SiC Coated Susceptor bakeng sa Deep UV-LED

Tlhaloso e Khutšoanyane:

Semicera Energy Technology Co., Ltd. ke morekisi ea ka sehloohong oa lirafshoa tse tsoetseng pele tsa semiconductor. Lihlahisoa tsa rona tsa mantlha li kenyelletsa: li-discs tsa silicon carbide etched discs, silicon carbide boat trailers, silicon carbide wafer ships (PV & Semiconductor), silicon carbide furnace tubes, silicon carbide cantilever paddles, silicon carbide chuck, silicon carbide beams, hammoho le CVD Coconduating. Liaparo tsa TaC.

Lihlahisoa li sebelisoa haholo indastering ea semiconductor le photovoltaic, joalo ka kholo ea kristale, epitaxy, etching, package, ho roala le lisebelisoa tsa sebōpi sa diffusion.

Re romelle lengolo-tsoibila

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Tlhaloso

Khamphani ea rona e fana ka lits'ebeletso tsa ts'ebetso ea ho roala SiC ka mokhoa oa CVD holim'a graphite, li-ceramics le lisebelisoa tse ling, e le hore likhase tse khethehileng tse nang le carbon le silicon li sebetsane le mocheso o phahameng ho fumana limolek'hule tsa SiC tse hloekileng, limolek'hule tse behiloeng holim'a thepa e koahetsoeng, ho etsa lera la tšireletso la SIC.

UV-LED-1

UV-LED-2

Likarolo tse ka Sehloohong

1. Ho hanyetsa mocheso o phahameng oa oxidation: khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho 1600 C.
2. Bohloeki bo phahameng : bo entsoeng ka ho kenngoa ha mouoane oa lik'hemik'hale tlas'a boemo bo phahameng ba mocheso oa chlorination.
3. Ho hanyetsa khoholeho ea mobu: boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.
4. Ho hanyetsa kutu: acid, alkali, letsoai le li-reagents tse phelang.

Lintlha tse ka sehloohong tsa CVD-SIC Coating

SiC-CVD Properties
Sebopeho sa Crystal	FCC mohato oa β
Botenya	g/cm³	3.21
Ho thatafala	Vickers thata	2500
Boholo ba lijo-thollo	μm	2~10
Bohloeki ba Lik'hemik'hale	%	99.99995
Matla a Mocheso	J·kg-1 ·K-1	640
Sublimation Mocheso	℃	2700
Felexural Matla	MPa (RT 4-point)	415
Modulus e monyane	Gpa (4pt bend, 1300 ℃)	430
Katoloso ea Thermal (CTE)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300