Isostatic PECVD Graphite Boat

Tlhaloso e Khutšoanyane:

Seketsoana sa Isostatic PECVD graphite se sebelisoa haholo lihokelong tse fapaneng tsa tlhahiso ea semiconductor, joalo ka polysilicon deposition film, oxide film deposition, nitride film deposition, joalo-joalo Ts'ebetso ea eona e ntle haholo e etsa hore e be sejari se loketseng sa semiconductor ts'ebetsong ea PECVD.

Re romelle lengolo-tsoibila

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

SEMICERA isostatic PECVD graphite boat ke sehlahisoa sa graphite se hloekileng, se nang le matla a holimo se etselitsoeng tšehetso ea liphaphatha ho ts'ebetso ea PECVD (plasma e ntlafalitsoeng ke mouoane oa lik'hemik'hale). SEMICERA e sebelisa theknoloji e hatetseng pele ea isostatic ho etsa bonnete ba hore seketsoana sa graphite se na le ho hanyetsa mocheso o phahameng haholo, ho hanyetsa kutu, botsitso ba sebopeho le ho tsamaisa mocheso o motle, e leng ntho e ka sebelisoang haholo ts'ebetsong ea tlhahiso ea semiconductor.

SEMICERA isostatic PECVD graphite sekepe se na le melemo e latelang:

▪ Bohloeki bo phahameng: Thepa ea graphite e na le bohloeki bo phahameng le litšila tse fokolang ho qoba ho silafatsoa ke bokaholimo ba liphaphatha.

▪ Boima bo phahameng: Boima bo phahameng, matla a phahameng a mochine, a ka mamella mocheso o phahameng le tikoloho e phahameng ea vacuum.

▪ Botsitso bo botle ba dimensional: Phetoho e nyenyane ea dimensional mochesong o phahameng ho netefatsa botsitso ba ts'ebetso.

▪ Thermal conductivity e ntle ka ho fetisisa: Fetisetsa mocheso ka katleho ho thibela ho futhumala ha sephaphatha.

▪ Ho hanyetsa ho bola ho matla: Ho khona ho hanela khoholeho ke likhase tse sa tšoaneng tse senyang le lero la mali.

Paramethara ea ts'ebetso	semicera	SGL R6510	Paramethara ea ts'ebetso
Boima ba bongata (g/cm3)	1.91	1.83	1.85
Matla a ho kokota (MPa)	63	60	49
Matla a hatellang (MPa)	135	130	103
Bothata ba Lebōpo (HS)	70	64	60
Coefficient ea katoloso ea mocheso (10-6/K)	85	105	130
Coefficient ea katoloso ea mocheso (10-6/K)	5.85	4.2	5.0
Ho hanyetsa (μΩm)	11-13	13	10

Melemo ea ho khetha rona:
▪ Khetho ea thepa: Lisebelisoa tsa graphite tse hloekileng haholo li sebelisoa ho netefatsa boleng ba sehlahisoa.
▪ Theknoloji ea ho sebetsa: Ho hatisa Isostatic ho sebelisoa ho netefatsa hore sehlahisoa se tenyetseha le ho tšoana.
▪ Ho iketsetsa boholo: Likepe tsa graphite tsa boholo le libopeho tse sa tšoaneng li ka etsoa ho latela litlhoko tsa bareki.
▪ Phekolo ea holim'a metsi: Ho fanoa ka mekhoa e fapaneng ea phekolo ea holim'a metsi, e kang ho roala silicon carbide, boron nitride, joalo-joalo, ho finyella litlhoko tse fapaneng tsa ts'ebetso.