Letlapa la graphite la Tantalum carbideke thepa ea graphite e nang le lera le tšesaane latantalum carbideka holim'a substrate. Lera le tšesaane la tantalum carbide hangata le thehoa holim'a karoloana ea graphite ka mekhoa e kang ea 'mele ea mouoane (PVD) kapa k'hemik'hale ea mouoane oa lik'hemik'hale (CVD). Seaparo sena se na le thepa e babatsehang e kang ho thatafala ho phahameng, ho hanyetsa ho apara hantle, ho hanyetsa kutu le botsitso bo phahameng ba mocheso.
Semicera e fana ka liaparo tse khethehileng tsa tantalum carbide (TaC) bakeng sa likarolo tse fapaneng le bajari.Semicera e etellang pele ts'ebetso ea ho roala e nolofalletsa liphahlo tsa tantalum carbide (TaC) ho finyella bohloeki bo phahameng, botsitso ba mocheso o phahameng le mamello e phahameng ea lik'hemik'hale, ho ntlafatsa boleng ba sehlahisoa sa likristale tsa SIC / GAN le likarolo tsa EPI (Sesila sa TaC se koahetsoeng ke graphite), le ho lelefatsa bophelo ba likarolo tsa bohlokoa tsa reactor. Ts'ebeliso ea tantalum carbide TaC coating ke ho rarolla bothata le ho ntlafatsa boleng ba kholo ea kristale, mme Semicera e se e rarollotse theknoloji ea tantalum carbide coating (CVD), e fihletseng boemo bo holimo ba machabeng.
Ka mor'a lilemo tsa tsoelo-pele, Semicera e hapile theknoloji eaCVD TaCka matsapa a kopanetsweng a lefapha la R&D. Litšitiso li bonolo ho etsahala ts'ebetsong ea kholo ea li-wafers tsa SiC, empa ka mor'a ho li sebelisaTaC, phapang ke ea bohlokoa. Ka tlase ke papiso ea li-wafers tse nang le TaC le ntle le eona, hammoho le likarolo tsa Simicera bakeng sa kholo e le 'ngoe ea kristale.
Melemo ea mantlha ea tantalum carbide coated graphite sheet e kenyelletsa:
1. Ho hanyetsa mocheso o phahameng: Tantalum carbide e na le sebaka se phahameng sa ho qhibiliha le botsitso bo botle ba mocheso o phahameng, ho etsa hore letlapa le koahetsoeng la graphite le loketse ho sebelisoa libakeng tse phahameng tsa mocheso.
2. Ho hanyetsa kutu: Tantalum carbide coat e ka thibela khoholeho ea lintho tse ngata tse senyang lik'hemik'hale le ho lelefatsa bophelo ba tšebeletso ea thepa.
3. Boima bo phahameng: Boima bo phahameng ba tantalum carbide lera le tšesaane le fana ka khanyetso e ntle ea ho apara 'me e loketse likopo tse hlokang khanyetso e phahameng ea ho apara.
4. Ho tsitsa ha lik'hemik'hale: Tantalum carbide coating e na le botsitso bo babatsehang ho corrosion ea lik'hemik'hale 'me e loketse ho sebelisoa mecheng e meng e senyang.
ka le ntle le TaC
Kamora ho sebelisa TaC (ka ho le letona)
Ho feta moo, Semicera'sLihlahisoa tse koahetsoeng ke TaCbontša bophelo bo bolelele ba tšebeletso le khanyetso e kholo ea mocheso o phahameng ha o bapisoa leLiaparo tsa SiC.Litekanyo tsa laboratori li bontšitse hore ronaLiaparo tsa TaCe ka sebetsa ka linako tsohle mochesong o fihlang ho likhato tse 2300 tsa Celsius ka nako e telele. Ka tlase ke mehlala e meng ea mehlala ea rona:
