Tantalum Carbide Coated Wafer Carrier

Tlhaloso e Khutšoanyane:

Tantalum Carbide Coated Wafer Carrier ke Semicera Semiconductor e etselitsoe ts'ebetso e phahameng tlhahisong ea semiconductor. E na le koae e matla ea tantalum carbide, e tiisa ho hanyetsa ho apara ka tsela e ikhethang, botsitso bo phahameng ba mocheso, le tšireletso e phahameng libakeng tse thata. E loketse lits'ebetso tsa MOCVD, sesebelisoa sena se ntlafatsa ts'ebetso ea li-wafer, se lelefatsa bophelo ba lisebelisoa, 'me se fana ka liphetho tse tsitsitseng lits'ebetsong tsa bohlokoa.

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Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Semicera e fana ka liaparo tse khethehileng tsa tantalum carbide (TaC) bakeng sa likarolo tse fapaneng le bajari.Semicera e etellang pele ts'ebetso ea ho roala e nolofalletsa liphahlo tsa tantalum carbide (TaC) ho finyella bohloeki bo phahameng, botsitso ba mocheso o phahameng le mamello e phahameng ea lik'hemik'hale, ho ntlafatsa boleng ba sehlahisoa sa likristale tsa SIC / GAN le likarolo tsa EPI (Sesila sa TaC se koahetsoeng ke graphite), le ho lelefatsa bophelo ba likarolo tsa bohlokoa tsa reactor. Ts'ebeliso ea tantalum carbide TaC coating ke ho rarolla bothata le ho ntlafatsa boleng ba kholo ea kristale, mme Semicera e se e rarollotse theknoloji ea tantalum carbide coating (CVD), e fihletseng boemo bo holimo ba machabeng.

Li-wafer carriers tsa Tantalum carbide li sebelisoa haholo ts'ebetsong ea li-wafer le lits'ebetsong tsa ts'ebetso ea ho etsa semiconductor. Ba fana ka ts'ehetso le ts'ireletso e tsitsitseng ho netefatsa polokeho, ho nepahala le ho tsitsa ha li-wafers nakong ea ts'ebetso ea tlhahiso. Liaparo tsa Tantalum carbide li ka lelefatsa bophelo ba ts'ebeletso ea mojari, tsa fokotsa litšenyehelo, le ho ntlafatsa boleng le ts'epahalo ea lihlahisoa tsa semiconductor.

Tlhaloso ea tantalum carbide coated wafer carrier ke e latelang:

1. Khetho ea thepa: Tantalum carbide ke thepa e nang le ts'ebetso e babatsehang, boima bo phahameng, ntlha e phahameng ea ho qhibiliha, ho hanyetsa kutu le thepa e babatsehang ea mechine, kahoo e sebelisoa haholo ts'ebetsong ea tlhahiso ea semiconductor.

2. Ho roala ka holim'a metsi: Tantalum carbide coating e sebelisoa holim'a sejana sa liphaphatha ka mokhoa o khethehileng oa ho roala ho etsa seaparo sa junifomo le se teteaneng sa tantalum carbide. Ho roala hona ho ka fana ka tšireletso e eketsehileng le ho hanyetsa ho apara, ha ho ntse ho e-na le conductivity e ntle ea mocheso.

3. Flatness le ho nepahala: Tantalum carbide coated wafer carrier e na le tekanyo e phahameng ea ho bata le ho nepahala, ho netefatsa botsitso le ho nepahala ha li-wafers nakong ea ts'ebetso ea tlhahiso. Ho bata le ho qeta ha bokaholimo ba sepalangoang bo bohlokoa ho netefatsa boleng le ts'ebetso ea sephaphatha.

4. Mocheso botsitso: Tantalum carbide coated wafer carriers e ka boloka botsitso libakeng tse phahameng tsa mocheso ntle le deformation kapa ho lokoloha, ho netefatsa botsitso le ho lumellana ha li-wafers ka mekhoa e phahameng ea mocheso.

5. Ho hanyetsa kutu: Liaparo tsa Tantalum carbide li na le khanyetso e ntle ea kutu, li ka hanela khoholeho ea lik'hemik'hale le li-solvents, 'me li sireletsa mokhanni ho tsoa mokelikeli le khase.

Tlhōlisano e phahameng ea tantalum carbide coating_ ntlafatsa katleho ea tlhahiso ea indasteri le ho fokotsa litšenyehelo tsa tlhokomelo Featured Image

Karolo ea Tac bakeng sa kristale e le 'ngoe ea kholo

Antiwear tantalum carbide coating_ E sireletsa thepa hore e se ke ea senyeha le ho bola Setšoantšo se hlahang

Graphite e nang le selikalikoe se koahetsoeng ke TaC

ka le ntle le TaC

Kamora ho sebelisa TaC (ka ho le letona)

Ho feta moo, Semicera'sLihlahisoa tse koahetsoeng ke TaCbontša bophelo bo bolelele ba tšebeletso le khanyetso e kholo ea mocheso o phahameng ha o bapisoa leLiaparo tsa SiC.Litekanyo tsa laboratori li bontšitse hore ronaLiaparo tsa TaCe ka sebetsa ka linako tsohle mochesong o fihlang ho likhato tse 2300 tsa Celsius ka nako e telele. Ka tlase ke mehlala e meng ea mehlala ea rona: