheso oa mocheso | E ntle haholo |
