Silicon Substrate

Tlhaloso e Khutšoanyane:

Li-Semicera Silicon Substrates li entsoe ka nepo bakeng sa lits'ebetso tse sebetsang hantle molemong oa tlhahiso ea lisebelisoa tsa elektroniki le tsa semiconductor. Ka bohloeki bo ikhethang le ho tšoana, li-substrates tsena li etselitsoe ho tšehetsa mekhoa e tsoetseng pele ea theknoloji. Semicera e netefatsa boleng bo tsitsitseng le ts'epahalo bakeng sa merero ea hau e batloang haholo.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Semicera Silicon Substrates e etselitsoe ho fihlela litlhoko tse matla tsa indasteri ea semiconductor, e fanang ka boleng bo ke keng ba bapisoa le ho nepahala. Li-substrates tsena li fana ka motheo o tšepahalang bakeng sa lits'ebetso tse fapaneng, ho tloha ho lipotoloho tse kopaneng ho isa liseleng tsa photovoltaic, ho netefatsa ts'ebetso e nepahetseng le bophelo bo bolelele.

Bohloeki bo phahameng ba Semicera Silicon Substrates bo netefatsa bofokoli bo fokolang le litšobotsi tse phahameng tsa motlakase, tse bohlokoa bakeng sa tlhahiso ea likarolo tsa elektroniki tse sebetsang hantle haholo. Boemo bona ba bohloeki bo thusa ho fokotsa tahlehelo ea matla le ho ntlafatsa katleho e akaretsang ea lisebelisoa tsa semiconductor.

Semicera e sebelisa mekhoa ea morao-rao ea ho etsa lihlahisoa ho hlahisa li-silicon substrates tse nang le ho tšoana ho ikhethang le ho bata. Ho nepahala hona ho bohlokoa bakeng sa ho fumana liphetho tse tsitsitseng tsa tlhahiso ea semiconductor, moo esita le phapang e nyane e ka amang ts'ebetso ea sesebelisoa le tlhahiso.

E fumaneha ka boholo le litlhaloso tse fapaneng, Semicera Silicon Substrates e hlokomela litlhoko tse fapaneng tsa indasteri. Hore na o ntse o nts'etsapele li-microprocessor kapa liphanele tsa letsatsi, li-substrates tsena li fana ka maemo le ts'epahalo e hlokahalang bakeng sa ts'ebeliso ea hau e ikhethileng.

Semicera e ikemiselitse ho tšehetsa boqapi le katleho indastering ea semiconductor. Ka ho fana ka likaroloana tsa silicon tsa boleng bo holimo, re thusa bahlahisi ho sutumelletsa meeli ea theknoloji, ba fana ka lihlahisoa tse fihlelang litlhoko tse tsoelang pele tsa mmaraka. Tšepa Semicera bakeng sa litharollo tsa hau tsa elektroniki le tsa photovoltaic tsa moloko o latelang.

Lintho

Tlhahiso

Patlisiso

Dummy

Crystal Parameters

Polytype

4H

Phoso ea ho shebana le bokaholimo

<11-20>4±0.15°

Litekanyetso tsa Motlakase

Dopant

n-mofuta oa Nitrojene

Ho hanyetsa

0.015-0.025ohm · cm

Mechanical Parameters

Diameter

150.0±0.2mm

Botenya

350±25 μm

Boemo ba mantlha bo bataletseng

[1-100]±5°

Bolelele ba pele bo bataletseng

47.5±1.5mm

Folete ea bobeli

Ha ho letho

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Inamela

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Front(Si-face) roughness(AFM)

Ra≤0.2nm (5μm*5μm)

Sebopeho

Boima ba micropipe

<1 e/cm2

<10 e/cm2

<15 e/cm2

Litšila tsa tšepe

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Boleng ba Pele

Pele

Si

Qetello ea bokaholimo

Si-face CMP

Likaroloana

≤60ea/wafer (boholo ≥0.3μm)

NA

Mengwapo

≤5ea/mm. Bolelele ba kakaretso ≤Diameter

Bolelele bo akaretsang≤2*Diameter

NA

Lekhapetla la lamunu/makoti/matheba/maphatso/mapetso/tshilafatso

Ha ho letho

NA

Li-edge chips/indents/fracture/hex plates

Ha ho letho

Libaka tsa polytype

Ha ho letho

Kakaretso≤20%

Kakaretso≤30%

Ho tšoaea ka laser ka pele

Ha ho letho

Boleng ba Morao

Qetello ea morao

C-sefahleho sa CMP

Mengwapo

≤5ea/mm, bolelele bo akaretsang≤2* bophara

NA

Litšitiso tse ka morao (li-chips / indents)

Ha ho letho

Bokhopo ba mokokotlo

Ra≤0.2nm (5μm*5μm)

Ho tšoaea ka morao laser

1 mm (ho tloha pheletsong e ka holimo)

Qetello

Qetello

Chamfer

Sephutheloana

Sephutheloana

Epi-reading ka sephutheloana sa vacuum

Sephutheloana sa lik'hasete tse nang le liphaephe tse ngata

*Lintlha: "NA" e bolela hore ha ho na kopo Lintho tse sa boleloang li ka lebisa ho SEMI-STD.

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Li-wafers tsa SiC

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