Masale a tataisoang a graphite a koahetsoeng ke TaCbua ka deposition ya lera e tshesane yatantalum carbideholim'a lesale la tataiso ea graphite ho ntlafatsa ho hanyetsa ha eona, ho hanyetsa mocheso o phahameng le botsitso ba lik'hemik'hale. Hangata ho roala hona ho thehoa holim'a selikalikoe sa tataiso ea graphite ka mekhoa e kang ea 'mele ea mouoane (PVD) kapa k'hemik'hale ea mouoane oa lik'hemik'hale (CVD).
Semicera e fana ka liaparo tse khethehileng tsa tantalum carbide (TaC) bakeng sa likarolo tse fapaneng le bajari.Semicera e etellang pele ts'ebetso ea ho roala e nolofalletsa liphahlo tsa tantalum carbide (TaC) ho finyella bohloeki bo phahameng, botsitso ba mocheso o phahameng le mamello e phahameng ea lik'hemik'hale, ho ntlafatsa boleng ba sehlahisoa sa likristale tsa SIC / GAN le likarolo tsa EPI (Sesila sa TaC se koahetsoeng ke graphite), le ho lelefatsa bophelo ba likarolo tsa bohlokoa tsa reactor. Ts'ebeliso ea tantalum carbide TaC coating ke ho rarolla bothata le ho ntlafatsa boleng ba kholo ea kristale, mme Semicera e se e rarollotse theknoloji ea tantalum carbide coating (CVD), e fihletseng boemo bo holimo ba machabeng.
Ka mor'a lilemo tsa tsoelo-pele, Semicera e hapile theknoloji eaCVD TaCka matsapa a kopanetsweng a lefapha la R&D. Litšitiso li bonolo ho etsahala ts'ebetsong ea kholo ea li-wafers tsa SiC, empa ka mor'a ho li sebelisaTaC, phapang ke ea bohlokoa. Ka tlase ke papiso ea li-wafers tse nang le TaC le ntle le eona, hammoho le likarolo tsa Simicera bakeng sa kholo e le 'ngoe ea kristale.
Likarolo tsa mantlha tsa mehele ea tataiso ea graphite e koahetsoeng ke TaC e kenyelletsa:
1. Ho hanyetsa mocheso o phahameng: Ho roala ha TaC ho na le botsitso bo botle ba mocheso o phahameng 'me ho ka boloka botsitso libakeng tse phahameng tsa mocheso.
2. Ho hanyetsa ho roala: The boima bo phahameng ba tantalum carbide lera le tšesaane le fana ka tataiso lesale la ho apara hantle le ho lelefatsa bophelo ba eona ba tšebeletso.
3. Ho tsitsa ha lik'hemik'hale: Ho roala ha TaC ho na le botsitso bo phahameng khahlanong le ho senyeha ha lik'hemik'hale, ho etsa hore e tšoanelehe bakeng sa lisebelisoa tsa mecha ea litaba e senyang.
4. Fokotsa likhohlano: Ho roala ha TaC ho ka fokotsa khohlano pakeng tsa lesale la tataiso ea graphite le likarolo tse ling le ho ntlafatsa katleho ea litiiso tsa mechine.
ka le ntle le TaC
Kamora ho sebelisa TaC (ka ho le letona)
Ho feta moo, Semicera'sLihlahisoa tse koahetsoeng ke TaCbontša bophelo bo bolelele ba tšebeletso le khanyetso e kholo ea mocheso o phahameng ha o bapisoa leLiaparo tsa SiC.Litekanyo tsa laboratori li bontšitse hore ronaLiaparo tsa TaCe ka sebetsa ka linako tsohle mochesong o fihlang ho likhato tse 2300 tsa Celsius ka nako e telele. Ka tlase ke mehlala e meng ea mehlala ea rona:
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