TaC Coated Plate ke disc e khethehileng e etselitsoeng ho sebelisoa lits'ebetsong tsa SiC epitaxial, e entsoeng ka mokhoa o nepahetseng ho tsoa ho thepa ea boleng bo holimo ea graphite. Bokaholimo ba eona bo koahetsoe ka bokhabane ka tantalum carbide (TaC), motsoako o tsebahalang ka bohloeki le matla a eona a ikhethang. Ho roala ha TaC ho ntlafatsa ho tšoarella ha poleiti le ho hanyetsa mocheso o phahameng, ho etsa hore e be e loketseng maemo a boima a SiC epitaxial process.
TaC Coated Plate ena e ncha ke disc e ikhethileng e etselitsoeng ho sebelisoa lits'ebetsong tsa SiC epitaxial, e entsoeng ka boqhetseke ho tsoa ho thepa ea boleng bo holimo ea graphite. TaC Coated Plate e koahetsoe ka bokhabane ka tantalum carbide (TaC), motsoako o tsejoang ka bohloeki le matla a eona a ikhethang. e sebetsa e le sethala se tšepahalang sa ho jara liphaphatha nakong ea mekhahlelo e fapaneng ea kholo ea SiC epitaxial. Motheo oa eona oa bohloeki bo phahameng oa graphite o fana ka sebaka se tsitsitseng le se sa sebetseng, ha seaparo sa TaC se eketsa tšireletso e eketsehileng khahlanong le liphetoho tsa lik'hemik'hale le ho apara.
SemicnakoTaC Coated Plate e hlophisitsoe ho latela litlhoko tse khethehileng tsa bareki, ho netefatsa ts'ebetso e nepahetseng le ho lumellana le SiC epitaxial systems. Ebang ke boholo, sebōpeho, kapa litlhaloso tse ling, lipoleiti tsena li etselitsoe ho finyella litlhoko tse ikhethang tsa kopo e 'ngoe le e 'ngoe.
ka le ntle le TaC
Kamora ho sebelisa TaC (ka ho le letona)
Ho feta moo, Semicera'sLihlahisoa tse koahetsoeng ke TaCbontša bophelo bo bolelele ba tšebeletso le khanyetso e kholo ea mocheso o phahameng ha o bapisoa leLiaparo tsa SiC.Litekanyo tsa laboratori li bontšitse hore ronaLiaparo tsa TaCe ka sebetsa ka linako tsohle mochesong o fihlang ho likhato tse 2300 tsa Celsius ka nako e telele. Ka tlase ke mehlala e meng ea mehlala ea rona:
