Lefapheng la kajeno la theknoloji ea elektroniki, lisebelisoa tsa semiconductor li bapala karolo ea bohlokoa.Har'a bona,silicon carbide (SiC)joalo ka semiconductor ea semiconductor ea sehlopha se pharaletseng, e nang le melemo e metle ea ts'ebetso, joalo ka lebala la motlakase le senyehang haholo, lebelo le phahameng la ho phalla ha metsi, mocheso o phahameng oa mocheso, joalo-joalo, butle-butle e fetoha sepheo sa bafuputsi le baenjiniere.Thesilicon carbide epitaxial disk, e le karolo ea bohlokoa ea eona, e bontšitse bokhoni bo boholo ba tšebeliso.
一 、 ts'ebetso ea disk ea epitaxial: melemo e felletseng
1. Tšimo ea motlakase e senyehang haholo: ha e bapisoa le thepa ea silicon e tloaelehileng, tšimo ea motlakase e senyehang.silicon carbideke makhetlo a fetang 10.Sena se bolela hore tlas'a maemo a tšoanang a motlakase, lisebelisoa tsa elektroniki li sebelisasilicon carbide epitaxial diskse khona ho mamella maqhubu a phahameng, ka hona e theha lisebelisoa tsa elektronike tse nang le matla a phahameng, maqhubu a phahameng, a matla a phahameng.
2. Lebelo la ho tlala ka lebelo le phahameng: lebelo la ho tlalasilicon carbideke makhetlo a fetang 2 a silicon.Ho sebetsa ka mocheso o phahameng le lebelo le phahameng, thesilicon carbide epitaxial diske sebetsa hantle, e ntlafatsang haholo botsitso le ho tšepahala ha lisebelisoa tsa elektronike.
3. Ts'ebetso e phahameng ea mocheso oa mocheso: mocheso oa mocheso oa silicon carbide o feta makhetlo a 3 a silicon.Tšobotsi ena e lumella lisebelisoa tsa elektronike hore li ntlafatse mocheso hantle nakong ea ts'ebetso e tsoelang pele ea matla a phahameng, kahoo li thibela ho futhumala le ho ntlafatsa tšireletso ea lisebelisoa.
4. Botsitso bo botle ba lik'hemik'hale: libakeng tse feteletseng tse kang mocheso o phahameng, khatello e phahameng le mahlaseli a matla, ts'ebetso ea silicon carbide e ntse e tsitsitse joaloka pele.Tšobotsi ena e thusa silicon carbide epitaxial disk ho boloka ts'ebetso e ntle haholo ha e tobane le maemo a thata.
二、Ts'ebetso ea tlhahiso: e betliloeng ka hloko
Mekhoa e ka sehloohong ea ho etsa SIC epitaxial disk e kenyelletsa 'mele oa mouoane deposition (PVD), lik'hemik'hale tsa mouoane oa lik'hemik'hale (CVD) le kgolo ea epitaxial.E 'ngoe le e' ngoe ea lits'ebetso tsena e na le litšobotsi tsa eona mme e hloka taolo e nepahetseng ea li-parameter tse fapaneng ho fihlela litholoana tse ntle.
1. Ts'ebetso ea PVD: Ka ho fetoha mouoane kapa ho fafatsa le mekhoa e meng, sepheo sa SiC se kenngoa holim'a substrate ho etsa filimi.Filimi e lokiselitsoeng ke mokhoa ona e na le bohloeki bo phahameng le bokhabane bo botle, empa lebelo la tlhahiso le batla le lieha.
2. Ts'ebetso ea CVD: Ka ho senya khase ea silicon carbide mohloling oa mocheso o phahameng, e kenngoa holim'a substrate ho etsa filimi e tšesaane.Botenya le ho ts'oana ha filimi e lokiselitsoeng ke mokhoa ona li ka laoleha, empa bohloeki le crystallinity li futsanehile.
3. Khōlo ea Epitaxial: kholo ea SiC epitaxial layer holim'a silicon ea monocrystalline kapa lisebelisoa tse ling tsa monocrystalline ka mokhoa oa ho beha mouoane oa lik'hemik'hale.Epitaxial layer e lokiselitsoeng ke mokhoa ona e na le ts'ebetso e ntle le ts'ebetso e ntle haholo le thepa ea substrate, empa litšenyehelo li batla li le holimo.
三、Tebello ea kopo: Khantša bokamoso
Ka nts'etsopele e tsoelang pele ea theknoloji ea elektronike ea matla le tlhokahalo e ntseng e eketseha ea ts'ebetso e phahameng le lisebelisoa tsa elektronike tse tšepahalang haholo, silicon carbide epitaxial disk e na le tebello e pharaletseng ea ts'ebeliso ea tlhahiso ea lisebelisoa tsa semiconductor.E sebelisoa haholo ha ho etsoa lisebelisoa tsa semiconductor tse matla haholo, tse kang li-switches tsa elektronike, li-inverters, li-rectifier, joalo-joalo. Ho phaella moo, e boetse e sebelisoa haholo liseleng tsa letsatsi, LED le masimo a mang.
Ka melemo ea eona e ikhethang ea ts'ebetso le ntlafatso e tsoelang pele ea ts'ebetso ea tlhahiso, silicon carbide epitaxial disk butle-butle e bontša bokhoni ba eona bo boholo tšimong ea semiconductor.Re na le lebaka la ho lumela hore nakong e tlang ea saense le theknoloji, e tla phetha karolo ea bohlokoa haholoanyane.
Nako ea poso: Nov-28-2023