SOI Wafer Silicon On Insulator

Tlhaloso e Khutšoanyane:

Semicera's SOI Wafer (Silicon On Insulator) e fana ka karohano e ikhethang ea motlakase le ts'ebetso bakeng sa lits'ebetso tse tsoetseng pele tsa semiconductor. E entsoe bakeng sa ts'ebetso e phahameng ea mocheso le motlakase, li-wafers tsena li loketse li-circuits tse sebetsang hantle tse sebetsang hantle. Khetha Semicera bakeng sa boleng le ho ts'epahala ho theknoloji ea SOI.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Semicera's SOI Wafer (Silicon On Insulator) e etselitsoe ho fana ka karohano e phahameng ea motlakase le ts'ebetso ea mocheso. Sebopeho sena se secha, se nang le lesela la silicon holim'a lesela le sireletsang tšireletso, se tiisa ts'ebetso e ntlafetseng ea lisebelisoa le ho fokotsa tšebeliso ea matla, e leng se etsang hore e be se loketseng bakeng sa mefuta e fapaneng ea lisebelisoa tsa theknoloji e phahameng.

Li-wafers tsa rona tsa SOI li fana ka melemo e ikhethang bakeng sa lipotoloho tse kopantsoeng ka ho fokotsa matla a likokoana-hloko le ho ntlafatsa lebelo le katleho ea lisebelisoa. Sena se bohlokoa bakeng sa lisebelisoa tsa elektroniki tsa sejoale-joale, moo ts'ebetso e phahameng le ts'ebetso ea matla li bohlokoa bakeng sa lits'ebetso tsa bareki le tsa indasteri.

Semicera e sebelisa mekhoa e tsoetseng pele ea tlhahiso ho hlahisa li-wafers tsa SOI tse nang le boleng bo tsitsitseng le ho tšepahala. Li-wafers tsena li fana ka tšireletso e ntle ea mocheso, e leng se etsang hore li tšoanelehe ho sebelisoa libakeng tseo ho tsona ho tšoenngoang ke ho qhalana ha mocheso, joalo ka lisebelisoa tsa elektronike tse matla haholo le tsamaiso ea matla.

Tšebeliso ea li-wafers tsa SOI ha ho etsoa lihlahisoa tsa semiconductor li lumella nts'etsopele ea lichifi tse nyane, tse potlakileng le tse tšepahalang. Boitlamo ba Semicera ba boenjineri bo nepahetseng bo netefatsa hore li-wafers tsa rona tsa SOI li fihlela maemo a holimo a hlokahalang bakeng sa mahlale a tsoetseng pele mafapheng a kang likhokahano tsa mehala, likoloi le lisebelisoa tsa elektroniki tsa bareki.

Ho khetha SOI Wafer ea Semicera ho bolela ho tsetela ho sehlahisoa se tšehetsang tsoelo-pele ea theknoloji ea elektroniki le ea microelectronic. Li-wafers tsa rona li etselitsoe ho fana ka ts'ebetso e ntlafetseng le ho tšoarella, ho kenya letsoho katlehong ea merero ea hau ea theknoloji e phahameng le ho netefatsa hore u lula u le ka pele ho boqapi.

Lintho

Tlhahiso

Patlisiso

Dummy

Crystal Parameters

Polytype

4H

Phoso ea ho shebana le bokaholimo

<11-20>4±0.15°

Litekanyetso tsa Motlakase

Dopant

n-mofuta oa Nitrojene

Ho hanyetsa

0.015-0.025ohm · cm

Mechanical Parameters

Diameter

150.0±0.2mm

Botenya

350±25 μm

Boemo ba mantlha bo bataletseng

[1-100]±5°

Bolelele ba pele bo bataletseng

47.5±1.5mm

Folete ea bobeli

Ha ho letho

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Inamela

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Front(Si-face) roughness(AFM)

Ra≤0.2nm (5μm*5μm)

Sebopeho

Boima ba micropipe

<1 e/cm2

<10 e/cm2

<15 e/cm2

Litšila tsa tšepe

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Boleng ba Pele

Pele

Si

Qetello ea bokaholimo

Si-face CMP

Likaroloana

≤60ea/wafer (boholo ≥0.3μm)

NA

Mengwapo

≤5ea/mm. Bolelele ba kakaretso ≤Diameter

Bolelele bo akaretsang≤2*Diameter

NA

Lekhapetla la lamunu/makoti/matheba/maphatso/mapetso/tshilafatso

Ha ho letho

NA

Li-edge chips/indents/fracture/hex plates

Ha ho letho

Libaka tsa polytype

Ha ho letho

Kakaretso≤20%

Kakaretso≤30%

Ho tšoaea ka laser ka pele

Ha ho letho

Boleng ba Morao

Qetello ea morao

C-sefahleho sa CMP

Mengwapo

≤5ea/mm, bolelele bo akaretsang≤2* bophara

NA

Litšitiso tse ka morao (li-chips / indents)

Ha ho letho

Bokhopo ba mokokotlo

Ra≤0.2nm (5μm*5μm)

Ho tšoaea ka morao laser

1 mm (ho tloha pheletsong e ka holimo)

Qetello

Qetello

Chamfer

Sephutheloana

Sephutheloana

Epi e loketse ho paka ka vacuum

Sephutheloana sa lik'hasete tse nang le liphaephe tse ngata

*Lintlha: "NA" e bolela hore ha ho na kopo Lintho tse sa boleloang li ka lebisa ho SEMI-STD.

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Li-wafers tsa SiC

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