Tlhaloso
MOCVD Substrate Heater, Lisebelisoa tsa ho futhumatsa bakeng sa MOCVD
Mofuthu oa graphite:
Likarolo tsa heater ea graphite li sebelisoa seboping sa mocheso o phahameng se nang le mocheso o fihlang likhatong tse 2200 sebakeng sa vacuum le likhato tse 3000 tikolohong ea khase e nang le deoxidized le e kentsoeng.
Lintlha tse ka sehloohong tsa heater ea graphite
1. ho tšoana ha mohaho oa ho futhumatsa.
2. conductivity e ntle ea motlakase le mojaro o phahameng oa motlakase.
3. ho hanyetsa kutu.
4. inoxidizability.
5. bohloeki bo phahameng ba lik'hemik'hale.
6. matla a phahameng a mechine.
Molemo ke matla a matla, boleng bo phahameng le tlhokomelo e tlaase.
Re ka hlahisa anti-oxidation le nako e telele ea bophelo ba graphite crucible, hlobo ea graphite le likarolo tsohle tsa heater ea graphite.
Lik'hemik'hale Graphite
Molemo: Ho hanyetsa mocheso o phahameng
Kopo:MOCVD/Vacuum sebōpi/Hot Zone
Boima ba Bongata: 1.68-1.91g/cm3
Matla a Flexural: 30-46Mpa
Ho hanyetsa: 7-12μΩm
Lintlha tse ka sehloohong tsa heater ea graphite
| Tlhaloso ea Setsebi | VET-M3 |
| Boima ba Bongata (g/cm3) | ≥1.85 |
| Litaba tsa Molora (PPM) | ≤500 |
| Bothata ba Lebopo | ≥45 |
| Khanyetso e Khethehileng (μ.Ω.m) | ≤12 |
| Flexural Strength (Mpa) | ≥40 |
| Compressive Strength (Mpa) | ≥70 |
| Max. Boholo ba Mabele (μm) | ≤43 |
| Coefficient of Thermal Katoloso Mm/°C | ≤4.4 * 10-6 |
Mofuthu oa graphite bakeng sa sebōpi sa motlakase o na le thepa ea ho hanyetsa mocheso, ho hanyetsa oxidation, conductivity e ntle ea motlakase le matla a molemo a mochine. Re ka sebelisa mefuta e fapaneng ea heater ea graphite ho latela meralo ea bareki.
Boemo ba Khoebo
WeiTai Energy Technology Co., Ltd. ke mofani oa thepa ea ka sehloohong oa li-ceramics tse tsoetseng pele tsa semiconductor le moetsi feela Chaena ea ka fanang ka lisebelisoa tse phahameng tsa silicon carbide ceramic (haholo-holo Recrystallized SiC) le CVD SiC coating. Ho feta moo, k'hamphani ea rona e boetse e ikemiselitse ho etsa masimo a ceramic a kang alumina, aluminium nitride, zirconia, le silicon nitride, joalo-joalo.
Lihlahisoa tsa rona tsa mantlha li kenyelletsa: silicon carbide etching disc, silicon carbide boat tow, silicon carbide wafer boat (Photovoltaic&Semiconductor), silicon carbide furnace tube, silicon carbide cantilever paddle, silicon carbide chucks, silicon carbide beam, hammoho le CVD SiC coating le TaC. ho roala. Lihlahisoa tse sebelisoang haholo indastering ea semiconductor le photovoltaic, joalo ka lisebelisoa tsa kholo ea kristale, epitaxy, etching, ho paka, ho roala le libono tsa phallo, jj.
Khampani ea rona e na le lisebelisoa tse feletseng tsa tlhahiso tse kang ho bōpa, ho etsa sintering, ho sebetsa, lisebelisoa tsa ho roala, joalo-joalo, tse ka tlatsang lihokelo tsohle tse hlokahalang tsa tlhahiso ea lihlahisoa le ho ba le taolo e phahameng ea boleng ba sehlahisoa; Morero o nepahetseng oa tlhahiso o ka khethoa ho ea ka litlhoko tsa sehlahisoa, ho fella ka theko e tlaase le ho fa bareki lihlahisoa tse ngata tsa tlhōlisano; Re ka khona ho hlophisa tlhahiso ka mokhoa o bonolo le ka katleho ho latela litlhoko tsa ho fana ka taelo le ka kopanelo le litsamaiso tsa taolo ea odara ea inthaneteng, ho fa bareki nako e potlakileng le e netefalitsoeng ea ho fana.
