Si Substrate ka Semicera ke karolo ea bohlokoa tlhahisong ea lisebelisoa tsa semiconductor tse sebetsang hantle haholo. E entsoe ho tsoa ho Silicon ea boleng bo holimo (Si), substrate ena e fana ka ho tšoana ho ikhethang, botsitso le ts'ebetso e ntle haholo, e etsa hore e be e loketseng mefuta e mengata ea lits'ebetso tse tsoetseng pele indastering ea semiconductor. Ebang e sebelisoa ho Si Wafer, SiC Substrate, SOI Wafer, kapa SiN Substrate tlhahiso, Semicera Si Substrate e fana ka boleng bo tsitsitseng le ts'ebetso e phahameng ho fihlela litlhoko tse ntseng li hola tsa mahlale a sejoale-joale a elektroniki le thepa.
Ts'ebetso e sa Bapisitsoeng ka Bohloeki bo Phahameng le Bonepa
Semicera's Si Substrate e etsoa ka mekhoa e tsoetseng pele e netefatsang bohloeki bo phahameng le taolo e tiileng ea likarolo. Substrate e sebetsa e le motheo oa tlhahiso ea lisebelisoa tse fapaneng tse sebetsang hantle, ho kenyeletsoa Epi-Wafers le AlN Wafers. Ho nepahala le ho ts'oana ha Si Substrate ho etsa hore e be khetho e ntle haholo bakeng sa ho theha likarolo tse tšesaane tsa epitaxial le likarolo tse ling tsa bohlokoa tse sebelisoang tlhahisong ea li-semiconductors tsa moloko o latelang. Hore na o sebetsa le Gallium Oxide (Ga2O3) kapa lisebelisoa tse ling tse tsoetseng pele, Semicera's Si Substrate e netefatsa maemo a holimo a ts'epahalo le ts'ebetso.
Likopo ho Semiconductor Manufacturing
Indastering ea semiconductor, Si Substrate e tsoang Semicera e sebelisoa ka mefuta e mengata ea likopo, ho kenyeletsoa tlhahiso ea Si Wafer le SiC Substrate, moo e fanang ka motheo o tsitsitseng, o ka tšeptjoang bakeng sa ho beha likarolo tse sebetsang. Substrate e bapala karolo ea bohlokoa ho theheng SOI Wafers (Silicon On Insulator), e bohlokoa bakeng sa li-microelectronics tse tsoetseng pele le li-circuits tse kopantsoeng. Ho feta moo, li-Epi-Wafers (epitaxial wafers) tse hahiloeng holim'a Si Substrates li bohlokoa ho hlahiseng lisebelisoa tsa semiconductor tse sebetsang hantle joalo ka li-transistors tsa motlakase, diode le li-circuits tse kopaneng.
Si Substrate e boetse e ts'ehetsa tlhahiso ea lisebelisoa tse sebelisang Gallium Oxide (Ga2O3), e leng thepa e tšepisang e nang le li-bandgap tse kholo tse sebelisoang bakeng sa ts'ebeliso ea matla a phahameng ho lisebelisoa tsa motlakase tsa motlakase. Ntle le moo, ho tsamaellana ha Semicera's Si Substrate le AlN Wafers le li-substrates tse ling tse tsoetseng pele ho netefatsa hore e ka fihlela litlhoko tse fapaneng tsa indasteri ea theknoloji e phahameng, e etsa hore e be tharollo e nepahetseng bakeng sa tlhahiso ea lisebelisoa tsa morao-rao litabeng tsa mehala, likoloi le indasteri. .
Boleng bo ka tšeptjoang le bo tsitsitseng bakeng sa Likopo tsa High-Tech
Si Substrate e entsoeng ke Semicera e entsoe ka hloko ho fihlela litlhoko tse matla tsa masela a semiconductor. Botšepehi ba eona bo ikhethang ba sebopeho le boleng ba boleng bo holimo bo etsa hore e be thepa e loketseng ho sebelisoa lits'ebetsong tsa lik'hasete bakeng sa lipalangoang tsa li-wafer, hammoho le ho theha likarolo tse nepahetseng haholo lisebelisoa tsa semiconductor. Bokhoni ba substrate ba ho boloka boleng bo tsitsitseng tlas'a maemo a fapaneng a ts'ebetso bo tiisa bofokoli bo fokolang, ho ntlafatsa chai le ts'ebetso ea sehlahisoa sa ho qetela.
Ka conductivity ea eona e phahameng ea mocheso, matla a mochini, le bohloeki bo phahameng, Semicera's Si Substrate ke thepa ea khetho bakeng sa bahlahisi ba batlang ho finyella litekanyetso tse phahameng ka ho fetisisa tsa ho nepahala, ho tšepahala le ts'ebetso tlhahisong ea semiconductor.
Khetha Semicera's Si Substrate bakeng sa Litharollo tse Phahameng ka ho Fetisisa, tse sebetsang hantle
Bakeng sa baetsi ba indasteri ea semiconductor, Si Substrate e tsoang Semicera e fana ka tharollo e matla, ea boleng bo holimo bakeng sa mefuta e mengata ea likopo, ho tloha tlhahiso ea Si Wafer ho isa ho thehoeng ha Epi-Wafers le SOI Wafers. Ka bohloeki bo ke keng ba lekanngoa, ho nepahala le ho tšepahala, substrate ena e nolofalletsa tlhahiso ea lisebelisoa tsa semiconductor tse se nang moeli, ho netefatsa ts'ebetso ea nako e telele le ts'ebetso e nepahetseng. Khetha Semicera bakeng sa litlhoko tsa hau tsa Si, 'me u tšepe sehlahisoa se etselitsoeng ho fihlela litlhoko tsa mahlale a hosane.
Lintho | Tlhahiso | Patlisiso | Dummy |
Crystal Parameters | |||
Polytype | 4H | ||
Phoso ea ho shebana le bokaholimo | <11-20>4±0.15° | ||
Litekanyetso tsa Motlakase | |||
Dopant | n-mofuta oa Nitrojene | ||
Ho hanyetsa | 0.015-0.025ohm · cm | ||
Mechanical Parameters | |||
Diameter | 150.0±0.2mm | ||
Botenya | 350±25 μm | ||
Boemo ba mantlha bo bataletseng | [1-100]±5° | ||
Bolelele ba pele bo bataletseng | 47.5±1.5mm | ||
Folete ea bobeli | Ha ho letho | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Inamela | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Sebopeho | |||
Boima ba micropipe | <1 e/cm2 | <10 e/cm2 | <15 e/cm2 |
Litšila tsa tšepe | ≤5E10atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
Boleng ba Pele | |||
Pele | Si | ||
Qetello ea bokaholimo | Si-face CMP | ||
Likaroloana | ≤60ea/wafer (boholo ≥0.3μm) | NA | |
Mengwapo | ≤5ea/mm. Bolelele ba kakaretso ≤Diameter | Bolelele bo akaretsang≤2*Diameter | NA |
Lekhapetla la lamunu/makoti/matheba/maphatso/mapetso/tshilafatso | Ha ho letho | NA | |
Li-edge chips/indents/fracture/hex plates | Ha ho letho | ||
Libaka tsa polytype | Ha ho letho | Kakaretso≤20% | Kakaretso≤30% |
Ho tšoaea ka laser ka pele | Ha ho letho | ||
Boleng ba Morao | |||
Qetello ea morao | C-sefahleho sa CMP | ||
Mengwapo | ≤5ea/mm, bolelele bo akaretsang≤2* bophara | NA | |
Litšitiso tse ka morao (li-chips / indents) | Ha ho letho | ||
Bokhopo ba mokokotlo | Ra≤0.2nm (5μm*5μm) | ||
Ho tšoaea ka morao laser | 1 mm (ho tloha pheletsong e ka holimo) | ||
Qetello | |||
Qetello | Chamfer | ||
Sephutheloana | |||
Sephutheloana | Epi e loketse ho paka ka vacuum Sephutheloana sa lik'hasete tse nang le liphaephe tse ngata | ||
*Lintlha: "NA" e bolela hore ha ho na kopo Lintho tse sa boleloang li ka lebisa ho SEMI-STD. |