Semicera e fana ka liaparo tse khethehileng tsa tantalum carbide (TaC) bakeng sa likarolo tse fapaneng le bajari.Semicera e etellang pele ts'ebetso ea ho roala e nolofalletsa liphahlo tsa tantalum carbide (TaC) ho finyella bohloeki bo phahameng, botsitso ba mocheso o phahameng le mamello e phahameng ea lik'hemik'hale, ho ntlafatsa boleng ba sehlahisoa sa likristale tsa SIC / GAN le likarolo tsa EPI (Sesila sa TaC se koahetsoeng ke graphite), le ho lelefatsa bophelo ba likarolo tsa bohlokoa tsa reactor. Ts'ebeliso ea tantalum carbide TaC coating ke ho rarolla bothata le ho ntlafatsa boleng ba kholo ea kristale, mme Semicera e se e rarollotse theknoloji ea tantalum carbide coating (CVD), e fihletseng boemo bo holimo ba machabeng.
Graphite ke thepa e ntle haholo ea mocheso o phahameng, empa e oxidize habonolo mocheso o phahameng. Le ka har'a libopi tsa vacuum tse nang le khase ea inert, e ntse e ka kena butle ka oxidation. Ho sebelisa seaparo sa CVD tantalum carbide (TaC) ho ka sireletsa ka katleho karolo ea graphite, ho fana ka khanyetso e tšoanang ea mocheso o phahameng joaloka graphite. TaC e boetse ke thepa e sa sebetseng, ho bolelang hore e ke ke ea itšoara ka likhase tse kang argon kapa hydrogen mocheso o phahameng.PatlisisoTantalum Carbide CVD Coating EPI Susceptor hona joale!
Ka mor'a lilemo tsa tsoelo-pele, Semicera e hapile theknoloji eaCVD TaCka matsapa a kopanetsweng a lefapha la R&D. Litšitiso li bonolo ho etsahala ts'ebetsong ea kholo ea li-wafers tsa SiC, empa ka mor'a ho li sebelisaTaC, phapang ke ea bohlokoa. Ka tlase ke papiso ea li-wafers tse nang le TaC le ntle le eona, hammoho le likarolo tsa Simicera bakeng sa kholo e le 'ngoe ea kristale.
ka le ntle le TaC
Kamora ho sebelisa TaC (ka ho le letona)
Ho feta moo, Semicera'sLihlahisoa tse koahetsoeng ke TaCbontša bophelo bo bolelele ba tšebeletso le khanyetso e kholo ea mocheso o phahameng ha o bapisoa leLiaparo tsa SiC.Litekanyo tsa laboratori li bontšitse hore ronaLiaparo tsa TaCe ka sebetsa ka linako tsohle mochesong o fihlang ho likhato tse 2300 tsa Celsius ka nako e telele. Ka tlase ke mehlala e meng ea mehlala ea rona:
