Semicera e fana ka liaparo tse khethehileng tsa tantalum carbide (TaC) bakeng sa likarolo tse fapaneng le bajari.Semicera e etellang pele ts'ebetso ea ho roala e nolofalletsa liphahlo tsa tantalum carbide (TaC) ho finyella bohloeki bo phahameng, botsitso ba mocheso o phahameng le mamello e phahameng ea lik'hemik'hale, ho ntlafatsa boleng ba sehlahisoa sa likristale tsa SIC / GAN le likarolo tsa EPI (Sesila sa TaC se koahetsoeng ke graphite), le ho lelefatsa bophelo ba likarolo tsa bohlokoa tsa reactor. Ts'ebeliso ea tantalum carbide TaC coating ke ho rarolla bothata le ho ntlafatsa boleng ba kholo ea kristale, mme Semicera e se e rarollotse theknoloji ea tantalum carbide coating (CVD), e fihletseng boemo bo holimo ba machabeng.
Ka mor'a lilemo tsa tsoelo-pele, Semicera e hapile theknoloji eaCVD TaCka matsapa a kopanetsweng a lefapha la R&D. Litšitiso li bonolo ho etsahala ts'ebetsong ea kholo ea li-wafers tsa SiC, empa ka mor'a ho li sebelisaTaC, phapang ke ea bohlokoa. Ka tlase ke papiso ea li-wafers tse nang le TaC le ntle le eona, hammoho le likarolo tsa Semicera bakeng sa kholo ea kristale e le 'ngoe.
ka le ntle le TaC
Kamora ho sebelisa TaC (ka ho le letona)
Ho feta moo, bophelo ba ts'ebeletso ea lihlahisoa tsa Semicera tsa TaC bo bolelele ebile bo hanyetsa mocheso o phahameng ho feta ba SiC coating. Ka mor'a nako e telele ea data ea tekanyo ea laboratori, TaC ea rona e ka sebetsa nako e telele ka boholo ba likhato tse 2300 tsa Celsius. Tse latelang ke tse ling tsa mehlala ea rona:
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