Solid SiC Focus Ring e tsoang ho Semicera ke karolo e tsoetseng pele e etselitsoeng ho fihlela litlhoko tsa tlhahiso e tsoetseng pele ea semiconductor. E entsoe ka bohloeki bo phahamengSilicon Carbide (SiC), selikalikoe sena sa ho tsepamisa maikutlo se loketse bakeng sa mefuta e mengata ea likopo ho indasteri ea semiconductor, haholo-holo kaMekhoa ea CVD SiC, etching ea plasma, leICPRIE (Inductively Coupled Plasma Reactive Ion Etching). E tsejoa ka mokhoa o ikhethang oa ho hanyetsa ho apara, botsitso bo phahameng ba mocheso, le bohloeki, e tiisa ts'ebetso ea nako e telele libakeng tse phahameng tsa khatello ea kelello.
Ka semiconductorsephaphathaho sebetsa, Li-ring tsa Solid SiC Focus li bohlokoa ho boloka etching e nepahetseng nakong ea li-etching tse omeletseng le li-wafer etching applications. Lesale la ho tsepamisa maikutlo la SiC le thusa ho tsepamisa plasma nakong ea lits'ebetso tse joalo ka ts'ebetso ea mochini oa plasma etching, e etsa hore e be ea bohlokoa haholo bakeng sa ho ts'oaroa ha li-wafers tsa silicon. Thepa e tiileng ea SiC e fana ka khanyetso e ke keng ea bapisoa le khoholeho ea mobu, ho netefatsa nako e telele ea lisebelisoa tsa hau le ho fokotsa nako ea ho theoha, e leng ea bohlokoa bakeng sa ho boloka phallo e phahameng ea tlhahiso ea semiconductor.
Solid SiC Focus Ring e tsoang Semicera e etselitsoe ho mamella mocheso o feteletseng le lik'hemik'hale tse mabifi tse atisang ho kopana le indasteri ea semiconductor. E etselitsoe ka ho khetheha bakeng sa ho sebelisoa mesebetsing e nepahetseng e phahameng joalo kaLiaparo tsa CVD SiC, moo bohloeki le ho tšoarella e leng tsona tse ka sehloohong. Ka khanyetso e babatsehang ea mocheso oa mocheso, sehlahisoa sena se tiisa ts'ebetso e tsitsitseng le e tsitsitseng tlas'a maemo a thata ka ho fetisisa, ho kenyelletsa le ho pepesehela mocheso o phahameng nakong easephaphathamekhoa ea ho etching.
Lits'ebetsong tsa semiconductor, moo ho nepahala le ho ts'epahala e leng ntho ea bohlokoa, Solid SiC Focus Ring e bapala karolo ea bohlokoa ho ntlafatseng ts'ebetso e akaretsang ea lits'ebetso tsa etching. Sebopeho sa eona se matla, se sebetsang hantle se etsa hore e be khetho e phethahetseng bakeng sa liindasteri tse hlokang likarolo tse phahameng tsa bohloeki tse sebetsang tlas'a maemo a feteletseng. Hore na e sebelisoa hoLesale la CVD SiCLisebelisoa kapa e le karolo ea ts'ebetso ea ho kopanya plasma, Semicera's Solid SiC Focus Ring e thusa ho ntlafatsa ts'ebetso ea sesebelisoa sa hau, e fana ka bophelo bo bolelele le ts'epahalo tlhoko ea lits'ebetso tsa hau tsa tlhahiso.
Likarolo tsa Bohlokoa:
• Ho hanyetsa ho apara ka holimo le botsitso bo phahameng ba mocheso
• Lisebelisoa tsa SiC tse tiileng tse phahameng-hloeka bakeng sa nako e telele ea bophelo
• E nepahetse bakeng sa etching ea plasma, ICP RIE, le lisebelisoa tse omeletseng tsa etching
• E phethehile bakeng sa etching ea wafer, haholo-holo lits'ebetsong tsa CVD SiC
• Ts'ebetso e ka tšeptjoang libakeng tse feteletseng le mocheso o phahameng
• E etsa bonnete ba ho nepahala le ho sebetsa hantle ha ho etching ea liphaephe tsa silicon
Lisebelisoa:
• Mekhoa ea CVD SiC tlhahisong ea semiconductor
• Plasma etching le mekhoa ea ICP RIE
• Omisa etching le sephaphatha etching mekhoa e
• Etching le ho beha ka har'a mochini oa etching oa plasma
• Likarolo tse nepahetseng bakeng sa mehele ea wafer le mehele ea CVD SiC
Microscopic morphology ea CVD SiC holim'a metsi
Microscopic morphology ea CVD SiC cross-section
