Bajari ba Wafer ba nang le Silicon Carbide (SiC) Coating

Bapalami ba Wafer ba nang le Silicon Carbide (SiC) Coating Featured Image

Tlhaloso e Khutšoanyane:

Wafer carrier e nang le silicon carbide (SiC) ke karoloana e sebelisoang tlhahisong ea semiconductor. E tšoauoa ka lera la thepa ea silicon carbide e koahetsoeng holim'a sejana sa liphaphatha. Silicon carbide e na le conductivity e ntle ea mocheso le ho hanyetsa mocheso o phahameng, e leng se etsang hore e be thepa e loketseng bakeng sa tsamaiso ea mocheso lits'ebetsong tsa semiconductor.

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Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Tlhaloso

Bajari ba WaferkaSeaparo sa Silicon Carbide (SiC).ho tloha semicera li entsoe ka boqhetseke bakeng sa kholo ea ts'ebetso e phahameng ea epitaxial, ho netefatsa liphetho tse nepahetsengKe EpitaxyleSiC Epitaxylits'ebetso. Li-carriers tse entsoeng ka mokhoa o nepahetseng oa Semicera li hahiloe ho mamella maemo a feteletseng, li li etsa likarolo tsa bohlokoa ho MOCVD Susceptor systems bakeng sa liindasteri tse hlokang ho nepahala le ho tšoarella nako e telele.

Li-wafer carriers li na le mekhoa e mengata, li tšehetsa lits'ebetso tsa bohlokoa ka lisebelisoa tse kangPSS Etching Carrier, ICP Etching Carrier, leSesebelisoa sa RTP. SiC Coating ea bona e matla e ntlafatsa ts'ebetso ea lits'ebetso tse kangLED EpitaxialSusceptor le Monocrystalline Silicon, ho netefatsa liphetho tse tsitsitseng esita le libakeng tse boima.

E fumaneha ka mekhoa e mengata, e kang Barrel Susceptor le Pancake Susceptor, bajari bana ba phetha karolo ea bohlokoa ho etsa photovoltaic le semiconductor, ho tšehetsa tlhahiso ea Photovoltaic Parts le ho tsamaisa GaN ka mekhoa ea SiC Epitaxy. Ka moralo oa bona o phahameng, bajari bana ke letlotlo la bohlokoa bakeng sa bahlahisi ba ikemiselitseng tlhahiso ea boleng bo holimo.

Anti-oxidation bohloeki bo phahameng ba SiC e koahetsoeng ka MOCVD

Likarolo tse ka Sehloohong

1 .Bohloeki bo phahameng ba SiC bo koahetsoeng ke graphite

2. Ho hanyetsa mocheso o phahameng & ho tšoana ha mocheso

3. Ho lokileSiC e koahetsoeng ka kristalebakeng sa bokahodimo bo boreledi

4. High durability khahlanong le ho hloekisa lik'hemik'hale

Lintlha tse ka sehloohong tsa CVD-SIC Coatings:

SiC-CVD
Botenya	(g/cc)	3.21
Matla a flexural	(Mpa)	470
Katoloso ea mocheso	(10-6/K)	4
Thermal conductivity	(W/mK)	300

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