Semicera e fana ka liaparo tse khethehileng tsa tantalum carbide (TaC) bakeng sa likarolo tse fapaneng le bajari.Semicera e etellang pele ts'ebetso ea ho roala e nolofalletsa liphahlo tsa tantalum carbide (TaC) ho finyella bohloeki bo phahameng, botsitso ba mocheso o phahameng le mamello e phahameng ea lik'hemik'hale, ho ntlafatsa boleng ba sehlahisoa sa likristale tsa SIC / GAN le likarolo tsa EPI (Sesila sa TaC se koahetsoeng ke graphite), le ho lelefatsa bophelo ba likarolo tsa bohlokoa tsa reactor. Ts'ebeliso ea tantalum carbide TaC coating ke ho rarolla bothata le ho ntlafatsa boleng ba kholo ea kristale, mme Semicera e se e rarollotse theknoloji ea tantalum carbide coating (CVD), e fihletseng boemo bo holimo ba machabeng.
Li-wafer carriers tsa Tantalum carbide li sebelisoa haholo ts'ebetsong ea li-wafer le lits'ebetsong tsa ts'ebetso ea ho etsa semiconductor. Ba fana ka ts'ehetso le ts'ireletso e tsitsitseng ho netefatsa polokeho, ho nepahala le ho tsitsa ha li-wafers nakong ea ts'ebetso ea tlhahiso. Liaparo tsa Tantalum carbide li ka lelefatsa bophelo ba ts'ebeletso ea mojari, tsa fokotsa litšenyehelo, le ho ntlafatsa boleng le ts'epahalo ea lihlahisoa tsa semiconductor.
Tlhaloso ea tantalum carbide coated wafer carrier ke e latelang:
1. Khetho ea thepa: Tantalum carbide ke thepa e nang le ts'ebetso e babatsehang, boima bo phahameng, ntlha e phahameng ea ho qhibiliha, ho hanyetsa kutu le thepa e babatsehang ea mechine, kahoo e sebelisoa haholo ts'ebetsong ea tlhahiso ea semiconductor.
2. Ho roala ka holim'a metsi: Tantalum carbide coating e sebelisoa holim'a sejana sa liphaphatha ka mokhoa o khethehileng oa ho roala ho etsa seaparo sa junifomo le se teteaneng sa tantalum carbide. Ho roala hona ho ka fana ka tšireletso e eketsehileng le ho hanyetsa ho apara, ha ho ntse ho e-na le conductivity e ntle ea mocheso.
3. Flatness le ho nepahala: Tantalum carbide coated wafer carrier e na le tekanyo e phahameng ea ho bata le ho nepahala, ho netefatsa botsitso le ho nepahala ha li-wafers nakong ea ts'ebetso ea tlhahiso. Ho bata le ho fela ha bokaholimo ba thepa li bohlokoa ho netefatsa boleng le ts'ebetso ea sephaphatha.
4. Mocheso botsitso: Tantalum carbide coated wafer carriers e ka boloka botsitso libakeng tse phahameng tsa mocheso ntle le deformation kapa ho lokoloha, ho netefatsa botsitso le ho lumellana ha li-wafers ka mekhoa e phahameng ea mocheso.
5. Ho hanyetsa kutu: Liaparo tsa Tantalum carbide li na le khanyetso e ntle ea kutu, li ka hanela khoholeho ea lik'hemik'hale le li-solvents, 'me li sireletsa mokhanni ho tsoa mokelikeli le khase.
ka le ntle le TaC
Kamora ho sebelisa TaC (ka ho le letona)
Ho feta moo, Semicera'sLihlahisoa tse koahetsoeng ke TaCbontša bophelo bo bolelele ba tšebeletso le khanyetso e kholo ea mocheso o phahameng ha o bapisoa leLiaparo tsa SiC.Litekanyo tsa laboratori li bontšitse hore ronaLiaparo tsa TaCe ka sebetsa ka linako tsohle mochesong o fihlang ho likhato tse 2300 tsa Celsius ka nako e telele. Ka tlase ke mehlala e meng ea mehlala ea rona:
