Silicon carbide RTA carrier plate bakeng sa semiconductor

Silicon carbide RTA carrier plate for semiconductor Featured Image

Tlhaloso e Khutšoanyane:

Silicon carbide ke mofuta o mocha oa li-ceramics tse nang le ts'ebetso ea theko e phahameng le thepa e ntle ea thepa. Ka lebaka la likarolo tse kang matla a phahameng le ho thatafala, ho hanyetsa mocheso o phahameng, mocheso o moholo oa mocheso le khanyetso ea ho bola ha lik'hemik'hale, Silicon Carbide e batla e khona ho mamella mefuta eohle ea lik'hemik'hale. Ka hona, SiC e sebelisoa haholo merafong ea oli, lik'hemik'hale, mechine le sefofane, esita le matla a nyutlelie le sesole li na le litlhoko tsa tsona tse khethehileng ho SIC. Lisebelisoa tse ling tse tloaelehileng tseo re ka fanang ka tsona ke mehele ea tiiso bakeng sa pompo, valve le lihlomo tse sireletsang joalo-joalo.

Re khona ho rala le ho etsa ho latela litekanyo tsa hau tse ikhethileng ka boleng bo botle le nako e loketseng ea ho fana.

Re romelle lengolo-tsoibila

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Tlhaloso

Khamphani ea rona e fana ka lits'ebeletso tsa ts'ebetso ea ho roala SiC ka mokhoa oa CVD holim'a graphite, li-ceramics le lisebelisoa tse ling, e le hore likhase tse khethehileng tse nang le carbon le silicon li sebetsane le mocheso o phahameng ho fumana limolek'hule tsa SiC tse hloekileng, limolek'hule tse behiloeng holim'a thepa e koahetsoeng, ho etsa lera la tšireletso la SIC.

SiC Coating Carrien Bakeng sa RTPRTA (6)

Likarolo tse ka Sehloohong

1. Ho hanyetsa mocheso o phahameng oa oxidation:
khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho 1600 C.
2. Bohloeki bo phahameng : bo entsoeng ka ho kenngoa ha mouoane oa lik'hemik'hale tlas'a boemo bo phahameng ba mocheso oa chlorination.
3. Ho hanyetsa khoholeho ea mobu: boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.
4. Ho hanyetsa kutu: acid, alkali, letsoai le li-reagents tse phelang.

Lintlha tse ka sehloohong tsa CVD-SIC Coating

SiC-CVD Properties
Sebopeho sa Crystal	FCC mohato oa β
Botenya	g/cm³	3.21
Ho thatafala	Vickers thata	2500
Boholo ba lijo-thollo	μm	2~10
Bohloeki ba Lik'hemik'hale	%	99.99995
Matla a Mocheso	J·kg-1 ·K-1	640
Sublimation Mocheso	℃	2700
Felexural Matla	MPa (RT 4-point)	415
Modulus e monyane	Gpa (4pt bend, 1300 ℃)	430
Katoloso ea Thermal (CTE)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300