Silicon nitride bonded silicon carbide panel ha ho bonolo ho e fetola

Silicon nitride bonded silicon carbide panel ha ho bonolo ho deformation Featured Image

Tlhaloso e Khutšoanyane:

Matla a SemiceraTheknoloji Co., Ltd.ke morekisi ea ka sehloohong ea sebetsanang le li-wafer le lisebelisoa tse tsoetseng pele tsa semiconductor.Re inehetse ho fana ka lihlahisoa tsa boleng bo holimo, tse tšepahalang le tse ncha ho tlhahiso ea semiconductor,indasteri ea photovoltaicle mafapha a mang a amanang.

Mohala oa rona oa lihlahisoa o kenyelletsa lihlahisoa tsa graphite tse koahetsoeng ke SiC / TaC le lihlahisoa tsa ceramic, tse kenyelletsang lisebelisoa tse fapaneng tse kang silicon carbide, silicon nitride, le aluminium oxide joalo-joalo.

Joaloka mofani oa thepa ea tšepahalang, re utloisisa bohlokoa ba thepa e ka sebelisoang ha ho etsoa tlhahiso, 'me re ikemiselitse ho fana ka lihlahisoa tse finyellang litekanyetso tsa boleng bo holimo ho phethahatsa litlhoko tsa bareki ba rona.

Re romelle lengolo-tsoibila

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Silicon nitride e kopantsoeng le silicon carbide kiln e na le litšobotsi tsa matla a mocheso o phahameng, ho hanyetsa mocheso o motle oa mocheso, ho fetoha habonolo, ho hanyetsa oxidation, ho hanyetsa kutu, conductivity e ntle ea mocheso joalo-joalo.

Matšoao a mantlha a ts'ebetso

Ntho	Lenane la litene tsa mollo	Tlhaloso ea Kiln	Index ea sehlahisoa se bōpehileng
porosity e bonahalang（%）	<16	<16	<14
Boima ba bongata（g/cm3）	2 2.65	2 2.65	2 2.68
Matla a hatellang ka mocheso oa kamore（MPa）	2 160	2 170	2 180
Matla a ho koba mocheso oa kamore（1400X:） MPa	2 40	2 45	2 45
Matla a ho kobeha mocheso o phahameng（1400r） MPa	2 50	2 50	2 50
Coefficient ea katoloso ea mocheso（110CTC）xioVC	<4.18	<4.18	<4.18
Thermal conductivity（1100C）	216	2 16	216
Refractories（°C ）	1800	1800	1800
0.2 MPa Mocheso o kokobetsang tlas'a mojaro（X:)	1600	1600	> 1700
Boholo ba mocheso oa ho sebetsa（°C）	1550	1550	1550

Lihlahisoa li sebelisoa haholo ka lebili le silang la ceramic, lihlahisoa tse phahameng tsa aluminium, bolo ea aluminium porcelain, kiln ea indasteri, ceramic ceramic, high voltage electric porcelain, sanitary ware, porcelain ea letsatsi le letsatsi, nitride alloy le ceramic ceramics le liindasteri tse ling.