SemiceraTantalum CarbideLi-heaters tsa MOCVD li hahiloe bakeng sa lisebelisoa tsa mocheso o phahameng ka ho fetisisa, tse khonang ho finyella mocheso ho fihlela ho 2300 ° C. Licheso tsena li fana ka botsitso bo ikhethang ba mocheso, ho netefatsa ts'ebetso e tsitsitseng le e tšepahalang lits'ebetsong tsa metal-organic chemical vapor deposition (MOCVD). Semicera e fana ka tiiso ea lihlahisoa tse sebetsang ka nako e telele le tse nepahetseng, tse etselitsoeng ho finyella litlhoko tsa liindasteri tse tsoetseng pele.
E entsoe ka lisebelisoa tse tsoetseng pele tsa tantalum carbide, li-heaters tsena tsa MOCVD li fana ka khanyetso e ikhethang ho oxidation le corrosion ea lik'hemik'hale, esita le mocheso o phahameng. Ho tšoarella hona ho ba etsa khetho e nepahetseng bakeng sa tlhahiso ea semiconductor, epitaxy, le lisebelisoa tse ling tsa mocheso o phahameng tse hlokang ho nepahala le ho ts'epahala.
Thepa e phahameng ea mocheso ea SemiceraTantalum CarbideLi-heaters tsa MOCVD li kenya letsoho ho ntlafatseng ts'ebetso ea ts'ebetso. Kaho ea bona e matla e fokotsa ho atolosoa ha mocheso le tahlehelo ea mocheso, ho netefatsa hore mocheso o ajoa ka mokhoa o ts'oanang ho pholletsa le substrate. Sena se lebisa ho boleng bo ntlafetseng ba sehlahisoa le ho fokotsa litšenyehelo tsa ts'ebetso.
Semicera e inehetse ho fana ka licheso tse sa kopaneng feela empa li feta litekanyetso tsa indasteri. Emong le emongTantalum CarbideMOCVD Heater e feta mehato e tiileng ea taolo ea boleng ho netefatsa ts'ebetso e phahameng. Ka nako ea pele ea matsatsi a 30, Semicera e fana ka ts'episo le lebelo le hlokoang ke ts'ebetso ea morao-rao ea indasteri.
Ebang ke semiconductor, aerospace, kapa masimo a lipatlisiso tsa thepa, SemiceraTantalum CarbideLi-heaters tsa MOCVD ke tharollo ea ho fumana liphetho tse phahameng lits'ebetsong tsa mocheso o phahameng. Ts'ebetso ea bona e ikhethang ho 2300 ° C e etsa hore e be tsa bohlokoa haholo bakeng sa lits'ebetso moo ho nepahala le ho tšoarella ho leng bohlokoa.
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ka le ntle le TaC
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Kamora ho sebelisa TaC (ka ho le letona)
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