Tantalum Carbide Coating Pedestal Support Plate

Tlhaloso e Khutšoanyane:

Tantalum Carbide Coated Susceptor Support Plate ka Semicera e etselitsoe ho sebelisoa ho silicon carbide epitaxy le kholo ea kristale. E fana ka ts'ehetso e tsitsitseng libakeng tse phahameng tsa mocheso, tse senyang, kapa tse nang le khatello e phahameng, tse hlokahalang bakeng sa mekhoa ena e tsoetseng pele. Hangata e sebelisoa ho li-reactors tse nang le khatello e phahameng, mehaho ea sebōpi le lisebelisoa tsa lik'hemik'hale, e tiisa ts'ebetso ea tsamaiso le botsitso. Theknoloji e ncha ea ho roala ea Semicera e tiisa boleng bo holimo le ho tšepahala bakeng sa likopo tse hlokahalang tsa boenjiniere.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Tantalum carbide e koahetsoeng ka poleiti ea tšehetso ea susceptorke susceptor kapa sebopeho sa tšehetso se koahetsoeng ka lera le lesesaane latantalum carbide. Ho roala hona ho ka etsoa holim'a susceptor ka mekhoa e kang "physical vapor deposition" (PVD) kapa "chemical vapor deposition" (CVD), e fanang ka susceptor thepa e phahameng ka ho fetisisa.tantalum carbide.

 

Semicera e fana ka liaparo tse khethehileng tsa tantalum carbide (TaC) bakeng sa likarolo tse fapaneng le bajari.Semicera e etellang pele ts'ebetso ea ho roala e nolofalletsa liphahlo tsa tantalum carbide (TaC) ho finyella bohloeki bo phahameng, botsitso ba mocheso o phahameng le mamello e phahameng ea lik'hemik'hale, ho ntlafatsa boleng ba sehlahisoa sa likristale tsa SIC / GAN le likarolo tsa EPI (Sesila sa TaC se koahetsoeng ke graphite), le ho lelefatsa bophelo ba likarolo tsa bohlokoa tsa reactor. Ts'ebeliso ea tantalum carbide TaC coating ke ho rarolla bothata le ho ntlafatsa boleng ba kholo ea kristale, mme Semicera e se e rarollotse theknoloji ea tantalum carbide coating (CVD), e fihletseng boemo bo holimo ba machabeng.

 

Ka mor'a lilemo tsa tsoelo-pele, Semicera e hapile theknoloji eaCVD TaCka matsapa a kopanetsweng a lefapha la R&D. Litšitiso li bonolo ho etsahala ts'ebetsong ea kholo ea li-wafers tsa SiC, empa ka mor'a ho li sebelisaTaC, phapang ke ea bohlokoa. Ka tlase ke papiso ea li-wafers tse nang le TaC le ntle le eona, hammoho le likarolo tsa Simicera bakeng sa kholo e le 'ngoe ea kristale.

Likarolo tsa mantlha tsa lipoleiti tsa tšehetso tsa tantalum carbide li kenyelletsa:

1. Botsitso bo phahameng ba mocheso: Tantalum carbide e na le botsitso bo phahameng ba mocheso o phahameng, ho etsa hore poleiti ea tšehetso ea motheo e koahetsoeng e loketse litlhoko tsa tšehetso libakeng tse phahameng tsa mocheso o sebetsang.

2. Ho hanyetsa kutu: Tantalum carbide coating e na le khanyetso e ntle ea kutu, e ka hanela ho bola ha lik'hemik'hale le oxidation, le ho lelefatsa bophelo ba tšebeletso ea setsi.

3. Boima bo phahameng le ho hanyetsa ho apara: Boima bo phahameng ba ho roala ha tantalum carbide bo fana ka setsi sa tšehetso sa motheo se setle sa ho apara ho hanyetsa, se loketseng liketsahalo tse hlokang khanyetso e phahameng ea ho apara.

4. Ho tsitsa ha lik'hemik'hale: Tantalum carbide e na le botsitso bo phahameng ho mefuta e sa tšoaneng ea lik'hemik'hale, ho etsa hore poleiti ea tšehetso ea motheo e koahetsoeng e sebetse hantle libakeng tse ling tse senyang.

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ka le ntle le TaC

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Kamora ho sebelisa TaC (ka ho le letona)

Ho feta moo, Semicera'sLihlahisoa tse koahetsoeng ke TaCbontša bophelo bo bolelele ba tšebeletso le khanyetso e kholo ea mocheso o phahameng ha o bapisoa leLiaparo tsa SiC.Litekanyo tsa laboratori li bontšitse hore ronaLiaparo tsa TaCe ka sebetsa ka linako tsohle mochesong o fihlang ho likhato tse 2300 tsa Celsius ka nako e telele. Ka tlase ke mehlala e meng ea mehlala ea rona:

 
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Tshebeletso ya rona

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