Semiconductor SiC e koahetsoeng ka monocrystalline silicon epitaxial disk

Semiconductor SiC e koahetsoeng ka monocrystalline silicon epitaxial disk ho tloha semicera, tharollo e tsoetseng pele e etselitsoeng mekhoa e tsoetseng pele ea ho hōla ha epitaxial. Semicera e sebetsa ka thata ho hlahisa li-disk tse sebetsang hantle tse fanang ka ts'ebetso e ntle ea mocheso le nako e telele, tse loketseng lits'ebetso hoKe EpitaxyleSiC Epitaxy. Epitaxial disk ena, e koahetsoeng ka silicon carbide (SiC), e ntlafatsa katleho le ho nepahala ha mekhoa ea tlhahiso ea semiconductor.

Tsa ronaMotlatsi oa MOCVDEpitaxial disk e lumellanang e netefatsa ts'ebetso e ts'oanang ho li-setups tse fapaneng, ho kenyelletsa le lits'ebetso tse hlokang PSS Etching Carrier,ICP EtchingCarrier, le RTP Carrier. Disk ena e entsoe ho finyella litlhoko tse phahameng tsa tlhahiso ea Monocrystalline Silicon, e etsang hore e tšoanelehe bakeng sa lisebelisoa tsa LED Epitaxial Susceptor le mekhoa e meng ea ho hōla ha semiconductor. Meetso ea Barrel Susceptor le Pancake Susceptor e fana ka mefuta e mengata bakeng sa bahlahisi, ha ts'ebeliso ea Likarolo tsa Photovoltaic e fetisetsa ts'ebeliso ea eona ho indasteri ea letsatsi.

Ka kaho ea eona e matla, bokhoni ba GaN ho SiC Epitaxy ba disk ena bo ntlafatsa boleng ba eona bakeng sa litsamaiso tse tsoetseng pele tsa epitaxial. Tharollo ena e etselitsoe ho fana ka liphetho tse tšepahalang, tsa boleng bo holimo, e leng se etsang hore e be karolo ea bohlokoa bakeng sa tlhahiso ea semiconductor ea sejoale-joale le photovoltaic.