Sesebelisoa sa PSS se sebetsanang le phetiso ea semiconductor wafer

Tlhaloso e Khutšoanyane:

Silicon carbide ke mofuta o mocha oa li-ceramics tse nang le ts'ebetso ea theko e phahameng le thepa e ntle ea thepa. Ka lebaka la likarolo tse kang matla a phahameng le ho thatafala, ho hanyetsa mocheso o phahameng, mocheso o moholo oa mocheso le khanyetso ea ho bola ha lik'hemik'hale, Silicon Carbide e batla e khona ho mamella mefuta eohle ea lik'hemik'hale. Ka hona, SiC e sebelisoa haholo merafong ea oli, lik'hemik'hale, mechine le sefofane, esita le matla a nyutlelie le sesole li na le litlhoko tsa tsona tse khethehileng ho SIC. Lisebelisoa tse ling tse tloaelehileng tseo re ka fanang ka tsona ke mehele ea tiiso bakeng sa pompo, valve le lihlomo tse sireletsang joalo-joalo.

Re khona ho rala le ho etsa ho latela litekanyo tsa hau tse ikhethileng ka boleng bo botle le nako e loketseng ea ho fana.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Tlhaloso ea Sehlahisoa

Khamphani ea rona e fana ka lits'ebeletso tsa ts'ebetso ea ho roala SiC ka mokhoa oa CVD holim'a graphite, li-ceramics le lisebelisoa tse ling, e le hore likhase tse khethehileng tse nang le carbon le silicon li sebetsane le mocheso o phahameng ho fumana limolek'hule tsa SiC tse hloekileng, limolek'hule tse behiloeng holim'a thepa e koahetsoeng, ho etsa lera la tšireletso la SIC.

Lintlha tse ka sehloohong:

1. Ho hanyetsa mocheso o phahameng oa oxidation:

khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho 1600 C.

2. Bohloeki bo phahameng : bo entsoeng ka ho kenngoa ha mouoane oa lik'hemik'hale tlas'a boemo bo phahameng ba mocheso oa chlorination.

3. Ho hanyetsa khoholeho ea mobu: boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.

4. Ho hanyetsa kutu: acid, alkali, letsoai le li-reagents tse phelang.

Lintlha tse ka sehloohong tsa CVD-SIC Coating

SiC-CVD Properties

Sebopeho sa Crystal

FCC mohato oa β

Botenya

g/cm³

3.21

Ho thatafala

Vickers thata

2500

Boholo ba lijo-thollo

μm

2~10

Bohloeki ba Lik'hemik'hale

%

99.99995

Matla a Mocheso

J·kg-1 ·K-1

640

Sublimation Mocheso

2700

Felexural Matla

MPa (RT 4-point)

415

Modulus e monyane

Gpa (4pt bend, 1300 ℃)

430

Katoloso ea Thermal (CTE)

10-6K-1

4.5

Thermal conductivity

(W/mK)

300

Semicera Sebaka sa mosebetsi
Sebaka sa mosebetsi sa Semicera 2
Mochini oa lisebelisoa
Ts'ebetso ea CNN, ho hloekisa lik'hemik'hale, ho roala CVD
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