SiC Coated Graphite Base Susceptors bakeng sa MOCVD

SiC Coated Graphite Base Susceptorsbakeng sa MOCVD ho tloha semicera li entsoe ho fana ka ts'ebetso e ikhethang lits'ebetsong tsa kholo ea epitaxial. Seaparo sa boleng bo phahameng ba silicon carbide setsing sa graphite se tiisa botsitso, ho tšoarella, le mokhoa o nepahetseng oa ho tsamaisa mocheso nakong ea ts'ebetso ea MOCVD (Metal Organic Chemical Vapor Deposition). Ka ho sebelisa theknoloji e ncha ea susceptor ea semicera, o ka fihlela ts'ebetso e ntlafalitsoeng le ho sebetsa hantle hoKe EpitaxyleSiC Epitaxylits'ebetso.

TsenaBahanyetsi ba MOCVDli etselitsoe ho tšehetsa letoto la likarolo tsa bohlokoa tsa semiconductor, joalo kaPSS Etching Carrier, ICP Etching Carrier, leSesebelisoa sa RTP, e etsa hore li khonehe bakeng sa mesebetsi e fapa-fapaneng ea etching le epitaxial. Boitlamo ba Semicera ho litekanyetso tse phahameng bo netefatsa hore li-susceptors tsena li fihlela litlhoko tse matla tsa tlhahiso ea semiconductor ea sejoale-joale.

E loketse ho sebelisoa hoLED EpitaxialLits'ebetso tsa Susceptor, Barrel Susceptor, le Monocrystalline Silicon, li-susceptors tsena li ka etsoa bakeng sa boholo bo fapaneng ba wafer, ho kenyeletsoa meralo ea Pancake Susceptor. Li boetse li sebetsa hantle haholo ho sebetsanang le Likarolo tsa Photovoltaic, e leng se etsang hore e be karolo ea bohlokoa ho nts'etsopele ea lisele tse sebetsang hantle tsa letsatsi.

Ho feta moo, SiC Coated Graphite Base Susceptors bakeng sa MOCVD e ntlafalitsoe bakeng sa GaN ho SiC Epitaxy, e fana ka tšebelisano e phahameng le lisebelisoa tse tsoetseng pele tsa semiconductor. Hore na o tsepamisitse maikutlo ho ntlafatseng chai kapa ho ntlafatsa boleng ba kholo ea epitaxial, li-susceptors tsa semicera li fana ka ts'epo le ts'ebetso e hlokahalang bakeng sa katleho indastering ea theknoloji e phahameng.