Tlhaloso
Khamphani ea rona e fana ka lits'ebeletso tsa ts'ebetso ea ho roala SiC ka mokhoa oa CVD holim'a graphite, li-ceramics le lisebelisoa tse ling, e le hore likhase tse khethehileng tse nang le carbon le silicon li sebetsane le mocheso o phahameng ho fumana limolek'hule tsa SiC tse hloekileng, limolek'hule tse behiloeng holim'a thepa e koahetsoeng, ho etsa lera la tšireletso la SIC.
Likarolo tse ka Sehloohong
1. Ho hanyetsa mocheso o phahameng oa oxidation:
khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho 1600 C.
2. Bohloeki bo phahameng: bo entsoeng ka ho kenngoa ha mouoane oa lik'hemik'hale tlas'a boemo bo phahameng ba mocheso oa chlorination.
3. Ho hanyetsa khoholeho ea mobu: boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.
4. Ho hanyetsa kutu: acid, alkali, letsoai le li-reagents tse phelang.
Lintlha tse ka sehloohong tsa CVD-SIC Coating
| SiC-CVD Properties | ||
| Sebopeho sa Crystal | FCC mohato oa β | |
| Botenya | g/cm³ | 3.21 |
| Ho thatafala | Vickers thata | 2500 |
| Boholo ba lijo-thollo | μm | 2~10 |
| Bohloeki ba Lik'hemik'hale | % | 99.99995 |
| Matla a Mocheso | J·kg-1 ·K-1 | 640 |
| Sublimation Mocheso | ℃ | 2700 |
| Felexural Matla | MPa (RT 4-point) | 415 |
| Modulus e monyane | Gpa (4pt bend, 1300 ℃) | 430 |
| Katoloso ea Thermal (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W/mK) | 300 |
Litšoantšo tse qaqileng
Boemo ba Khoebo
WeiTai Energy Technology Co., Ltd. ke mofani oa thepa ea ka sehloohong oa li-ceramics tse tsoetseng pele tsa semiconductor le moetsi feela Chaena ea ka fanang ka lisebelisoa tse phahameng tsa silicon carbide ceramic (haholo-holo Recrystallized SiC) le CVD SiC coating. Ho feta moo, k'hamphani ea rona e boetse e ikemiselitse ho etsa masimo a ceramic a kang alumina, aluminium nitride, zirconia, le silicon nitride, joalo-joalo.
Lihlahisoa tsa rona tsa mantlha li kenyelletsa: silicon carbide etching disc, silicon carbide boat tow, silicon carbide wafer boat (Photovoltaic&Semiconductor), silicon carbide furnace tube, silicon carbide cantilever paddle, silicon carbide chucks, silicon carbide beam, hammoho le CVD SiC coating le TaC. ho roala. Lihlahisoa tse sebelisoang haholo indastering ea semiconductor le photovoltaic, joalo ka lisebelisoa tsa kholo ea kristale, epitaxy, etching, ho paka, ho roala le libono tsa phallo, jj.
LBH
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