TaC e koahetsoeng ka li-epitaxial wafer carriershangata li sebelisoa ha ho lokisoa lisebelisoa tse phahameng tsa optoelectronic, lisebelisoa tsa matla, li-sensor le likarolo tse ling. Senaepitaxial wafer carriere bua ka deposition eaTaCfilimi e tšesaane holim'a substrate nakong ea ts'ebetso ea kholo ea kristale ho theha sephaphatha se nang le sebopeho se itseng le ts'ebetso bakeng sa ho lokisoa ha lisebelisoa tse latelang.
Theknoloji ea "chemical vapor deposition" (CVD) hangata e sebelisoa ho lokisetsaTaC e koahetsoeng ka li-epitaxial wafer carriers. Ka ho sebetsana le li-precursors tsa tšepe le likhase tsa mohloli oa carbon mocheso o phahameng, filimi ea TaC e ka behoa holim'a karoloana ea kristale. Filimi ena e ka ba le thepa e babatsehang ea motlakase, ea optical le ea mechine 'me e loketse ho lokisetsa lisebelisoa tse sa tšoaneng tse sebetsang hantle.
Semicera e fana ka liaparo tse khethehileng tsa tantalum carbide (TaC) bakeng sa likarolo tse fapaneng le bajari.Semicera e etellang pele ts'ebetso ea ho roala e nolofalletsa liphahlo tsa tantalum carbide (TaC) ho finyella bohloeki bo phahameng, botsitso ba mocheso o phahameng le mamello e phahameng ea lik'hemik'hale, ho ntlafatsa boleng ba sehlahisoa sa likristale tsa SIC / GAN le likarolo tsa EPI (Sesila sa TaC se koahetsoeng ke graphite), le ho lelefatsa bophelo ba likarolo tsa bohlokoa tsa reactor. Ts'ebeliso ea tantalum carbide TaC coating ke ho rarolla bothata le ho ntlafatsa boleng ba kholo ea kristale, mme Semicera e se e rarollotse theknoloji ea tantalum carbide coating (CVD), e fihletseng boemo bo holimo ba machabeng.
Ka mor'a lilemo tsa tsoelo-pele, Semicera e hapile theknoloji eaCVD TaCka matsapa a kopanetsweng a lefapha la R&D. Litšitiso li bonolo ho etsahala ts'ebetsong ea kholo ea li-wafers tsa SiC, empa ka mor'a ho li sebelisaTaC, phapang ke ea bohlokoa. Ka tlase ke papiso ea li-wafers tse nang le TaC le ntle le eona, hammoho le likarolo tsa Simicera bakeng sa kholo e le 'ngoe ea kristale.
ka le ntle le TaC
Kamora ho sebelisa TaC (ka ho le letona)
Ho feta moo, Semicera'sLihlahisoa tse koahetsoeng ke TaCbontša bophelo bo bolelele ba tšebeletso le khanyetso e kholo ea mocheso o phahameng ha o bapisoa leLiaparo tsa SiC.Litekanyo tsa laboratori li bontšitse hore ronaLiaparo tsa TaCe ka sebetsa ka linako tsohle mochesong o fihlang ho likhato tse 2300 tsa Celsius ka nako e telele. Ka tlase ke mehlala e meng ea mehlala ea rona:
