SiC Coating Graphite Wafer Susceptor

Tlhaloso e Khutšoanyane:

Semicera Semiconductor's SiC Coating Graphite Wafer Susceptor e fana ka ts'ebetso e phahameng ea mocheso le nako e telele bakeng sa ts'ebetso ea wafer. Itšetlehe ho Semicera bakeng sa li-susceptors tse tsoetseng pele tsa SiC tse etselitsoeng ho ntlafatsa ts'ebetso le ts'epahalo lits'ebetsong tsa semiconductor.

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Tlhaloso

Li-Susceptors tsa SiC Wafer tsa Semicera bakeng sa MOCVD (Metal-Organic Chemical Vapor Deposition) li entsoe ho fihlela litlhoko tse nepahetseng tsa ts'ebetso ea epitaxial deposition. Ho sebelisa Silicon Carbide (SiC) ea boleng bo holimo, li-susceptors tsena li fana ka nako e telele le ts'ebetso e ke keng ea lekanngoa maemong a mocheso o phahameng le a senyang, ho netefatsa kholo e nepahetseng le e sebetsang ea thepa ea semiconductor.

Likarolo tsa Bohlokoa:

1. Lintho tse Phahameng ka ho FetisisaE hahiloe ho tloha ho SiC ea boemo bo holimo, li-wafer susceptivity tsa rona li bonts'a conductivity e ikhethang ea mocheso le khanyetso ea lik'hemik'hale. Thepa ena e ba nolofalletsa ho mamella maemo a feteletseng a mekhoa ea MOCVD, ho kenyelletsa mocheso o phahameng le likhase tse senyang, ho netefatsa bophelo bo bolelele le ts'ebetso e tšepahalang.

2. Ho nepahala ho Epitaxial DepositionBoenjineri bo nepahetseng ba SiC Wafer Susceptors ba rona bo netefatsa kabo e ts'oanang ea mocheso holim'a bokaholimo, bo thusa kholo e tsitsitseng le ea boleng bo holimo ea epitaxial layer. Ho nepahala hona ho bohlokoa bakeng sa ho hlahisa li-semiconductors tse nang le thepa e nepahetseng ea motlakase.

3. Matlafatso ea nako e teleleThepa e matla ea SiC e fana ka khanyetso e ntle ea ho roala le ho senyeha, leha e le tlas'a ts'oaetso e tsoelang pele ea maemo a thata a ts'ebetso. Ho tšoarella hona ho fokotsa makhetlo a mangata a li-susceptor replacement, ho fokotsa nako le litšenyehelo tsa ts'ebetso.