Lesale le tiileng la SiC Focus

Tlhaloso e Khutšoanyane:

Li-ring tsa SiC Etch tsa Semicera li etselitsoe lits'ebetso tse sebetsang hantle tsa semiconductor tse tšoarellang nako e telele le ho nepahala. E entsoe ka high-purity silicon carbide (SiC), selikalikoe sena sa etch se ipabola ho etching ea plasma, etching e omeletseng, le lits'ebetso tsa ho qoelisa. Ts'ebetso e tsoetseng pele ea tlhahiso ea Semicera e tiisa hore selikalikoe sena se fana ka khanyetso e ntle ea ho apara le botsitso ba mocheso esita le libakeng tse hlokang ka ho fetisisa. Re labalabela ho ba molekane oa hau oa nako e telele Chaena.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Solid SiC Focus Ring e tsoang ho Semicera ke karolo e tsoetseng pele e etselitsoeng ho fihlela litlhoko tsa tlhahiso e tsoetseng pele ea semiconductor. E entsoe ka bohloeki bo phahamengSilicon Carbide (SiC), selikalikoe sena sa ho tsepamisa maikutlo se loketse bakeng sa mefuta e mengata ea likopo ho indasteri ea semiconductor, haholo-holo kaMekhoa ea CVD SiC, etching ea plasma, leICPRIE (Inductively Coupled Plasma Reactive Ion Etching). E tsejoa ka mokhoa o ikhethang oa ho hanyetsa ho apara, botsitso bo phahameng ba mocheso, le bohloeki, e tiisa ts'ebetso ea nako e telele libakeng tse phahameng tsa khatello ea kelello.

Ka semiconductorsephaphathaho sebetsa, Li-ring tsa Solid SiC Focus li bohlokoa ho boloka etching e nepahetseng nakong ea li-etching tse omeletseng le li-wafer etching applications. Lesale la ho tsepamisa maikutlo la SiC le thusa ho tsepamisa plasma nakong ea lits'ebetso tse joalo ka ts'ebetso ea mochini oa plasma etching, e etsa hore e be ea bohlokoa haholo bakeng sa ho ts'oaroa ha li-wafers tsa silicon. Thepa e tiileng ea SiC e fana ka khanyetso e ke keng ea bapisoa le khoholeho ea mobu, ho netefatsa nako e telele ea lisebelisoa tsa hau le ho fokotsa nako ea ho theoha, e leng ea bohlokoa bakeng sa ho boloka phallo e phahameng ea tlhahiso ea semiconductor.

Solid SiC Focus Ring e tsoang Semicera e etselitsoe ho mamella mocheso o feteletseng le lik'hemik'hale tse mabifi tse atisang ho kopana le indasteri ea semiconductor. E etselitsoe ka ho khetheha bakeng sa ho sebelisoa mesebetsing e nepahetseng e phahameng joalo kaLiaparo tsa CVD SiC, moo bohloeki le ho tšoarella e leng tsona tse ka sehloohong. Ka khanyetso e babatsehang ea mocheso oa mocheso, sehlahisoa sena se tiisa ts'ebetso e tsitsitseng le e tsitsitseng tlas'a maemo a thata ka ho fetisisa, ho kenyelletsa le ho pepesehela mocheso o phahameng nakong easephaphathamekhoa ea ho etching.

about-focus-ring-81956

Lits'ebetsong tsa semiconductor, moo ho nepahala le ho ts'epahala e leng ntho ea bohlokoa, Solid SiC Focus Ring e bapala karolo ea bohlokoa ho ntlafatseng ts'ebetso e akaretsang ea lits'ebetso tsa etching. Sebopeho sa eona se matla, se sebetsang hantle se etsa hore e be khetho e phethahetseng bakeng sa liindasteri tse hlokang likarolo tse phahameng tsa bohloeki tse sebetsang tlas'a maemo a feteletseng. Hore na e sebelisoa hoLesale la CVD SiCLisebelisoa kapa e le karolo ea ts'ebetso ea ho kopanya plasma, Semicera's Solid SiC Focus Ring e thusa ho ntlafatsa ts'ebetso ea sesebelisoa sa hau, e fana ka bophelo bo bolelele le ts'epahalo tlhoko ea lits'ebetso tsa hau tsa tlhahiso.

Likarolo tsa Bohlokoa:

• Ho hanyetsa ho apara ka holimo le botsitso bo phahameng ba mocheso
• Lisebelisoa tsa SiC tse tiileng tse phahameng-hloeka bakeng sa nako e telele ea bophelo
• E nepahetse bakeng sa etching ea plasma, ICP RIE, le lisebelisoa tse omeletseng tsa etching
• E phethehile bakeng sa etching ea wafer, haholo-holo lits'ebetsong tsa CVD SiC
• Ts'ebetso e ka tšeptjoang libakeng tse feteletseng le mocheso o phahameng
• E etsa bonnete ba ho nepahala le ho sebetsa hantle ha ho etching ea li-wafers tsa silicon

Lisebelisoa:

• Mekhoa ea CVD SiC tlhahisong ea semiconductor
• Plasma etching le mekhoa ea ICP RIE
• Omisa etching le sephaphatha etching mekhoa e
• Etching le ho beha ka har'a mochini oa etching oa plasma
• Likarolo tse nepahetseng bakeng sa mehele ea wafer le mehele ea CVD SiC

Setšoantšo sa 109

Microscopic morphology ea CVD SiC holim'a metsi

Setšoantšo sa 110

Microscopic morphology ea CVD SiC cross-section

Setšoantšo sa 108
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