Bajari ba Wafer ba nang le Silicon Carbide (SiC) Coating

Tlhaloso e Khutšoanyane:

Wafer carrier e nang le silicon carbide (SiC) ke karoloana e sebelisoang tlhahisong ea semiconductor. E tšoauoa ka lera la thepa ea silicon carbide e koahetsoeng holim'a sejana sa liphaphatha. Silicon carbide e na le conductivity e ntle ea mocheso le ho hanyetsa mocheso o phahameng, e leng se etsang hore e be thepa e loketseng bakeng sa tsamaiso ea mocheso lits'ebetsong tsa semiconductor.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Tlhaloso

CVD-SiC barbotage na le litšobotsi tsa sebopeho junifomo, thepa diseke ee, phahameng mocheso ho hanyetsa, k'habeche oxidation, bohloeki bo phahameng, ho hanyetsa acid & alkali le reagent organic, le thepa e tsitsitseng 'meleng le lik'hemik'hale.
 
Ha ho bapisoa le lisebelisoa tse phahameng tsa graphite, graphite e qala ho oxidize ho 400C, e tla baka tahlehelo ea phofo ka lebaka la oxidation, e leng se bakang tšilafalo ea tikoloho ho lisebelisoa tsa peripheral le likamore tsa vacuum, le ho eketsa litšila tsa tikoloho e hloekileng.
Leha ho le joalo, ho roala ha SiC ho ka boloka botsitso ba 'mele le lik'hemik'hale ka likhato tse 1600, E sebelisoa haholo indastering ea sejoale-joale, haholo indastering ea semiconductor.

Li-carriers tse koahetsoeng ka SiC li na le melemo e latelang:

1. Mocheso o phahameng oa mocheso: Silicon carbide e na le mocheso o phahameng oa mocheso 'me e ka tsamaisa mocheso o hlahisoang ka katleho ho tloha sephakeng ho ea tikolohong e potolohileng, ho ntlafatsa ts'ebetso ea tsamaiso ea mocheso ea ts'ebetso.

2. Ho hanyetsa mocheso o phahameng: Lisebelisoa tsa SiC li ka boloka botsitso ba sebopeho le matla a mechine libakeng tse phahameng tsa mocheso, 'me li loketse mekhoa ea semiconductor e nang le mocheso o phahameng oa mocheso.

3. Ho se sebetse ha lik'hemik'hale: SiC e na le khanyetso e phahameng ea lik'hemik'hale le oxidation, 'me e ka sireletsa bajari ba li-wafer ho likhase tse senyang le lik'hemik'hale.

4. Bophahamo ba sefahleho: Liaparo tsa SiC li ka fana ka seaparo sa junifomo le se bataletseng, se thusang ka boemo bo nepahetseng le botsitso ba li-wafers.

Litšobotsi tsena li etsa li-wafer carriers tse nang le liphahlo tsa silicon carbide tse sebelisoang haholo lits'ebetsong tsa mocheso o phahameng, li-semiconductors tsa matla, le lits'ebetso tse ling tse hlokang mocheso o phahameng oa mocheso le ho hanyetsa mocheso o phahameng.

Likarolo tse ka Sehloohong

1 .Bohloeki bo phahameng ba SiC bo koahetsoeng ke graphite

2. Ho hanyetsa mocheso o phahameng & ho tšoana ha mocheso

3. Khalase e ntle ea SiC e koahetsoeng bakeng sa sebaka se boreleli

4. High durability khahlanong le ho hloekisa lik'hemik'hale

Lintlha tse ka sehloohong tsa CVD-SIC Coatings:

SiC-CVD
Botenya (g/cc) 3.21
Matla a flexural (Mpa) 470
Katoloso ea mocheso (10-6/K) 4
Thermal conductivity (W/mK) 300

Ho paka le ho Romela

Matla a Phepelo:
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