Tlhaloso
Li-Semicorex Wafer Carriers tse nang le SiC Coating li fana ka botsitso bo ikhethang ba mocheso le conductivity, ho netefatsa phepelo ea mocheso o ts'oanang nakong ea ts'ebetso ea CVD, e bohlokoa bakeng sa boleng bo holimo ba filimi e mosesaane le litšobotsi tsa ho roala.
Likarolo tsa Bohlokoa:
1. Boemo bo ikhethang ba Thermal Stability le ConductivityLijana tsa rona tse kentsoeng ka SiC-coated wafer li ipabola ho bolokeng mocheso o tsitsitseng le o tsitsitseng, oa bohlokoa bakeng sa lits'ebetso tsa CVD. Sena se tiisa kabo ea mocheso o ts'oanang, e lebisang ho filimi e tšesaane e phahameng le boleng ba ho roala.
2. Precision ManufacturingSepalangoang se seng le se seng se entsoe ka litekanyetso tse nepahetseng, ho netefatsa botenya bo ts'oanang le boreleli ba bokaholimo. Ho nepahala hona ho bohlokoa bakeng sa ho fihlela litefiso tse sa fetoheng tsa deposition le thepa ea lifilimi ho li-wafers tse ngata, ho ntlafatsa boleng ba tlhahiso ka kakaretso.
3. Tšireletso ea TšilafaloHo roala ha SiC ho sebetsa e le tšitiso e ke keng ea qojoa, e thibelang ho hasana ha litšila ho tloha ho susceptor ho ea ho sephaphatha. Sena se fokotsa likotsi tsa tšoaetso, e leng bohlokoa bakeng sa ho hlahisa lisebelisoa tsa semiconductor tse hloekileng haholo.
4. Ho tšoarella le litšenyehelo tse sebetsang hantleMohaho o matla le ho roala ha SiC ho matlafatsa ho tšoarella ha bajari ba li-wafer, ho fokotsa makhetlo a mangata a li-susceptor replacement. Sena se lebisa litšenyehelong tse tlase tsa tlhokomelo le ho fokotsa nako, ho eketsa katleho ea ts'ebetso ea tlhahiso ea semiconductor.
5. Dikgetho tsa ho itlhophisaLi-Semicorex Wafer Carriers tse nang le SiC Coating li ka etsoa ka mokhoa o ikhethileng ho fihlela litlhoko tse ikhethileng tsa ts'ebetso, ho kenyelletsa le ho fapana ka boholo, sebopeho le botenya ba ho roala. Ho feto-fetoha ha maemo ho lumella ho ntlafatsa ha susceptor ho lumellana le litlhoko tse ikhethang tsa mekhoa e fapaneng ea ho etsa semiconductor. Likhetho tsa tloaelo li thusa nts'etsopele ea meralo ea susceptor e etselitsoeng lits'ebetso tse ikhethileng, joalo ka tlhahiso ea boleng bo holimo kapa lipatlisiso le nts'etsopele, ho netefatsa ts'ebetso e nepahetseng bakeng sa linyeoe tse itseng tsa ts'ebeliso.
Lisebelisoa:
Li-Carriers tsa Semicera Wafer tse nang le SiC Coating li loketse hantle bakeng sa:
• Khōlo ea Epitaxial ea thepa ea semiconductor
• Mekhoa ea ho beha Mofuthu oa Lik'hemik'hale (CVD).
• Ho hlahisa liphaephe tsa boleng bo holimo tsa semiconductor
• Lisebelisoa tse tsoetseng pele tsa tlhahiso ea semiconductor
Litlhaloso tsa Tekheniki:
